US5149404A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fine line scribing of conductive material
Assignee: Nokia Bell Labs
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Filing: 1990-12-14
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Granted: 1992-09-22
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Expires: 2010-12-14
Abstract
Abstract Fine lines (approximately 3 microns or less) are patternable on conductive materials by electromachining techniques. These micro-techniques differ from conventional electromachining in that the linewidth is primarily determined by the characteristics of the electric field rather than the electrode geometry.
Inventors
- 👤 Greg E Blonder
- 👤 Theodore A. Fulton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 03:49
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/02; H05K3/08; C; C25; C25F; C25F3/00; C25F3/02; C25F3/12; C25F3/14
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
133 words
A process for fabricating a body including a pattern delineated in a material of said body comprising the steps of delineating said material and completing said body characterized in that said delineation step comprises removing a portion of said material of said body through the use of an electric field emanating from an electrode tip to said material wherein said electric field controls said delineation, whereby the spatial resolution of said delineation is determined by the shape of said electric field, rather than by the shape of said electrode, and wherein this spatial resolution is such that the linewidth of said pattern is at least 1.25 times the diameter of said electrode tip and the geometry of said pattern is determined by translation of said electrode relative to the surface of said material.
Claim 2
Dependent Claim
133 words
A process for fabricating a body including a pattern delineated in a material of said body comprising the steps of delineating said material and completing said body characterized in that said delineation step comprises removing a portion of said material of said body through the use of an electric field emanating from an electrode tip to said material wherein said electric field controls said delineation, whereby the spatial resolution of said delineation is determined by the shape of said electric field, rather than by the shape of said electrode, and wherein this spatial resolution is such that the linewidth of said pattern is at least 1.25 times the diameter of said electrode tip and the geometry of said pattern is determined by translation of said electrode relative to the surface of said material.
Claim 3
Dependent Claim
21 words
The process of claim 1 wherein said lines of electric force act on said body by a process comprising electrolytic etching.
Claim 4
Dependent Claim
14 words
The process of claim 2 wherein said delineation step is performed with shaped electrodes.
Claim 5
Dependent Claim
22 words
The process of claim 1 wherein said lines of electric force act on said body by a process comprising pulse plasma vaporization.
Claim 6
Dependent Claim
15 words
The process of claim 1 wherein said body is an electrical conductor throughout its bulk.
Claim 7
Dependent Claim
21 words
The process of claim 5 wherein said lines of electric force act on said body by said process of electrolytic etching.
Claim 8
Dependent Claim
22 words
The process of claim 5 wherein said lines of electric force act on said body by the process of pulse plasma vaporization.
Claim 9
Dependent Claim
17 words
The process of claim 1 wherein said body comprises a conductive film laid over an insulating substrate.
Claim 10
Dependent Claim
17 words
The process of claim 8 wherein said body comprises a chromium film laid over said insulating substrate.
Claim 11
Dependent Claim
20 words
The process of claim 8 wherein said insulating substrate comprises an optically transparent medium such as glass, plastic or silica.
Claim 12
Dependent Claim
27 words
The process of claim 8 wherein said body comprises a semiconductor doped or otherwise treated so that it comprises an electrical conductor overlaid on a semi-insulating semiconductor.
Claim 13
Dependent Claim
21 words
The process of claim 8 wherein said body comprises a film of indium tin oxide overlaying a sheet of transparent plastic.
Claim 14
Dependent Claim
21 words
The process of claim 8 wherein said lines of electric force act on said body by the process of electrolytic etching.
Claim 15
Dependent Claim
22 words
The process of claim 8 wherein said lines of electric force act on said body by the process of pulse plasma vaporization.
Claim 16
Dependent Claim
16 words
The process of claim 1 wherein said body to be fabricated is a hybrid integrated circuit.
Claim 17
Dependent Claim
15 words
The process of claim 1 wherein said body to be fabricated is a lithographic mask.
Claim 18
Dependent Claim
16 words
The process of claim 16 wherein said lithographic mask to be fabricated comprises a reticle mask.
References Cited (Backward Citations)
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-22 | 1996-03-23 | 1996-09-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-22 | 2000-03-23 | 2000-09-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-22 | 2004-03-23 | 2004-09-22 | $7700.00 | Window Closed / Lapsed |