US4283259A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for maskless chemical and electrochemical machining
Assignee: International Business Machines Corp
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Filing: 1979-05-08
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Granted: 1981-08-11
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Expires: 1999-05-08
Abstract
Abstract A method for high resolution maskless chemical and electrochemical machining is described. Preferential etching results from exposing those regions where machining is sought to an energy beam. Such exposures can increase the ething rate in the case of electrochemical machining by a factor of 103 to 104. Such enhancement is sufficient to make masking unnecessary.
Inventors
- 👤 Robert L. Melcher
- 👤 Lubomyr T. Romankiw
- 👤 Robert J. VON Gutfeld
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 06:10
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/66; H10P50/663; H10P50/667; C; C23; C23F; C23F1/00; C23F1/02; C25; C25F; C25F3/00; C25F3/02; C25F3/14
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
83 words
A method of selectively electrochemical machining regions of a surface of a non-photolytically active workpiece comprising the following steps: placing the surface to be machined in an electrolyte; placing a cathode in electrolyte; focusing an energy beam having an intensity of between about 10 2 W/cm 2 and 10 6 W/cm 2 onto the workpiece to locally heat the regions of the surface where preferential machining is sought; and establish an electric potential between the workpiece serving as an anode and said cathode.
Claim 2
Independent Claim
83 words
A method of selectively electrochemical machining regions of a surface of a non-photolytically active workpiece comprising the following steps: placing the surface to be machined in an electrolyte; placing a cathode in electrolyte; focusing an energy beam having an intensity of between about 10 2 W/cm 2 and 10 6 W/cm 2 onto the workpiece to locally heat the regions of the surface where preferential machining is sought; and establish an electric potential between the workpiece serving as an anode and said cathode.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein said beam is laser generated.
Claim 4
Dependent Claim
10 words
The method of claim 2 wherein said beam is modulated.
Claim 5
Dependent Claim
25 words
The method of claim 2 wherein the surface to be machined is not greater than 5 mil and is supported on a nonthermal conducting substrate.
Claim 6
Independent Claim
54 words
A method for electrochemical machining a region of a surface of a non-photolytically active workpiece employing an electrolyte and a cathode, the improvement comprising: directing a light beam having an intensity of greater than about 10 2 W/cm 2 to heat the region of the surface to be machined to increase the machining rate.
Claim 7
Independent Claim
54 words
A method for electrochemical machining a region of a surface of a non-photolytically active workpiece employing an electrolyte and a cathode, the improvement comprising: directing a light beam having an intensity of greater than about 10 2 W/cm 2 to heat the region of the surface to be machined to increase the machining rate.
Claim 8
Independent Claim
86 words
A method for selectively electrochemical machining regions of a surface of a workpiece comprising the following steps: placing a cathode in an electrolyte; focusing a modulated laser beam having an intensity of between about 10 2 W/cm 2 and 10 6 W/cm 2 onto a workpiece to locally heat the regions of the surface where preferential machining is sought; and applying an electrical potential between the workpiece which serves as an anode and the cathode, said electrical potential being pulsed in synchronism with said modulated beam.
Claim 9
Independent Claim
86 words
A method for selectively electrochemical machining regions of a surface of a workpiece comprising the following steps: placing a cathode in an electrolyte; focusing a modulated laser beam having an intensity of between about 10 2 W/cm 2 and 10 6 W/cm 2 onto a workpiece to locally heat the regions of the surface where preferential machining is sought; and applying an electrical potential between the workpiece which serves as an anode and the cathode, said electrical potential being pulsed in synchronism with said modulated beam.
Claim 10
Independent Claim
50 words
A method for chemical machining regions of a surface by contacting the surface with an etching solution, the improvement comprising: directing a light beam having an intensity of greater than about 10 2 W/cm 2 to heat the region of the surface to be machined to increase the etching rate.
Claim 11
Independent Claim
50 words
A method for chemical machining regions of a surface by contacting the surface with an etching solution, the improvement comprising: directing a light beam having an intensity of greater than about 10 2 W/cm 2 to heat the region of the surface to be machined to increase the etching rate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-08-10 | 1985-02-09 | 1985-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-08-10 | 1989-02-09 | 1989-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-08-10 | 1993-02-09 | 1993-08-11 | $7700.00 | Window Closed / Lapsed |