US3706645A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process including photolytic enhancement for anodic dissolution of a gallium arsenide wafer
Assignee: United States Department of the Army
•
Filing: 1971-09-30
•
Granted: 1972-12-19
•
Expires: 1991-09-30
Abstract
Abstract A PHOTOLYTIC PROCESS IS USED TO ENHANCE CHEMICAL OR ELECTROCHEMICAL ANODIC DISSOLUTION OF ONE SIDE OF A P-TYPE GALLIUM ARSENIDE WAFER. PHOTONS FROM A LASER SOURCE ARE FOCUSED OVER 50% OF THE ONE SIDE OF THE GALLIUM ARSENIDE WAFER BY MEANS OF FIBER OPTICS. THE PHOTONS PASS THROUGH A TRANSPARENT CONTAINER FILLED WITH A LIQUID ELECTROLYTE IN WHICH THE WAFER IS TOTALLY IMMERSED DURING THE PROCESS. AN INCANDESCENT LIGHT SOURCE COMPLETELY FLOODS THE OTHER SIDE OF THE WAFER THAT IS OPPOSITE THE ONE SIDE. THE OTHER SIDE OF THE WAFER IS MADE PASSIVE TO THE ELECTROLYTE BY APPLYING FILM, SUCH AS SILICON DIXOIDE THERETO.
Inventors
- 👤 Howard G Lasser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 12:59
CPC Classifications
C; C25; C25F; C25F3/00; C25F3/02; C25F3/12; H; H01; H01J; H01J43/00; H01J43/04; H01J43/06; H01J43/18; H01J43/24
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-19 | 1976-06-19 | 1976-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-19 | 1980-06-19 | 1980-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-19 | 1984-06-19 | 1984-12-19 | $7700.00 | Window Closed / Lapsed |