Low damage-producing, anisotropic, chemically enhanced etching method and apparatus

Claim 2

Anisotropic chemically enhanced etching apparatus producing low surface damage and comprising: (a) an evacuated main chamber in which an etching process takes place; (b) a stage for receiving and holding a substrate to be etched within said main chamber; (c) duct means for directing a flow of gas radicals from an excited and disassociated reactive gas into said main chamber against a substrate to be etched mounted on said stage; (d) cracking means connected to a supply of a reactive gas in molecular form on an input side and connected to said duct means on an output side for exciting and disassociating said reactive gas to be discharged through said duct means as gas radicals; (e) ion gun means for producing a beam of ions and for directing said beam of ions against a substrate to be etched mounted on said stage; and, (f) first control means operably connected to said ion gun means for controlling said beam of ions.

Claim 3

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 and additionally comprising said main chamber including: (a) load-locking means for suppressing residual gas contamination; and, (b) an associated preparation chamber for the introduction of a substrate to be etched into said main chamber.

Claim 4

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 wherein: said duct means includes nozzle means positioned such that in the vicinity of the substrate being etched said nozzle means produces a concentrated stream of reactive gas radicals that can be adsorbed to said substrate.

Claim 5

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 and additionally comprising: second control means operably connected to said cracking means for controlling the μW power to said cracking means and the flow of molecular reactive gas into said cracking means whereby the flow of gas radicals being emitted from said nozzle means is controlled.

Claim 6

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 wherein said first control means comprises: (a) control circuit means for controlling the operating parameters of said ion gun means; and, (b) ion sensor means disposed within said main chamber and operably connected to said control circuit means for sensing the qualities of said beam of ions striking a substrate mounted on said stage and for providing a feedback signal reflecting those qualities to said control circuit means.

Claim 7

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 wherein said cracking means comprises: a microwave cavity.

Claim 8

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 6 wherein: (a) said microwave cavity has quartz inlet and outlet pipes connected therethrough; (b) said inlet pipe is connected to said supply of molecular reactive gas; and, (c) said microwave cavity is sandwiched between a pair of annular Samarium Cobalt magnets disposed over said inlet and outlet pipes, respectively, to produce an axial magnetic field that confines plasma from the quartz inner walls of said pipes so that the recombinatorial enhancing effect of the quartz on gas radicals passing therethrough is minimized.

Claim 9

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 7 wherein additionally: the strength of the B-field produced by said magnets is chosen to achieve electron cyclotron resonance in the center of said microwave cavity.

Claim 10

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 6 wherein: said microwave cavity is a quarter-wavelength resonator tuned to oscillate at 2.45 GHz.

Claim 11

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 1 wherein: (a) said ion gun means is an ion gun wherein the ion energy produced thereby is controlled by grids contained therein which are operably connect to said first control means; and, (b) said ion gun means is connected to a supply of inert gas whereby said beam of ions is a beam of inert gas ions.

Claim 12

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 10 wherein: (a) said inert gas is argon whereby said beam of ions is a beam of Ar + ions; and, (b) said reactive gas is chlorine whereby molecular chlorine is excited and disassociated to be discharged through said duct means as chlorine radicals.

Claim 13

the anisotropic chemically enhanced etching apparatus of claim 1 wherein: (a) said ion gun means is an Electron-Cyclotron-Resonance (ECR) microwave plasma source; and, (b) said ion gun means is connected to a supply of inert gas whereby said beam of ions is a beam of inert gas ions.

Claim 14

The low-damage, anisotropic, chemically enhanced etching apparatus of claim 12 wherein: (a) said inert gas is argon whereby said beam of ions is a beam of Ar + ions; and, (b) said reactive gas is chlorine whereby molecular chlorine is excited and disassociated to be discharged through said duct means as chlorine radicals.

Claim 15

The anisotropic chemically enhanced etching apparatus of claim 2 wherein: said stage is temperature controlled, tiltable, and movable between said preparation chamber means and said main chamber.

Claim 16

Anisotropic chemically enhanced etching apparatus producing low surface damage and comprising: (a) an evacuated main chamber in which an etching process takes place; (b) a stage for receiving and holding a substrate to be etched within said main chamber; (c) nozzle means for directing a flow of chlorine radicals from excited and disassociated chlorine into said main chamber and against a substrate to be etched mounted on said stage; (d) cracking means connected to a supply of molecular chlorine on an input side and connected to said nozzle means on an output side for exciting and disassociating said molecular chlorine to be discharged through said nozzle means, said nozzle means being positioned such that in the vicinity of the substrate being etched said nozzle means produces a concentrated stream of chlorine radicals that can be adsorbed to said substrate; (c) first control means operably connected to said cracking means for controlling the flow of chlorine radicals being emitted from said nozzle means; (f) ion gun means for producing a beam of ions and for directing said beam of ions against a substrate to be etched mounted on said stage; and, (g) second control means operably connected to said ion gun means for controlling said beam of ions.

Claim 17

Anisotropic chemically enhanced etching apparatus producing low surface damage and comprising: (a) an evacuated main chamber in which an etching process takes place; (b) a stage for receiving and holding a substrate to be etched within said main chamber; (c) nozzle means for directing a flow of chlorine radicals from excited and disassociated chlorine into said main chamber and against a substrate to be etched mounted on said stage; (d) cracking means connected to a supply of molecular chlorine on an input side and connected to said nozzle means on an output side for exciting and disassociating said molecular chlorine to be discharged through said nozzle means, said nozzle means being positioned such that in the vicinity of the substrate being etched said nozzle means produces a concentrated stream of chlorine radicals that can be adsorbed to said substrate; (c) first control means operably connected to said cracking means for controlling the flow of chlorine radicals being emitted from said nozzle means; (f) ion gun means for producing a beam of ions and for directing said beam of ions against a substrate to be etched mounted on said stage; and, (g) second control means operably connected to said ion gun means for controlling said beam of ions.

Claim 18

the low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein: said first control means includes means for controlling the flow of chlorine radicals being emitted from said nozzle means by controlling the μW power to said cracking means and the flow of molecular chlorine into said cracking means.

Claim 19

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein: said main chamber includes load-locking means for suppressing residual gas contamination and an associated preparation chamber for the introduction of a substrate to be etched into said main chamber.

Claim 20

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein said second control means comprises: (a) control circuit means for controlling the operating parameters of said ion gun means; and, (b) ion sensor means disposed within said main chamber and operably connected to said control circuit means for sensing the qualities of said beam of ions striking a substrate mounted on said stage and for providing a feedback signal reflecting those qualities to said control circuit means.

Claim 21

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein said cracking means comprises: a microwave cavity.

Claim 22

the low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 19 wherein: (a) said microwave cavity has quartz inlet and outlet pipes connected therethrough; (b) said inlet pipe is connected to said supply of molecular chlorine; and, (c) said microwave cavity is sandwiched between a pair of annular Samarium Cobalt magnets disposed over said inlet and outlet pipes, respectively, to produce an axial magnetic field that confines plasma from the quartz inner walls of said pipes so that the recombinatorial enhancing effect of the quartz on chlorine radicals passing therethrough is minimized.

Claim 23

the low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 20 wherein additionally: the strength of the B-field produced by said magnets is chosen to achieve cyclotron resonance in the center of said microwave cavity.

Claim 24

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 19 wherein: said microwave cavity is a quarter-wavelength resonator tuned to oscillate at 2.45 GHz.

Claim 25

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein: (a) said ion gun means is an ion gun wherein the ion energy produced thereby is controlled by grids contained therein which are operably connect to said first control means; and, (b) said ion gun means is connected to a supply of inert gas whereby said beam of ions is a beam of ions of said inert gas.

Claim 26

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 23 wherein: said inert gas is Argon whereby said beam of ions is a beam of Ar + ions.

Claim 27

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 15 wherein: (a) said ion gun means is an Electron-Cyclotron-Resonance (ECR) microwave plasma source; and, (b) said ion gun means is connected to a supply of argon gas whereby said beam of ions is a beam of Ar + ions.

Claim 28

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 17 wherein: said stage is temperature controlled, tiltable, and movable between said preparation chamber means and said main chamber.

Claim 29

Low damage-producing, anisotropic, chemically enhanced etchng apparatus comprising: (a) an evacuated main chamber in which an etching process takes place including load-locking means for suppressing residual gas contamination and an associated preparation chamber for the introduction of a substrate to be etched into said main chamber; (b) a temperature controlled tiltable stage for receiving and holding a substrate to be etched, said stage being movable between said preparation chamber means and said main chamber; (c) nozzle means for directing a flow of chlorine radicals from excited and disassociated chlorine against a substrate to be etched mounted on said tiltable stage when said stage is located in said main chamber; (d) microwave cavity cracking means having quartz inlet and outlet pipes connected to an internal microwave cavity with said inlet pipe being connected to a supply of molecular chlorine and said outlet pipe being connected to said nozzle means for selectively exciting and disassociating said molecular chlorine to be discharged through said nozzle means, said nozzle means being positioned to produce a stream of chlorine radicals that can be adsorbed to said substrate; (e) a pair of annular Samarium Cobalt magnets disposed over said inlet and outlet pipes, respectively, to produce an axial magnetic field that confines plasma from the quartz inner walls of said pipes so that the recombinatorial enhancing effort of the quartz on chlorine radicals passing therethrough is minimized. (f) first control means operably connected to said microwave cavity cracking means for controlling the flow of chlorine radicals being emitted from said nozzle means by controlling the μW power to said microwave cavity cracking means and the flow of molecular chlorine into said microwave cavity cracking means; (g) ion gun means for producing a beam of ions and for directing said beam of ions against a substrate to be etched mounted on said tiltable stage; and, (h) second control means operably connected to said ion gun means for controlling said beam of ions, said second control means comprising, (h1) control circuit means for controlling the operating parameters of said ion gun means; and, (h2) ion sensor means disposed within said main chamber and operably connected to said control circuit means for sensing the qualities of said beam of ions striking a substrate mounted on said stage and for providing a feedback signal reflecting those qualities to said control circuit means.

Claim 30

Low damage-producing, anisotropic, chemically enhanced etchng apparatus comprising: (a) an evacuated main chamber in which an etching process takes place including load-locking means for suppressing residual gas contamination and an associated preparation chamber for the introduction of a substrate to be etched into said main chamber; (b) a temperature controlled tiltable stage for receiving and holding a substrate to be etched, said stage being movable between said preparation chamber means and said main chamber; (c) nozzle means for directing a flow of chlorine radicals from excited and disassociated chlorine against a substrate to be etched mounted on said tiltable stage when said stage is located in said main chamber; (d) microwave cavity cracking means having quartz inlet and outlet pipes connected to an internal microwave cavity with said inlet pipe being connected to a supply of molecular chlorine and said outlet pipe being connected to said nozzle means for selectively exciting and disassociating said molecular chlorine to be discharged through said nozzle means, said nozzle means being positioned to produce a stream of chlorine radicals that can be adsorbed to said substrate; (e) a pair of annular Samarium Cobalt magnets disposed over said inlet and outlet pipes, respectively, to produce an axial magnetic field that confines plasma from the quartz inner walls of said pipes so that the recombinatorial enhancing effort of the quartz on chlorine radicals passing therethrough is minimized. (f) first control means operably connected to said microwave cavity cracking means for controlling the flow of chlorine radicals being emitted from said nozzle means by controlling the μW power to said microwave cavity cracking means and the flow of molecular chlorine into said microwave cavity cracking means; (g) ion gun means for producing a beam of ions and for directing said beam of ions against a substrate to be etched mounted on said tiltable stage; and, (h) second control means operably connected to said ion gun means for controlling said beam of ions, said second control means comprising, (h1) control circuit means for controlling the operating parameters of said ion gun means; and, (h2) ion sensor means disposed within said main chamber and operably connected to said control circuit means for sensing the qualities of said beam of ions striking a substrate mounted on said stage and for providing a feedback signal reflecting those qualities to said control circuit means.

Claim 31

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 27 wherein additionally: the strength of the B-field produced by said magnets is chosen to achieve electron cyclotron resonance in the center of said microwave cavity.

Claim 32

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 27 wherein: said microwave cavity is a quarter-wavelength resonator tuned to oscillate at 2.45 GHz.

Claim 33

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 27 wherein: (a) said ion gun means is an ion gun wherein the ion energy produced thereby is controlled by grids contained therein which are operably connect to said first control means; and, (b) said ion gun means is connected to a supply of argon gas whereby said beam of ions is a beam of Ar + ions.

Claim 34

The low damage-producing, anisotropic, chemically enhanced etching apparatus of claim 27 wherein: (a) said ion gun means is an Electron-Cyclotron-Resonance (ECR) microwave plasma source; and, (b) said ion gun means is connected to a supply of argon gas whereby said beam of ions is a beam of Ar + ions.

Claim 37

The method of claim 32 wherein said step (g) of connecting second control means to the ion gun to control the beam of ions comprises the step of: (a) providing a control circuit for controlling the operating parameters of the ion gun; and, (b) providing an ion sensor disposed within the chamber and operably connected to the control circuit for sensing the qualities of the beam of ions striking a substrate mounted on the stage and for providing a feedback signal reflecting those qualities to the control circuit.

Claim 38

The method of claim 32 wherein the microwave cavity has quartz inlet and outlet pipes and additionally comprising the step of: disposing a pair of annular Samarium Cobalt magnets over the inlet and outlet pipes, respectively, to produce an axial magnetic field that confines plasma from the quartz inner walls of the pipes so that the recombinatorial enhancing effect of the quartz on chlorine radicals passing therethrough is minimized.

Claim 39

The method of claim 34 wherein the step of disposing a pair of annular Samarium Cobalt magnets over the inlet and outlet pipes includes the step of: choosing magnets such that the strength of the B-field produced by the magnets achieves electron cyclotron resonance in the center of the microwave cavity.

Claim 40

The method of claim 32 wherein the microwave cavity is a quarterwavelength resonator and additionally comprising the step of: tuning the cavity to oscillate at 2.45 GHz.

Claim 41

The method of claim 32 wherein the ion gun means is an ion gun wherein the ion energy produced thereby is controlled by grids contained therein and said step (g) of connecting second control means to the ion gun to control the beam of ions comprises the step of: connecting a control circuit to the grids.

Claim 42

The method of claim 32 and additionally comprising the step of: connecting a nozzle between the outlet from the microwave cavity and a point close adjacent the stage to concentrate a flow of chlorine radicals emerging therefrom against a sustrate being held by said stage.

Claim 43

In anisotropic chemically enhanced etching apparatus including an evacuated main chamber in which an etching process takes place, a stage for receiving and holding a substrate to be etched within the main chamber, and a duct for directing a flow of gas radicals from an excited and disassociated reactive gas into the main chamber against a substrate to be etched mounted on the stage, the method of operation to etch a substrate while producing low surface damage comprising the steps of: (a) mounting a substrate to be etched on the stage; (b) connecting microwave cracking means to a supply of a reactive gas in molecular form on an input side and connecting an output side to the duct so as to excite and disassociate the reactive gas and discharge it through the duct as reactive gas radicals; (c) connecting an ion gun to a supply of an inert gas on an input side so as to produce a beam of inert gas ions; and, (d) directing the beam of inert gas ions against the substrate.

Claim 44

In anisotropic chemically enhanced etching apparatus including an evacuated main chamber in which an etching process takes place, a stage for receiving and holding a substrate to be etched within the main chamber, and a duct for directing a flow of gas radicals from an excited and disassociated reactive gas into the main chamber against a substrate to be etched mounted on the stage, the method of operation to etch a substrate while producing low surface damage comprising the steps of: (a) mounting a substrate to be etched on the stage; (b) connecting microwave cracking means to a supply of a reactive gas in molecular form on an input side and connecting an output side to the duct so as to excite and disassociate the reactive gas and discharge it through the duct as reactive gas radicals; (c) connecting an ion gun to a supply of an inert gas on an input side so as to produce a beam of inert gas ions; and, (d) directing the beam of inert gas ions against the substrate.

Claim 45

the method of claim 39 and additionally comprising the steps of: (a) controlling the μW power to the microwave cracking means; (b) controlling the flow rate of the reactive gas in molecular form into the input side of μ the microwave cracking means; and, (c) controlling the inert gas ion beam by means of a control signal operably connected to control grids contained in the ion gun.