US4756794A
Expired / Lapsed
US
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Atomic layer etching
Assignee: United States Department of the Navy
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Filing: 1987-08-31
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Granted: 1988-07-12
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Expires: 2007-08-31
Abstract
Abstract An apparatus, and method therefor, for removing a single atomic layer fromhe surface of a crystalline diamond. In a preferred embodiment, the apparatus comprises: a first delivery system for flooding the surface of the diamond with a pulse of nitrogen dioxide during a first phase of operation to cause a monolayer of nitrogen oxide to be adsorbed to the surface of the diamond; and a second delivery system for impacting the surface of the diamond with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation in order to remove a single atomic layer from the surface of the diamond. In a preferred method for removing a single atomic layer from the surface of a crystalline diamond, the method comprises the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during the first phase of operation; and impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation in order to remove a single atomic layer from the surface of the diamond.
Inventors
- 👤 Max N. Yoder
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 03:48
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/20; H10P50/24; H10P50/242; H10P52/00; H10P95/00; H10P95/70
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
59 words
A method for removing a single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during a first phase of operation; and impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation.
Claim 2
Independent Claim
59 words
A method for removing a single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during a first phase of operation; and impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation.
Claim 3
Dependent Claim
36 words
The method of claim 1 wherein said flooding step comprises the steps of: producing the pulse of nitrogen dioxide during the first phase of operation; and directing the pulse of nitrogen dioxide onto the diamond surface.
Claim 4
Dependent Claim
53 words
The method of claim 1 wherein said impacting step includes the steps of: producing a pulse of mixed noble and hydrogen gasses during the second phase of operation; and ionizing the pulse of mixed noble and hydrogen gasses to cause a pulse of ions of said mixed gasses to impact the diamond surface.
Claim 5
Dependent Claim
94 words
The method of claim 1 wherein: said flooding step comprises the steps of: producing the pulse of nitrogen dioxide during the first phase of operation, and directing the pulse of nitrogen dioxide onto the diamond surface; and said inpacting step includes the steps of: producing a pulse of mixed noble and hydrogen gasses during the second phase of operation, and ionizing the pulse of mixed noble and hydrogen gasses to cause a pulse of ions of said mixed gasses to inpact the diamond surface to remove the single atomic layer from the diamond surface.
Claim 6
Independent Claim
99 words
A method for removing a preselected number of single atomic layers from the surface of a crystalline diamond, said method comprising the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during a first phase of operation; impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond; and repeating both of the flooding and impacting steps each time that an additional atomic layer is to be removed from the surface of the diamond.
Claim 7
Independent Claim
99 words
A method for removing a preselected number of single atomic layers from the surface of a crystalline diamond, said method comprising the steps of: flooding the diamond surface with a pulse of nitrogen dioxide during a first phase of operation; impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond; and repeating both of the flooding and impacting steps each time that an additional atomic layer is to be removed from the surface of the diamond.
Claim 8
Dependent Claim
36 words
The method of claim 5 wherein said flooding step comprises the steps of: producing the pulse of nitrogen dioxide during the first phase of operation; and directing the pulse of nitrogen dioxide onto the diamond surface.
Claim 9
Dependent Claim
53 words
The method of claim 5 wherein said impacting step includes the steps of: producing a pulse of mixed noble and hydrogen gasses during the second phase of operation; and ionizing the pulse of mixed noble and hydrogen gasses to cause a pulse of ions of said mixed gasses to impact the diamond surface.
Claim 10
Dependent Claim
53 words
The method of claim 6 wherein said impacting step includes the steps of: producing a pulse of mixed noble and hydrogen gasses during the second phase of operation; and ionizing the pulse of mixed noble and hydrogen gasses to cause a pulse of ions of said mixed gasses to impact the diamond surface.
Claim 11
Independent Claim
120 words
A method for removing at least one single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: masking the surface of the diamond with a material having a preselected pattern and being unaffected by nitrogen dioxide; flooding the preselected pattern with a pulse of nitrogen dioxide during a first phase of operation; impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to etch out from the surface of the diamond a single atomic layer conforming to said preselected pattern; and repeating both of the flooding and impacting steps for each additional atomic layer to be removed from the surface of the diamond.
Claim 12
Independent Claim
120 words
A method for removing at least one single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: masking the surface of the diamond with a material having a preselected pattern and being unaffected by nitrogen dioxide; flooding the preselected pattern with a pulse of nitrogen dioxide during a first phase of operation; impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to etch out from the surface of the diamond a single atomic layer conforming to said preselected pattern; and repeating both of the flooding and impacting steps for each additional atomic layer to be removed from the surface of the diamond.
Claim 13
Independent Claim
114 words
A method for removing at least one single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: (a) flooding the diamond surface with a pulse of nitrogen dioxide gas to cause a monolayer of nitrogen dioxide to be adsorbed to the diamond surface during a first phase of operation; (b) purging the nitrogen dioxide gas from the space around the diamond; (c) impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond; and (d) purging the space about the diamond of any ions and gasses.
Claim 14
Independent Claim
114 words
A method for removing at least one single atomic layer from the surface of a crystalline diamond, said method comprising the steps of: (a) flooding the diamond surface with a pulse of nitrogen dioxide gas to cause a monolayer of nitrogen dioxide to be adsorbed to the diamond surface during a first phase of operation; (b) purging the nitrogen dioxide gas from the space around the diamond; (c) impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond; and (d) purging the space about the diamond of any ions and gasses.
Claim 15
Dependent Claim
29 words
The method of claim 10 further including the step of: repeating steps (a) through (d) for each additional atomic layer to be removed from the surface of the diamond.
Claim 16
Dependent Claim
44 words
The method of claim 10 further including before step (a) the further steps of: cleaning the diamond surface by impacting it with a pulse of ions of mixed noble and hydrogen gasses; and purging the space about the diamond of any ions and gasses.
Claim 17
Dependent Claim
29 words
The method of claim 12 further including the step of: repeating steps (a) through (d) for each additional atomic layer to be removed from the surface of the diamond.
Claim 18
Dependent Claim
58 words
The method of claim 13 further including between the purging the space step and step (a) the further step of: masking the surface of the diamond with a material having a preselected pattern and being unaffected by nitrogen dioxide; and wherein said impacting step includes the step of: conforming each removed single atomic layer to the preselected pattern.
Claim 19
Independent Claim
77 words
An apparatus for removing at least one single atomic layer from the surface of a crystalline diamond, said apparatus comprising: means for flooding the surface of the crystalline diamond with a pulse of nitrogen dioxide during a first phase of operation; and means for impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond.
Claim 20
Independent Claim
77 words
An apparatus for removing at least one single atomic layer from the surface of a crystalline diamond, said apparatus comprising: means for flooding the surface of the crystalline diamond with a pulse of nitrogen dioxide during a first phase of operation; and means for impacting the diamond surface with a pulse of ions of mixed noble and hydrogen gasses during a second phase of operation to remove a single atomic layer from the surface of the diamond.
Claim 21
Dependent Claim
55 words
The apparatus of claim 15 wherein said impacting means comprises: a source for producing a pulse of mixed noble and hydrogen gasses during the second phase of operation; and means responsive to the pulse of mixed noble and hydrogen gasses for causing a pulse of ions of said mixed gasses to impact the diamond surface.
Claim 22
Dependent Claim
41 words
The apparatus of claim 15 wherein said flooding means comprises: first source means for producing a pulse of nitrogen dioxide during the first phase of operation; and means for directing the pulse of nitrogen dioxide onto the surface of the diamond.
Claim 23
Dependent Claim
60 words
The apparatus of claim 17 wherein said impacting means comprises: second source means for producing a pulse of mixed noble and hydrogen gasses during the second phase of operation; and means for outputting the pulse of ions of said mixed noble and hydrogen gasses to impact the diamond surface in response to said pulse of mixed noble and hydrogen gasses.
Claim 24
Independent Claim
309 words
An apparatus for removing at least one single atomic layer from the surface of a crystalline diamond, said apparatus comprising: a chamber for holding the crystalline diamond; a timing control unit for selectively generating a plurality of signals; a first delivery system comprised of a first source of nitrogen dioxide, a gas directing device inserted into said chamber, and a first valve coupled between said first source and said gas directing device, said first valve being responsive to a first signal from said timing control unit for enabling a pulse of nitrogen dioxide from said first source to pass through said gas directing device to flood the surface of said diamond and cause a monolayer of nitrogen dioxide to be adsorbed to the diamond surface during a first phase of operation; an exhaust vacuum pump coupled to said chamber and being responsive to a second signal from said timing control unit for purging the nitrogen dioxide from said chamber during a second phase of operation; and a second delivery system comprised of a second source of mixed noble and hydrogen gasses, an ion gun inserted into said chamber, and a second valve coupled between said second source and said ion gun, said second valve being responsive to a third signal from said timing control unit for enabling a pulse of mixed noble and hydrogen gasses from said second source to pass into said ion gun, said ion gun being responsive to the pulse of mixed noble and hydrogen gasses for causing a pulse of ions of said mixed noble and hydrogen gasses to impact the diamond surface during a third phase of operation to remove a single atomic layer from the surface of the diamond; said exhaust vacuum pump being responsive to a fourth signal from said timing control unit for purging said chamber of any ions and gasses.
Claim 25
Independent Claim
309 words
An apparatus for removing at least one single atomic layer from the surface of a crystalline diamond, said apparatus comprising: a chamber for holding the crystalline diamond; a timing control unit for selectively generating a plurality of signals; a first delivery system comprised of a first source of nitrogen dioxide, a gas directing device inserted into said chamber, and a first valve coupled between said first source and said gas directing device, said first valve being responsive to a first signal from said timing control unit for enabling a pulse of nitrogen dioxide from said first source to pass through said gas directing device to flood the surface of said diamond and cause a monolayer of nitrogen dioxide to be adsorbed to the diamond surface during a first phase of operation; an exhaust vacuum pump coupled to said chamber and being responsive to a second signal from said timing control unit for purging the nitrogen dioxide from said chamber during a second phase of operation; and a second delivery system comprised of a second source of mixed noble and hydrogen gasses, an ion gun inserted into said chamber, and a second valve coupled between said second source and said ion gun, said second valve being responsive to a third signal from said timing control unit for enabling a pulse of mixed noble and hydrogen gasses from said second source to pass into said ion gun, said ion gun being responsive to the pulse of mixed noble and hydrogen gasses for causing a pulse of ions of said mixed noble and hydrogen gasses to impact the diamond surface during a third phase of operation to remove a single atomic layer from the surface of the diamond; said exhaust vacuum pump being responsive to a fourth signal from said timing control unit for purging said chamber of any ions and gasses.
Claim 26
Dependent Claim
41 words
The apparatus of claim 19 further including a mask having a preselected pattern being initially deposited on the surface of the diamond so that each single atomic layer subsequently removed from the surface of the diamond conforms to the preselected pattern.
References Cited (Backward Citations)
US3563809A
Cited
US4599135A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-12 | 1992-01-11 | 1992-07-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-12 | 1996-01-11 | 1996-07-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-12 | 2000-01-11 | 2000-07-12 | $7700.00 | Window Closed / Lapsed |