Patent US5445994A successfully refreshed from Google Patents.
US5445994A
Expired / Lapsed
US
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Method for forming custom planar metal bonding pad connectors for semiconductor dice
Assignee: Micron Technology Inc
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Filing: 1994-04-11
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Granted: 1995-08-29
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Expires: 2014-04-11
Abstract
Abstract A method for forming custom planar connections to the bonding pads of a semiconductor die is provided. The method includes the steps of: depositing a passivation layer on the bonding pads; forming a patterning layer by depositing a dielectric material such as TEOS on the passivation layer; etching through the patterning layer and passivation layer to the bond pads using a first etch mask; etching a connector pattern in the patterning layer using a second etch mask; depositing a metal layer over the patterning layer; and then planarizing the metal layer to an endpoint of the patterning layer to form planar metal connectors having a desired thickness.
Inventors
- 👤 Terry L. Gilton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 09:27
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/056; H10W20/40; H10W90/00; H10W72/00; H10W72/071; H10W72/075; H10W72/50; H10W72/541; H10W72/5449; H10W72/59; H10W72/60; H10W72/834; H10W72/90; H10W72/951; H10W72/952; H10W90/20; H10W90/284; H10W90/701; H10W90/751; H10W90/756
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
148 words
A method for forming planar metal connectors to bonding pads electrically connected to integrated circuits on a semiconductor die comprising: depositing a passivation layer over the die and bonding pads; depositing a patterning layer over the passivation layer said patterning layer deposited with a thickness "t"; etching the patterning layer and the passivation layer to form a pattern of openings through the passivation layer and through the patterning layer to the bonding pads; etching the patterning layer to form a mold for the connectors, said mold having openings aligned with the openings to the bonding pads and formed in a desired pattern; depositing a metal layer over the patterning layer and into the etched mold and the openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form the connectors in the desired pattern and with the thickness "t".
Claim 2
Independent Claim
148 words
A method for forming planar metal connectors to bonding pads electrically connected to integrated circuits on a semiconductor die comprising: depositing a passivation layer over the die and bonding pads; depositing a patterning layer over the passivation layer said patterning layer deposited with a thickness "t"; etching the patterning layer and the passivation layer to form a pattern of openings through the passivation layer and through the patterning layer to the bonding pads; etching the patterning layer to form a mold for the connectors, said mold having openings aligned with the openings to the bonding pads and formed in a desired pattern; depositing a metal layer over the patterning layer and into the etched mold and the openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form the connectors in the desired pattern and with the thickness "t".
Claim 3
Dependent Claim
18 words
The method as defined in claim 1 and wherein the planarizing step is performed using chemical mechanical planarization.
Claim 4
Dependent Claim
18 words
The method as defined in claim 1 and wherein the planarizing step is performed using a dry etch.
Claim 5
Dependent Claim
18 words
The method as defined in claim 1 and wherein the patterning layer is formed from tetraethyl orthosilicate (TEOS).
Claim 6
Dependent Claim
28 words
The method as defined in claim 1 and wherein the connectors extend to an edge of the die and are sized to facilitate wire bonding to the die.
Claim 7
Dependent Claim
43 words
The method as defined in claim 1 and further comprising forming the connectors to an edge of the die and vertically stacking multiple dice on a substrate with each die supported on its edge and with the connectors electrically connected to the substrate.
Claim 8
Independent Claim
170 words
A method for forming planar metal connectors for bonding pads electrically connected to integrated circuits formed on a semiconductor die comprising: depositing a passivation layer over the bonding pads; depositing a dielectric material over the passivation layer to form a patterning layer having a thickness of "t" measured from an endpoint of the passivation layer; etching the patterning layer and the passivation layer using a first etch mask to form bonding pad openings through both layers and to the bonding pads; etching the patterning layer using a second etch mask to form an etched mold for forming the connectors with a desired pattern, said etched mold having openings aligned with the openings to the bonding pads; depositing a metal layer over the patterning layer into the etched mold and into the openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form planar connectors to the bonding pads said planar connectors formed in the desired pattern and having a thickness "t".
Claim 9
Independent Claim
170 words
A method for forming planar metal connectors for bonding pads electrically connected to integrated circuits formed on a semiconductor die comprising: depositing a passivation layer over the bonding pads; depositing a dielectric material over the passivation layer to form a patterning layer having a thickness of "t" measured from an endpoint of the passivation layer; etching the patterning layer and the passivation layer using a first etch mask to form bonding pad openings through both layers and to the bonding pads; etching the patterning layer using a second etch mask to form an etched mold for forming the connectors with a desired pattern, said etched mold having openings aligned with the openings to the bonding pads; depositing a metal layer over the patterning layer into the etched mold and into the openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form planar connectors to the bonding pads said planar connectors formed in the desired pattern and having a thickness "t".
Claim 10
Dependent Claim
18 words
The method as recited in claim 7 and wherein planarizing the metal layer is using chemical mechanical planarization.
Claim 11
Dependent Claim
22 words
The method as recited in claim 7 and wherein planarizing the metal layer is by etching back using a dry etch process.
Claim 12
Dependent Claim
38 words
The method as recited in claim 7 and further comprising forming the connectors to an edge of the die and vertically stacking the die on edge and electrically connecting the die to a supporting substrate using the connectors.
Claim 13
Dependent Claim
18 words
The method as recited in claim 7 and wherein the patterning layer is formed from tetraethyl orthosilicate (TEOS).
Claim 14
Dependent Claim
20 words
The method as recited in claim 7 and wherein the thickness "t" is from about 2 μm to 10 μm.
Claim 15
Dependent Claim
31 words
The method as recited in claim 7 and wherein the metal connectors are formed in the desired pattern and are sized to facilitate wire bonding to a leadframe for the die.
Claim 16
Dependent Claim
33 words
The method as recited in claim 7 and wherein the metal connectors are formed in the desired pattern to facilitate wire bonding to a lead finger configuration of a leadframe for the die.
Claim 17
Independent Claim
178 words
A method for forming planar metal connectors to bonding pads electrically connected to integrated circuits on a semiconductor die comprising: depositing a passivation layer on a face of the die and over the bonding pads; depositing a dielectric material over the passivation layer to form a patterning layer having a thickness of "t" measured from an endpoint of the passivation layer; etching the patterning layer and the passivation layer using a first etch mask to form openings through both layers to the bonding pads; etching the patterning layer using a second etch mask to form a mold in the patterning layer for forming the connectors, said mold including openings aligned with the openings to the bonding pads and formed in a desired pattern on the face of the die; depositing a metal layer over the patterning layer and into the mold and openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form planar metal conductors having a thickness of "t" measured from the endpoint of the passivation layer.
Claim 18
Independent Claim
178 words
A method for forming planar metal connectors to bonding pads electrically connected to integrated circuits on a semiconductor die comprising: depositing a passivation layer on a face of the die and over the bonding pads; depositing a dielectric material over the passivation layer to form a patterning layer having a thickness of "t" measured from an endpoint of the passivation layer; etching the patterning layer and the passivation layer using a first etch mask to form openings through both layers to the bonding pads; etching the patterning layer using a second etch mask to form a mold in the patterning layer for forming the connectors, said mold including openings aligned with the openings to the bonding pads and formed in a desired pattern on the face of the die; depositing a metal layer over the patterning layer and into the mold and openings to the bonding pads; and then planarizing the metal layer to an endpoint of the patterning layer to form planar metal conductors having a thickness of "t" measured from the endpoint of the passivation layer.
Claim 19
Dependent Claim
19 words
The method as recited in claim 15 and wherein the metal layer is deposited using a wave soldering process.
Claim 20
Dependent Claim
23 words
The method as recited in claim 15 and wherein the patterning layer is formed from tetraethyl orthosilicate (TEOS) deposited by plasma enhanced CVD.
Claim 21
Dependent Claim
34 words
The method as recited in claim 15 and wherein the die is a lead-on-chip (LOC) die and the connectors are formed in the desired pattern to facilitate a wire bonding process for the die.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-08-28 | 1999-02-27 | 1999-08-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-08-28 | 2003-02-27 | 2003-08-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-08-28 | 2007-02-27 | 2007-08-29 | $7700.00 | Window Closed / Lapsed |