US5149674A
Expired / Lapsed
US
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Method for making a planar multi-layer metal bonding pad
Assignee: NXP USA Inc
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Filing: 1991-06-17
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Granted: 1992-09-22
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Expires: 2011-06-17
Abstract
Abstract A method is provided for planarizing a multi-layer metal bonding pad. A first metal layer (13) is provided. A first dielectric layer (14) is provided with a multitude of vias (17) covering the first metal layer (13), thereby exposing portions of the first metal layer (13) through the multitude of vias (17) in the first dielectric (14). A second metal layer (18) is deposited on the first dielectric layer (14) making electrical contact to the first metal layer through the multitude of vias (17). Planarization of the second metal layer (18) is achieved by having the second metal layer (18) cover the first dielectric layer (14) and making contact through the vias (17).
Inventors
- 👤 John L. Freeman, Jr.
- 👤 Clarence J. Tracy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:06
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W72/00; H10W72/01; H10W72/019; H10W72/90; H10W72/931; H10W72/934; H10W72/981; H10W72/983
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
122 words
A method for making a planar multi-layer metal bonding pad comprising: providing a first metal layer; providing a first dielectric layer with a multitude of vias that cover the first metal layer so that portions of the first metal layer are exposed through the multitude of vias in the first dielectric; depositing a second metal layer on the first dielectric layer with a multitude of vias, thereby filling the multitude of vias so that an electrical contact is made to the first metal layer, thereby planarizing the second metal layer by elevating the second metal layer above the first metal layer by the first dielectric layer; and providing a final dielectric layer with a single opening that exposes the second metal layer.
Claim 2
Independent Claim
122 words
A method for making a planar multi-layer metal bonding pad comprising: providing a first metal layer; providing a first dielectric layer with a multitude of vias that cover the first metal layer so that portions of the first metal layer are exposed through the multitude of vias in the first dielectric; depositing a second metal layer on the first dielectric layer with a multitude of vias, thereby filling the multitude of vias so that an electrical contact is made to the first metal layer, thereby planarizing the second metal layer by elevating the second metal layer above the first metal layer by the first dielectric layer; and providing a final dielectric layer with a single opening that exposes the second metal layer.
Claim 3
Dependent Claim
17 words
The method of claim 1 further comprising having the multitude of vias on sequential dielectric layers staggered.
Claim 4
Dependent Claim
23 words
The method of claim 1 further comprising having additional sequential layers of dielectric layers with a multitude of vias and interposed metal layers.
Claim 5
Independent Claim
132 words
A method for planarizing a multilevel metal pad on a semiconductor substrate comprising: providing a first metal layer; providing a first dielectric layer with a multitude of vias covering the first metal layer, thereby exposing portions of the first metal layer through the multitude of vias in the first dielectric layer; depositing a second metal layer on the first dielectric layer and making electrical contact through the multitude of vias to the first metal layer, thereby planarizing the second metal layer by having the second metal layer covering the first dielectric layer; and depositing a second dielectric layer with a single opening that exposes the second metal layer; and depositing a third metal layer that covers the single opening, thereby filling the opening and making electrical contact to the second metal layer.
Claim 6
Independent Claim
132 words
A method for planarizing a multilevel metal pad on a semiconductor substrate comprising: providing a first metal layer; providing a first dielectric layer with a multitude of vias covering the first metal layer, thereby exposing portions of the first metal layer through the multitude of vias in the first dielectric layer; depositing a second metal layer on the first dielectric layer and making electrical contact through the multitude of vias to the first metal layer, thereby planarizing the second metal layer by having the second metal layer covering the first dielectric layer; and depositing a second dielectric layer with a single opening that exposes the second metal layer; and depositing a third metal layer that covers the single opening, thereby filling the opening and making electrical contact to the second metal layer.
Claim 7
Dependent Claim
30 words
The method of claim 4 further comprising additional sequential dielectric layers with a multitude of vias and interposed metal layers between the second metal layer and the second dielectric layer.
Claim 8
Independent Claim
173 words
A method for planarizing a multiple layer metal pad comprising: providing a first metal layer; providing a first dielectric with a multitude of vias that cover the first metal layer; providing a second metal layer that covers the multitude of vias, thereby filling the multitude of vias, making electrical contact between the first metal layer and the second metal layer, as well as planarizing the second metal layer; providing a second dielectric with a multitude of vias that cover the second metal layer, thereby exposing the second metal layer through the multitude of vias; providing a third metal layer that covers the multitude of vias of the second dielectric, thereby filling the multitude of vias, making electrical contact between the second and third metal layer, as well as planarizing the third metal layer; providing a final dielectric layer with a single opening that exposes the third metal layer; and providing a final metal layer that covers the single opening, thereby filling the single opening and making electrical contact to the third metal layer.
Claim 9
Independent Claim
173 words
A method for planarizing a multiple layer metal pad comprising: providing a first metal layer; providing a first dielectric with a multitude of vias that cover the first metal layer; providing a second metal layer that covers the multitude of vias, thereby filling the multitude of vias, making electrical contact between the first metal layer and the second metal layer, as well as planarizing the second metal layer; providing a second dielectric with a multitude of vias that cover the second metal layer, thereby exposing the second metal layer through the multitude of vias; providing a third metal layer that covers the multitude of vias of the second dielectric, thereby filling the multitude of vias, making electrical contact between the second and third metal layer, as well as planarizing the third metal layer; providing a final dielectric layer with a single opening that exposes the third metal layer; and providing a final metal layer that covers the single opening, thereby filling the single opening and making electrical contact to the third metal layer.
Claim 10
Dependent Claim
19 words
The method of claim 6 further comprising filling of the multitude of vias by a multitude of metal plugs.
Claim 11
Dependent Claim
16 words
The method of claim 6 further comprising depositing a passivating layer on the final metal layer.
Claim 12
Dependent Claim
62 words
Planarizing a multiple layer metallic bonding pad on a semiconductor device by elevating sequential metal layers, composing the metallic bonding pad, by interposing dielectric layers between the sequential metal layers, providing electrical contact between the sequential metal layers through vias in the interposed dielectric layers, and providing a final dielectric layer with a single opening, thus exposing a last sequential metal layer.
Claim 13
Dependent Claim
62 words
Planarizing a multiple layer metallic bonding pad on a semiconductor device by elevating sequential metal layers, composing the metallic bonding pad, by interposing dielectric layers between the sequential metal layers, providing electrical contact between the sequential metal layers through vias in the interposed dielectric layers, and providing a final dielectric layer with a single opening, thus exposing a last sequential metal layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-22 | 1996-03-23 | 1996-09-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-22 | 2000-03-23 | 2000-09-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-22 | 2004-03-23 | 2004-09-22 | $7700.00 | Window Closed / Lapsed |