Apparatus for forming deposited film

Claim 1

An apparatus for forming a deposited film by bringing a gaseous starting material for forming the deposited film into contact with a gaseous halogenic oxidizing agent having the property of oxidative action on the gaseous starting material, which comprises: a chamber in which the deposited film is formed; a plurality of elongated gas discharge means in the chamber, each arranged substantially equidistant from the center portion of said chamber, each of said gas discharge means including first and second gas discharge conduits, said first gas discharge conduit for discharging the gaseous starting material and said second gas discharge gas conduit for discharging the gaseous halogenic oxidizing agent; said first and second gas discharge conduits each including a plurality of orifices for discharging their respective gases and each said first gas discharge conduit being positioned substantially adjacent and parallel to said second gas discharge conduit of the same gas discharge means, said adjacent and parallel first and second gas discharge conduits being positioned in such an arrangement so as to provide sufficient mixing of the gaseous starting material and gaseous halogenic oxidizing agent being discharged from said adjacent and parallel conduits so as to cause a chemical reaction between the two gases and effect the formation of said deposited film; a plurality of substrate support means each positioned equidistant from the center portion of said chamber and positioned relative to at least one of the gas discharge means such that a cylindrical substrate mounted thereon is capable of receiving the deposited film formed by the interaction of the gaseous starting material and gaseous halogenic oxidizing agent discharged by said at least one of the gas discharge means; and means for imparting rotational motion to each of said substrate support means.

Claim 2

An apparatus for forming a deposited film by bringing a gaseous starting material for forming the deposited film into contact with a gaseous halogenic oxidizing agent having the property of oxidative action on the gaseous starting material, which comprises: a chamber in which the deposited film is formed; a plurality of elongated gas discharge means in the chamber, each arranged substantially equidistant from the center portion of said chamber, each of said gas discharge means including first and second gas discharge conduits, said first gas discharge conduit for discharging the gaseous starting material and said second gas discharge gas conduit for discharging the gaseous halogenic oxidizing agent; said first and second gas discharge conduits each including a plurality of orifices for discharging their respective gases and each said first gas discharge conduit being positioned substantially adjacent and parallel to said second gas discharge conduit of the same gas discharge means, said adjacent and parallel first and second gas discharge conduits being positioned in such an arrangement so as to provide sufficient mixing of the gaseous starting material and gaseous halogenic oxidizing agent being discharged from said adjacent and parallel conduits so as to cause a chemical reaction between the two gases and effect the formation of said deposited film; a plurality of substrate support means each positioned equidistant from the center portion of said chamber and positioned relative to at least one of the gas discharge means such that a cylindrical substrate mounted thereon is capable of receiving the deposited film formed by the interaction of the gaseous starting material and gaseous halogenic oxidizing agent discharged by said at least one of the gas discharge means; and means for imparting rotational motion to each of said substrate support means.