Patent US7508490B2 successfully refreshed from Google Patents.
US7508490B2
Expired / Lapsed
US
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Exposure apparatus and device manufacturing method
Assignee: Nikon Corp
•
Filing: 2006-01-05
•
Granted: 2009-03-24
•
Expires: 2026-01-05
Abstract
Abstract An exposure apparatus exposes a substrate by forming a liquid immersion region on the substrate, and projecting a pattern image onto the substrate via a projection optical system and a liquid that forms the liquid immersion region. The exposure apparatus includes: a liquid supply mechanism that has a supply port arranged to oppose a surface of the substrate; and a buffer space formed in a channel of the liquid supply mechanism; wherein the liquid is supplied to the supply port after reserving a prescribed amount or more of liquid in the buffer space.
Inventors
- 👤 Hiroyuki Nagasaka
- 👤 Takeshi Okuyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 17:50
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70858; G03F7/70883; G03F7/70216; G03F7/70341
Claims Analysis
Total Claims: 68
Claim 1
Independent Claim
135 words
An exposure apparatus that exposes a substrate by projecting a pattern image onto the substrate via a liquid, the exposure apparatus comprising: a projection optical system that projects the pattern image onto the substrate via the liquid in a space, the projection optical system including an optical member that comes into contact with the liquid in the space; an object disposed adjacent to the optical member of the projection optical system; and a gap formed between a surface of the optical member of the projection optical system and a surface of the object, the gap being in fluidic communication with the space, wherein at least a portion of at least one of the surface of the optical member and the surface of the object includes a liquid restricting portion that restricts the flow of liquid.
Claim 2
Dependent Claim
135 words
An exposure apparatus that exposes a substrate by projecting a pattern image onto the substrate via a liquid, the exposure apparatus comprising: a projection optical system that projects the pattern image onto the substrate via the liquid in a space, the projection optical system including an optical member that comes into contact with the liquid in the space; an object disposed adjacent to the optical member of the projection optical system; and a gap formed between a surface of the optical member of the projection optical system and a surface of the object, the gap being in fluidic communication with the space, wherein at least a portion of at least one of the surface of the optical member and the surface of the object includes a liquid restricting portion that restricts the flow of liquid.
Claim 3
Dependent Claim
16 words
An exposure apparatus according to claim 1 , wherein the liquid restricting portion is liquid repellent.
Claim 4
Dependent Claim
18 words
An exposure apparatus according to claim 1 , wherein the liquid restricting nortion includes a liquid prevention material.
Claim 5
Dependent Claim
17 words
An exposure apparatus according to claim 3 , wherein the liquid prevention material includes a film material.
Claim 6
Dependent Claim
15 words
An exposure apparatus according to claim 4 , wherein the film material is liquid repellent.
Claim 7
Dependent Claim
23 words
An exposure apparatus according to claim 1 , wherein the optical member is arranged at a terminating end of the projection optical system.
Claim 8
Dependent Claim
42 words
An exposure apparatus according to claim 6 , wherein the surface of the optical member includes a side surface of the optical member, and the gap is formed between the side surface of the optical member and the surface of the object.
Claim 9
Dependent Claim
16 words
An exposure apparatus according to claim 7 , wherein the gap extends away from the substrate.
Claim 10
Dependent Claim
22 words
An exposure apparatus according to claim 7 , wherein the surface of the object surrounds the side surface of the optical member.
Claim 11
Dependent Claim
26 words
An exposure apparatus according to claim 6 , wherein the gap is in fluidic communication with the space through a lower end portion of the gap.
Claim 12
Dependent Claim
43 words
An exposure apparatus according to claim 10 , wherein during the exposure, the substrate is moved to a position at which a surface of the substrate faces the lower end portion of the gap, and wherein the gap extends away from the substrate.
Claim 13
Dependent Claim
24 words
An exposure apparatus according to claim 11 , wherein the liquid restricting portion prevents the liquid on the substrate from flowing into the gap.
Claim 14
Dependent Claim
31 words
An exposure apparatus according to claim 1 , wherein the object includes a member that is included in a liquid immersion system that forms a liquid immersion region on the substrate.
Claim 15
Dependent Claim
28 words
An exposure apparatus according to claim 4 , wherein the member has a buffer space and the liquid is supplied to a supply port via the buffer space.
Claim 16
Dependent Claim
33 words
A device manufacturing method comprising: projecting an image of a pattern onto a substrate through the projection optical system of the exposure apparatus according to claim 1 , and processing the exposed substrate.
Claim 17
Dependent Claim
28 words
An exposure apparatus according to claim 6 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 18
Dependent Claim
28 words
An exposure apparatus according to claim 6 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 19
Dependent Claim
17 words
An exposure apparatus according to claim 6 , wherein the liquid restricting portion has liquid repelling properties.
Claim 20
Dependent Claim
18 words
An exposure apparatus according to claim 18 , wherein the liquid restricting portion includes a liquid repellent film.
Claim 21
Dependent Claim
42 words
An exposure apparatus according to claim 1 , wherein the surface of the optical member includes a side surface of the optical member, and the gap is formed between the side surface of the optical member and the surface of the object.
Claim 22
Dependent Claim
22 words
An exposure apparatus according to claim 20 , wherein the surface of the object surrounds the side surface of the optical member.
Claim 23
Dependent Claim
26 words
An exposure apparatus according to claim 20 , wherein the gap is in fluidic communication with the space through a lower end portion of the gap.
Claim 24
Dependent Claim
16 words
An exposure apparatus according to claim 22 , wherein the gap extends away from the substrate.
Claim 25
Dependent Claim
28 words
An exposure apparatus according to claim 20 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 26
Dependent Claim
28 words
An exposure apparatus according to claim 20 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 27
Dependent Claim
17 words
An exposure apparatus according to claim 20 , wherein the liquid restricting portion has liquid repelling properties.
Claim 28
Dependent Claim
18 words
An exposure apparatus according to claim 26 , wherein the liquid restricting portion includes a liquid repellent film.
Claim 29
Dependent Claim
28 words
An exposure apparatus according to claim 1 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 30
Dependent Claim
26 words
An exposure apparatus according to claim 28 , wherein the gap is in fluidic communication with the space through a lower end portion of the gap.
Claim 31
Dependent Claim
16 words
An exposure apparatus according to claim 29 , wherein the gap extends away from the substrate.
Claim 32
Dependent Claim
17 words
An exposure apparatus according to claim 28 , wherein the liquid restricting portion has liquid repelling properties.
Claim 33
Dependent Claim
18 words
An exposure apparatus according to claim 31 , wherein the liquid restricting portion includes a liquid repellent film.
Claim 34
Dependent Claim
28 words
An exposure apparatus according to claim 1 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 35
Dependent Claim
26 words
An exposure apparatus according to claim 33 , wherein the gap is in fluidic communication with the space through a lower end portion of the gap.
Claim 36
Dependent Claim
16 words
An exposure apparatus according to claim 34 , wherein the gap extends away from the substrate.
Claim 37
Dependent Claim
17 words
An exposure apparatus according to claim 33 , wherein the liquid restricting portion has liquid repelling properties.
Claim 38
Dependent Claim
18 words
An exposure apparatus according to claim 36 , wherein the liquid restricting portion includes a liquid repellent film.
Claim 39
Dependent Claim
17 words
An exposure apparatus according to claim 1 , wherein the liquid restricting portion has liquid repelling properties.
Claim 40
Dependent Claim
18 words
An exposure apparatus according to claim 38 , wherein the liquid restricting portion includes a liquid repellent film.
Claim 41
Dependent Claim
35 words
An exposure apparatus according to claim 6 , wherein the pattern image is projected onto the substrate not through the surface of the optical member which forms the gap with the surface of the object.
Claim 42
Dependent Claim
35 words
An exposure apparatus according to claim 28 , wherein the pattern image is projected onto the substrate not through the surface of the optical member which forms the gap with the surface of the object.
Claim 43
Dependent Claim
35 words
An exposure apparatus according to claim 33 , wherein the pattern image is projected onto the substrate not through the surface of the optical member which forms the gap with the surface of the object.
Claim 44
Dependent Claim
35 words
An exposure apparatus according to claim 1 , wherein the pattern image is projected onto the substrate not through the surface of the optical member which forms the gap with the surface of the object.
Claim 45
Dependent Claim
16 words
An exposure apparatus according to claim 43 , wherein the gap extends away from the substrate.
Claim 46
Dependent Claim
43 words
An exposure apparatus according to claim 43 , wherein the surface of the optical member includes a side surface of the optical member, and wherein the gap is formed between the side surface of the optical member and the surface of the object.
Claim 47
Dependent Claim
135 words
An exposure apparatus that exposes a substrate by projecting a pattern image onto the substrate via a liquid, the exposure apparatus comprising: a projection optical system that projects the pattern image onto the substrate via the liquid in a space, the projection optical system including an optical member that comes into contact with the liquid in the space; an object disposed adjacent to the optical member of the projection optical system; and a gap formed between a surface of the optical member of the projection optical system and a surface of the object, the gap being in fluidic communication with the space, wherein at least a portion of at least one of the surface of the optical member and the surface of the object includes a liquid repellent surface that restricts the flow of liquid.
Claim 48
Dependent Claim
135 words
An exposure apparatus that exposes a substrate by projecting a pattern image onto the substrate via a liquid, the exposure apparatus comprising: a projection optical system that projects the pattern image onto the substrate via the liquid in a space, the projection optical system including an optical member that comes into contact with the liquid in the space; an object disposed adjacent to the optical member of the projection optical system; and a gap formed between a surface of the optical member of the projection optical system and a surface of the object, the gap being in fluidic communication with the space, wherein at least a portion of at least one of the surface of the optical member and the surface of the object includes a liquid repellent surface that restricts the flow of liquid.
Claim 49
Dependent Claim
20 words
An exposure apparatus according to claim 46 , wherein the liquid repellent surface includes a surface of liquid repellent film.
Claim 50
Dependent Claim
17 words
An exposure apparatus according to claim 47 , wherein the liquid repellent film includes a fluorine material.
Claim 51
Dependent Claim
17 words
An exposure apparatus according to claim 47 , wherein the liquid repellent film includes a silicon material.
Claim 52
Dependent Claim
23 words
An exposure apparatus according to claim 46 , wherein the optical member is arranged at a terminating end of the projection optical system.
Claim 53
Dependent Claim
43 words
An exposure apparatus according to claim 46 , wherein the surface of the optical member includes a side surface of the optical member, and wherein the gap is formed between the side surface of the optical member and the surface of the object.
Claim 54
Dependent Claim
35 words
An exposure apparatus according to claim 46 , wherein the pattern image is projected onto the substrate not through the surface of the optical member which forms the gap with the surface of the object.
Claim 55
Dependent Claim
43 words
An exposure apparatus according to claim 52 , wherein the surface of the optical member includes a side surface of the optical member, and wherein the gap is formed between the side surface of the optical member and the surface of the object.
Claim 56
Dependent Claim
28 words
An exposure apparatus according to claim 52 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 57
Dependent Claim
28 words
An exposure apparatus according to claim 52 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 58
Dependent Claim
16 words
An exposure apparatus according to claim 52 , wherein the gap extends away from the substrate.
Claim 59
Dependent Claim
18 words
An exposure apparatus according to claim 52 , wherein the surface of the object surrounds the optical member.
Claim 60
Dependent Claim
22 words
An exposure apparatus according to claim 52 , wherein the object includes a holding member by which the optical member is supported.
Claim 61
Dependent Claim
16 words
An exposure apparatus according to claim 46 , wherein the gap extends away from the substrate.
Claim 62
Dependent Claim
28 words
An exposure apparatus according to claim 59 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 63
Dependent Claim
28 words
An exposure apparatus according to claim 59 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 64
Dependent Claim
22 words
An exposure apparatus according to claim 59 , wherein the object includes a holding member by which the optical member is supported.
Claim 65
Dependent Claim
28 words
An exposure apparatus according to claim 46 , wherein the object includes a member that has a flow passage through which the liquid is supplied to the space.
Claim 66
Dependent Claim
28 words
An exposure apparatus according to claim 46 , wherein the object includes a member that has a flow passage through which the liquid is recovered from the space.
Claim 67
Dependent Claim
34 words
An exposure apparatus according to claim 46 , wherein the object includes a member having a lower surface, a liquid immersion region being formed between the lower surface of the member and the substrate.
Claim 68
Dependent Claim
33 words
A device manufacturing method comprising: projecting an image of a pattern onto a substrate through the projection optical system of the exposure apparatus according to claim 46 ; and processing the exposed substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2012-03-23 | 2012-09-22 | 2013-03-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2016-03-23 | 2016-09-22 | 2017-03-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2020-03-23 | 2020-09-22 | 2021-03-24 | $7700.00 | Window Closed / Lapsed |