EP0605103B1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Projection apparatus for immersed exposure
Assignee: Canon Inc
•
Filing: 1993-11-26
•
Granted: 1998-10-14
•
Expires: 2013-11-26
Abstract
No abstract record available.
Inventors
- 👤 Kazuo C/O Canon K.K. Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 17:47
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70216; G03F7/70341; G03F7/70733; G03F7/7075; G03F7/708; G03F7/70858; G03F7/70866; G03F7/70875; G03F7/70883; G03F7/70891
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
197 words
A projection exposure apparatus, comprising: illumination means (3) for illuminating a pattern
of an original (1); holding means (12) for holding a substrate (2); a projection optical system (4, 7) for projecting
an image of the pattern of the original (1) onto the
substrate (2) held by said holding means (12); characterised in that: said projection optical system (4, 7) comprises a
primary optical system (4) and a secondary optical system
(7) separate from said primary optical system (4), said
secondary optical system (7) including a planar optical
element (7) to be positioned in a portion of a projection
light path between said primary optical system (4) and
the substrate (2) when the pattern of the original (1)
is projected on to the substrate (2) through said
projection optical system (4, 7); and said apparatus further comprises a container (9)
adapted to be filled with a liquid material (23) so as
to be positioned between said optical element (7) and the
substrate (2) when the pattern of the original (1) is
projected on to the substrate (2) through said projection
optical system (4, 7) wherein said optical element (7)
provides a cover member for said container (9).
Claim 2
Dependent Claim
118 words
An apparatus according to claim 1, further
comprising an alignment measuring system (6, 16) for
detecting the positional relationship between the
substrate (2) and the image projected by said projection
optical system (4, 7) with respect to a horizontal
direction, a focus position detecting system for
detecting the positional relationship between the
substrate and the focus position of said projection
optical system (4, 7) with respect to a vertical
direction, and tilt means for moving and/or tilting said
holding means in X, Y and/or direction on the basis of
the detection through said alignment measuring system and
the focus position detecting system so as to bring a
pattern on the substrate into coincidence with the
projected image.
Claim 3
Dependent Claim
25 words
An apparatus according to claim 1, further
comprising conveying means (11-4) for loading and
unloading said container (9) onto and from said holding
means (12).
Claim 4
Dependent Claim
28 words
An apparatus according to claim 3, further
comprising means (20, 21) for executing the filling of
the container (9) with the liquid (23), upon said holding
means (12).
Claim 5
Dependent Claim
30 words
An apparatus according to claim 3, further
comprising means for executing the filling of the
container (9) with the liquid (23), at a position spaced
from said holding means (12).
Claim 6
Dependent Claim
17 words
An apparatus according to claim 3, wherein the
substrate (2) provides a base of said container (9).
Claim 7
Dependent Claim
52 words
An apparatus according to claim 1, wherein said
holding means (12) includes a portion for directly
supporting the substrate (2) which portion is separated
from said holding means (12), and wherein said portion
provides a base of said container (9) while the remaining
portion of said holding means holds said container (9).
Claim 8
Dependent Claim
16 words
An apparatus according to claim 6, wherein the
substrate (2) is detachable from said container (9).
Claim 9
Dependent Claim
24 words
An apparatus according to claim 1, wherein said
container (9) is arranged to provide one of a positive
pressure and a negative pressure therein.
Claim 10
Dependent Claim
21 words
An apparatus according to claim 1, wherein a portion
of said container (9) is made of a low thermal expansion
material.
Claim 11
Dependent Claim
24 words
An apparatus according to claim 1, wherein a portion
of the outer wall of said container (9) is covered by a
heat insulating material.
Claim 12
Dependent Claim
68 words
An apparatus according to claim 2, wherein said
alignment measuring system (6, 16) includes a measurement
reference mirror (16), wherein at least two adjoining
faces of the outer wall of said container (9) extend
perpendicularly to each other, and wherein said at least
two faces extend substantially perpendicularly to the
surface of the substrate (2) whereby said reference
mirror (16) is provided by said at least two faces.
Claim 13
Dependent Claim
17 words
An apparatus according to claim 1, wherein said
optical element (7) is detachable from said container
(9).
Claim 14
Dependent Claim
31 words
An apparatus according to claim 1, wherein said
container (9) includes pipe means with a valve (25-3),
for injection and discharging of the liquid into and out
of said container (9).
Claim 15
Dependent Claim
26 words
An apparatus according to claim 1, wherein said
container (9) has a reference mark to be used for placing
the same on said holding means (12).
Claim 16
Dependent Claim
24 words
An apparatus according to claim 1, further
comprising a pressure gauge (27) for detecting the
pressure of the liquid material in said container (9).
Claim 17
Dependent Claim
19 words
An apparatus according to claim 1, further
comprising pressure control means for controlling the
pressure of the filling liquid.
Claim 18
Dependent Claim
24 words
An apparatus according to claim 1, further
comprising a vacuum pump for providing a negative
pressure of the liquid material in said container (9).
Claim 19
Dependent Claim
23 words
An apparatus according to claim 1, further
comprising a thermometer (18) for measuring the
temperature of the liquid material in said container (9).
Claim 20
Dependent Claim
23 words
An apparatus according to claim 1, further
comprising temperature controlling means for controlling
the temperature of the liquid material in said container
(9).
Claim 21
Dependent Claim
24 words
An apparatus according to claim 1, further
comprising ultrasonic vibration means (22) for vibrating
the liquid material in said container (9) with ultrasonic
vibrations.
Claim 22
Dependent Claim
24 words
An apparatus according to claim 1, further
comprising a pump (20) for injecting and discharging the
liquid into and out of the container (9).
Claim 23
Dependent Claim
20 words
An apparatus according to claim 22, further
comprising filtering means (21) coupled to said pump
(20), for filtering the liquid.
Claim 24
Dependent Claim
46 words
An apparatus according to claim 1, further
comprising attitude control means for tilting or holding
said container (9) upright, wherein during injection of
the liquid into the container (9) said container (9) is
tilted or held upright so that the liquid is injected
thereinto from below.
Claim 25
Dependent Claim
25 words
An apparatus according to claim 5, wherein the
injection of the liquid into the container (9) and the
exposure operation are done at independent timings.
Claim 26
Dependent Claim
35 words
An apparatus according to claim 1, wherein said
container (9) is openable and closable so as to allow
loading and unloading of the substrate (2) into and out
of the inside of said container (9).
Claim 27
Dependent Claim
35 words
An apparatus according to claim 7, wherein said
holding means (12) includes a passageway for holding the
substrate (2) through vacuum attraction, and an
openable/closable shutter for preventing flow of the
liquid into said passageway.
Claim 28
Dependent Claim
25 words
An apparatus according to claim 1, further
comprising measuring means provided in said container
(9), for measuring any non-uniformness of illuminance
during the exposure operation.
Claim 29
Dependent Claim
30 words
An apparatus according to claim 7, wherein said
container (9) has a member operable as a reference in
respect to the positioning on another portion of said
holding means (12).
Claim 30
Dependent Claim
26 words
An apparatus according to claim 1, further
comprising means for providing at least one of electric
connection, pneumatic communication and vacuum
communication to said container (9).
Claim 31
Dependent Claim
22 words
An apparatus according to claim 1, further
comprising means for measuring the refractive index of
the liquid material in said container (9).
References Cited (Backward Citations)
No citation records indexed.
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