US5874820A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Window frame-guided stage mechanism
Assignee: Nikon Corp
•
Filing: 1995-04-04
•
Granted: 1999-02-23
•
Expires: 2015-04-04
Abstract
Abstract A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils on the window frame guide co-operating with magnetic tracks fixed on the base. The stage is driven inside the window frame guide in the Y-axis direction by motor coils located on the stage co-operating with magnetic tracks located on the window frame guide. Forces from the drive motors of both the window frame guide and the stage are transmitted through the center of gravity of the stage, thereby eliminating unwanted moments of inertia. Additionally, reaction forces caused by the drive motors are isolated from the projection lens and the alignment portions of the photolithography machine. This isolation is accomplished by providing a mechanical support for the stage independent of the support for its window frame guide. The window frame guide is a hinged structure capable of a slight yawing (rotational) motion due to hinged flexures which connect the window frame guide members.
Inventors
- 👤 Martin E. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 12:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716; G03F7/70725; G03F7/70216; G03F7/70358; G03F7/708; G03F7/70808; G03F7/70825; G03F7/70833; G03F7/70858; G03F7/709; Y; Y10; Y10T; Y10T74/00; Y10T74/20; Y10T74/20012; Y10T74/20201
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
108 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members flexibly connected together and laterally surrounding the stage thereby permitting a yaw movement of the frame in a plane defined by the principal surface of the base, a first and second of the members being opposing and in slidable contact with the stage; and first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.
Claim 2
Dependent Claim
108 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members flexibly connected together and laterally surrounding the stage thereby permitting a yaw movement of the frame in a plane defined by the principal surface of the base, a first and second of the members being opposing and in slidable contact with the stage; and first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.
Claim 3
Dependent Claim
35 words
The stage mechanism of claim 1, wherein the first and second members are each connected to both the third and fourth members by flexures, thereby allowing movement of each member relative to the other members.
Claim 4
Dependent Claim
38 words
The stage mechanism of claim 2, wherein each flexure comprises at least two strips of metal, the two strips each being connected to two of the members, and the two strips overlying one another in an X configuration.
Claim 5
Dependent Claim
24 words
The stage mechanism of claim 1, further comprising a plurality of fluid bearings located on an underside of the stage and confronting the base.
Claim 6
Dependent Claim
33 words
The stage mechanism of claim 1, further comprising at least two fluid bearings located on each of the third and fourth members and confronting, respectively, surfaces of the first and second fixed guides.
Claim 7
Dependent Claim
32 words
The stage mechanism of claim 1, further comprising a first motor element on each of the third and fourth members, thereby driving the frame relative to the first and second fixed guides.
Claim 8
Dependent Claim
35 words
The stage mechanism of claim 6, further comprising a second motor element on the base and associated with each of the respectively first and second fixed guides co-operating with one of the first motor elements.
Claim 9
Dependent Claim
37 words
The stage mechanism of claim 1, further comprising a first motor element located on opposing sides of the stage confronting respectively the first and second members, thereby driving the stage relative to the first and second members.
Claim 10
Dependent Claim
45 words
The stage mechanism of claim 1, further comprising a fluid bearing spring mounted on one of the third and fourth members and confronting a surface of one of the first and second fixed guides, thereby loading the frame against the first and second fixed guides.
Claim 11
Dependent Claim
37 words
The stage mechanism of claim 1, further comprising a support base for the first and second fixed guides and the frame members, the support base being supported independently of the base on which the stage is located.
Claim 12
Dependent Claim
45 words
The stage mechanism of claim 1, further comprising a fluid bearing gimbal mounted on one of the third and fourth members and confronting a surface of one of the first and second fixed guides, thereby loading the frame against the first and second fixed guides.
Claim 13
Independent Claim
76 words
A method of operating a stage moveable in two perpendicular directions, comprising the steps of: locating the stage on a base, the stage being adapted for flexing in the two perpendicular directions; laterally surrounding the stage with a frame in slidable contact with the stage; driving the frame in a first of the two perpendicular directions relative to the base; and driving the stage in a second of the two perpendicular directions relative to the frame.
Claim 14
Independent Claim
76 words
A method of operating a stage moveable in two perpendicular directions, comprising the steps of: locating the stage on a base, the stage being adapted for flexing in the two perpendicular directions; laterally surrounding the stage with a frame in slidable contact with the stage; driving the frame in a first of the two perpendicular directions relative to the base; and driving the stage in a second of the two perpendicular directions relative to the frame.
Claim 15
Dependent Claim
14 words
The method of claim 12, further comprising supporting the base independently from the frame.
Claim 16
Dependent Claim
117 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage, wherein the first and second members are each connected to both the third and fourth members by flexures, thereby allowing movement of each member relative to the other members; and first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.
Claim 17
Dependent Claim
117 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage, wherein the first and second members are each connected to both the third and fourth members by flexures, thereby allowing movement of each member relative to the other members; and first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.
Claim 18
Dependent Claim
128 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage; first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides; a first linear motor disposed between the third member and the first fixed guide; a second linear motor disposed between the fourth member and the second fixed guide; and a differential drive control connected to the first and second linear motors.
Claim 19
Dependent Claim
128 words
A stage mechanism moveable in two dimensions, comprising: a base defining a principal surface; a movable stage located on the principal surface of the base; a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage; first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides; a first linear motor disposed between the third member and the first fixed guide; a second linear motor disposed between the fourth member and the second fixed guide; and a differential drive control connected to the first and second linear motors.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-02-22 | 2002-08-24 | 2003-02-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-02-22 | 2006-08-24 | 2007-02-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-02-22 | 2010-08-24 | 2011-02-23 | $7700.00 | Window Closed / Lapsed |