US6633831B2
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US
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Methods and systems for determining a critical dimension and a thin film characteristic of a specimen
Assignee: KLA Tencor Technologies Corp
•
Filing: 2001-09-20
•
Granted: 2003-10-14
•
Expires: 2021-09-20
Abstract
Abstract Methods and systems for monitoring semiconductor fabrication processes are provided. A system may include a stage configured to support a specimen and coupled to a measurement device. The measurement device may include an illumination system and a detection system. The illumination system and the detection system may be configured such that the system may be configured to determine multiple properties of the specimen. For example, the system may be configured to determine multiple properties of a specimen including, but not limited to, critical dimension and a thin film characteristic. In this manner, a measurement device may perform multiple optical and/or non-optical metrology and/or inspection techniques.</PTEXT>
Inventors
- 👤 Mehrdad Nikoonahad
- 👤 Ady Levy
- 👤 Kyle A. Brown
- 👤 Gary Bultman
- 👤 Dan Wack
- 👤 John Fielden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70708; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; G01N21/47; G01N21/55; G01N21/62; G01N21/63; G01N21/636; G01N21/64; G01N21/84; G01N21/88; G01N21/94; G01N21/95; G01N21/9501; G01N21/956; G03F7/70483; G03F7/70605; G03F7/70616; G03F7/70625; G03F7/70633; G03F7/7065; G03F7/70653; G03F7/70658; G01N21/645; G01N21/6456; G01N2021/646; G01N21/8806; G01N2021/8822; G01N2021/8825; G01N21/9503; H; H01; H01J; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/31701; H10; H10P; H10P74/00; H10P74/20; H10P74/203; Y; Y10; Y10T; Y10T117/00; Y10T117/10; Y10T117/1004
Claims Analysis
Total Claims: 88
Claim 1
Independent Claim
146 words
A system configured to determine at least two properties of a specimen during use, comprising: a stage configured to support the specimen during use; a measurement device coupled to the stage, comprising: an illumination system configured to direct energy toward a surface of the specimen during use; and a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals in response to the detected energy during use; and a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 2
Independent Claim
146 words
A system configured to determine at least two properties of a specimen during use, comprising: a stage configured to support the specimen during use; a measurement device coupled to the stage, comprising: an illumination system configured to direct energy toward a surface of the specimen during use; and a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals in response to the detected energy during use; and a processor coupled to the measurement device and configured to determine a first property and a second property of the specimen from the one or more output signals during use, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 3
Dependent Claim
17 words
The system of claim 1 , wherein the stage is further configured to move laterally during use.
Claim 4
Dependent Claim
17 words
The system of claim 1 , wherein the stage is further configured to move rotatably during use.
Claim 5
Dependent Claim
19 words
The system of claim 1 , wherein the stage is further configured to move laterally and rotatably during use.
Claim 6
Dependent Claim
15 words
The system of claim 1 , wherein the illumination system comprises a single energy source.
Claim 7
Dependent Claim
16 words
The system of claim 1 , wherein the illumination system comprises more than one energy source.
Claim 8
Dependent Claim
16 words
The system of claim 1 , wherein the detection system comprises a single energy sensitive device.
Claim 9
Dependent Claim
17 words
The system of claim 1 , wherein the detection system comprises more than one energy sensitive devices.
Claim 10
Dependent Claim
15 words
The system of claim 1 , wherein the measurement device further comprises a non-imaging scatterometer.
Claim 11
Dependent Claim
14 words
The system of claim 1 , wherein the measurement device further comprises a scatterometer.
Claim 12
Dependent Claim
15 words
The system of claim 1 , wherein the measurement device further comprises a spectroscopic scatterometer.
Claim 13
Dependent Claim
14 words
The system of claim 1 , wherein the measurement device further comprises a reflectometer.
Claim 14
Dependent Claim
15 words
The system of claim 1 , wherein the measurement device further comprises a spectroscopic reflectometer.
Claim 15
Dependent Claim
16 words
The system of claim 1 , wherein the measurement device further comprises a coherence probe microscope.
Claim 16
Dependent Claim
17 words
The system of claim 1 , wherein the measurement device further comprises a bright field imaging device.
Claim 17
Dependent Claim
17 words
The system of claim 1 , wherein the measurement device further comprises a dark field imaging device.
Claim 18
Dependent Claim
20 words
The system of claim 1 , wherein the measurement device further comprises a bright field and dark field imaging device.
Claim 19
Dependent Claim
14 words
The system of claim 1 , wherein the measurement device further comprises an ellipsometer.
Claim 20
Dependent Claim
15 words
The system of claim 1 , wherein the measurement device further comprises a spectroscopic ellipsometer.
Claim 21
Dependent Claim
16 words
The system of claim 1 , wherein the measurement device further comprises a dual beam spectrophotometer.
Claim 22
Dependent Claim
16 words
The system of claim 1 , wherein the measurement device further comprises a beam profile ellipsometer.
Claim 23
Dependent Claim
94 words
The system of claim 1 , wherein the measurement device further comprises at least a first measurement device and a second measurement device, and wherein the first and second measurement devices are selected from the group consisting of a non-imaging scatterometer, a scatterometer, a spectroscopic scatterometer, a reflectometer, a spectroscopic reflectometer, a coherence probe microscope, a bright field imaging device, a dark field imaging device, a bright field and dark field imaging device, an ellipsometer, a spectroscopic ellipsometer, a dual beam spectrophotometer, a beam profile ellipsometer, a photo-acoustic device, and a grating X-ray reflectometer.
Claim 24
Dependent Claim
40 words
The system of claim 1 , wherein the measurement device further comprises at least a first measurement device and a second measurement device, and wherein optical elements of the first measurement device comprise optical elements of the second measurement device.
Claim 25
Dependent Claim
34 words
The system of claim 1 , wherein the illumination system and the detection system comprise non-optical components, and wherein the detected energy is responsive to a non-optical characteristic of the surface of the specimen.
Claim 26
Dependent Claim
22 words
The system of claim 1 , wherein the measurement device further comprises at least an eddy current device and a spectroscopic ellipsometer.
Claim 27
Dependent Claim
34 words
The system of claim 1 , wherein the measurement device further comprises at least an eddy current device and a spectroscopic ellipsometer, and wherein the system is coupled to an atomic layer deposition tool.
Claim 28
Dependent Claim
63 words
The system of claim 1 , wherein the processor is further configured to determine a third property of the specimen from the one or more output signals during use, and wherein the third property is selected from the group consisting of a roughness of the specimen, a roughness of a layer on the specimen, and a roughness of a feature of the specimen.
Claim 29
Dependent Claim
36 words
The system of claim 27 , wherein the system is coupled to a process tool selected from the group consisting of a lithography tool, an atomic layer deposition tool, a cleaning tool, and an etch tool.
Claim 30
Dependent Claim
26 words
The system of claim 1 , wherein the system is further configured to determine at least the two properties of the specimen substantially simultaneously during use.
Claim 31
Dependent Claim
74 words
The system of claim 1 , wherein the illumination system is further configured to direct energy to multiple locations on the surface of the specimen substantially simultaneously, and wherein the detection system is further configured to detect energy propagating from the multiple locations on the surface of the specimen substantially simultaneously such that one or more of the at least two properties of the specimen can be determined at the multiple locations substantially simultaneously.
Claim 32
Dependent Claim
15 words
The system of claim 1 , wherein the system is coupled to a process tool.
Claim 33
Dependent Claim
25 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the system is disposed within the process tool.
Claim 34
Dependent Claim
27 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the system is arranged laterally proximate to the process tool.
Claim 35
Dependent Claim
34 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the process tool comprises a wafer handler configured to move the specimen to the stage during use.
Claim 36
Dependent Claim
34 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the stage is configured to move the specimen from the system to the process tool during use.
Claim 37
Dependent Claim
40 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the system is further configured to determine at least the two properties of the specimen while the specimen is waiting between process steps.
Claim 38
Dependent Claim
51 words
The system of claim 1 , wherein the system is coupled to a process tool, wherein the process tool comprises a support device configured to support the specimen during a process step, and wherein an upper surface of the support device is substantially parallel to an upper surface of the stage.
Claim 39
Dependent Claim
52 words
The system of claim 1 , wherein the system is coupled to a process tool, wherein the process tool comprises a support device configured to support the specimen during a process step, and wherein an upper surface of the stage is angled with respect to an upper surface of the support device.
Claim 40
Dependent Claim
37 words
The system of claim 1 , wherein the system is coupled to a process tool, and wherein the process tool is selected from the group consisting of a lithography tool, an etch tool, and a deposition tool.
Claim 41
Dependent Claim
37 words
The system of claim 1 , wherein the system comprises a measurement chamber, wherein the stage and the measurement device are disposed within the measurement chamber, and wherein the measurement chamber is coupled to a process tool.
Claim 42
Dependent Claim
37 words
The system of claim 1 , wherein the system comprises a measurement chamber, wherein the stage and the measurement device are disposed within the measurement chamber, and wherein the measurement chamber is disposed within a process tool.
Claim 43
Dependent Claim
43 words
The system of claim 1 , wherein the system comprises a measurement chamber, wherein the stage and the measurement device are disposed within the measurement chamber, and wherein the measurement chamber is arranged laterally proximate to a process chamber of a process tool.
Claim 44
Dependent Claim
43 words
The system of claim 1 , wherein the system comprises a measurement chamber, wherein the stage and the measurement device are disposed within the measurement chamber, and wherein the measurement chamber is arranged vertically proximate to a process chamber of is process tool.
Claim 45
Dependent Claim
38 words
The system of claim 1 , wherein a process tool comprises a process chamber, wherein the stage is disposed within the process chamber, and wherein the stage is further configured to support the specimen during a process step.
Claim 46
Dependent Claim
26 words
The system of claim 44 , wherein the processor is further configured to determine at least the two properties of the specimen during the process step.
Claim 47
Dependent Claim
39 words
The system of claim 45 , wherein the processor is further configured to obtain a signature characterizing the process step during use, and wherein the signature comprises at least one singularity representative of an end of the process step.
Claim 48
Dependent Claim
47 words
The system of claim 45 , wherein the processor is coupled to the process tool and is further configured to alter a parameter of one or more instruments coupled to the process tool in response to the determined properties using an in situ control technique during use.
Claim 49
Dependent Claim
43 words
The system of claim 1 , wherein a process tool comprises a first process chamber and a second process chamber, and wherein the stage is further configured to move the specimen from the first process chamber to the second process chamber during use.
Claim 50
Dependent Claim
39 words
The system of claim 48 , wherein the system is further configured to determine at least the two properties of the specimen as the stage is moving the specimen from the first process chamber to the second process chamber.
Claim 51
Dependent Claim
33 words
The system of claim 1 , wherein the processor is further configured to compare at least one of the determined properties of the specimen and properties of a plurality of specimens during use.
Claim 52
Dependent Claim
33 words
The system of claim 1 , wherein the processor is further configured to compare at least one of the determined properties of the specimen to a predetermined range for the property during use.
Claim 53
Dependent Claim
39 words
The system of claim 51 , wherein the processor is further configured to generate an output signal if at least one of the determined properties of the specimen is outside of the predetermined range for the property during use.
Claim 54
Dependent Claim
35 words
The system of claim 1 , wherein the processor is further configured to alter a sampling frequency of the measurement device in response to the determined first or second property of the specimen during use.
Claim 55
Dependent Claim
42 words
The system of claim 1 , wherein the processor is further configured to alter a parameter of one or more instruments coupled to the measurement device in response to the determined first or second property using a feedback control technique during use.
Claim 56
Dependent Claim
42 words
The system of claim 1 , wherein the processor is further configured to alter a parameter of one or more instruments coupled to the measurement device in response to the determined first or second property using a feedforward control technique during use.
Claim 57
Dependent Claim
31 words
The system of claim 1 , wherein the processor is further configured to generate a database during use, wherein the database comprises the determined first and second properties of the specimen.
Claim 58
Dependent Claim
22 words
The system of claim 56 , wherein the processor is further configured to calibrate the measurement device using the database during use.
Claim 59
Dependent Claim
25 words
The system of claim 57 , wherein the processor is further configured to monitor output signals generated by measurement device using the database during use.
Claim 60
Dependent Claim
20 words
The system of claim 57 , wherein the database further comprises first and second properties of a plurality of specimens.
Claim 61
Dependent Claim
23 words
The system of claim 59 , wherein the first and second properties of the plurality of specimens are determined using the measurement device.
Claim 62
Dependent Claim
25 words
The system of claim 59 , wherein the first and second properties of the plurality of specimens are determined using a plurality of measurement devices.
Claim 63
Dependent Claim
18 words
The system of claim 61 , wherein the processor is further coupled to the plurality of measurement devices.
Claim 64
Dependent Claim
24 words
The system of claim 62 , wherein the processor is further configured to calibrate the plurality of measurement devices using the database during use.
Claim 65
Dependent Claim
28 words
The system of claim 62 , wherein the processor is further configured to monitor output signals generated by the plurality of measurement devices using the database during use.
Claim 66
Dependent Claim
47 words
The system of claim 1 , further comprising a stand alone system coupled to the system, wherein the stand alone system is configured to be calibrated with a calibration standard during use, and wherein the stand alone system is further configured to calibrate the system during use.
Claim 67
Dependent Claim
59 words
The system of claim 1 , further comprising a stand alone system coupled the system and at least one additional system, wherein the stand alone system is configured to be calibrated with a calibration standard during use, and wherein the stand alone system is further configured to calibrate the system and at least the one additional system during use.
Claim 68
Dependent Claim
93 words
The system of claim 1 , wherein the system is further configured to determine at least the two properties of the specimen at more than one position on the specimen, wherein the specimen comprises a wafer, and wherein the processor is configured to alter at least one parameter of one or more instruments coupled to a process tool in response to at least one of the determined properties of the specimen at the more than one position on the specimen to reduce within wafer variation of at least one of the determined properties.
Claim 69
Dependent Claim
16 words
The system of claim 1 , wherein the processor is further coupled to a process tool.
Claim 70
Dependent Claim
42 words
The system of claim 68 , wherein the processor is further configured to alter a parameter of one or more instruments coupled to the process tool in response to the determined first or second property using a feedback control technique during use.
Claim 71
Dependent Claim
42 words
The system of claim 68 , wherein the processor is further configured to alter a parameter of one or more instruments coupled to the process tool in response to the determined first or second property using a feedforward control technique during use.
Claim 72
Dependent Claim
28 words
The system of claim 68 , wherein the processor is further configured to monitor a parameter of one or more instruments coupled to the process tool during use.
Claim 73
Dependent Claim
26 words
The system of claim 71 , wherein the processor is further configured to determine a relationship between the determined properties and the monitored parameters during use.
Claim 74
Dependent Claim
33 words
The system of claim 72 , wherein the processor is further configured to alter a parameter of one or more instruments coupled to the process tool in response to the relationship during use.
Claim 75
Dependent Claim
39 words
The system of claim 1 , wherein the processor is further coupled to a plurality of measurement devices, and wherein each of the plurality of measurement devices is coupled to at least one of a plurality of process tools.
Claim 76
Dependent Claim
70 words
The system of claim 1 , wherein the processor comprises a local processor coupled to the measurement device and a remote controller computer coupled to the local processor, wherein the local processor is configured to at least partially process the one or more output signals during use, and wherein the remote controller computer is configured to further process the at least partially processed one or more output signals during use.
Claim 77
Dependent Claim
27 words
The system of claim 75 , wherein the local processor is further configured to determine the first property and the second property of the specimen during use.
Claim 78
Dependent Claim
28 words
The system of claim 75 , wherein the remote controller computer is further configured to determine the first property and the second property of the specimen during use.
Claim 79
Independent Claim
121 words
A method for determining at least two properties of a specimen, comprising: disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system; generating one or more output signals in response to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 80
Independent Claim
121 words
A method for determining at least two properties of a specimen, comprising: disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system; generating one or more output signals in response to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 81
Dependent Claim
137 words
A computer-implemented method for controlling a system configured to determine at least two properties of a specimen during use, wherein the system comprises a measurement device, comprising: controlling the measurement device, wherein the measurement device comprises an illumination system and a detection system, and wherein the measurement device is coupled to a stage, comprising: controlling the illumination system to direct energy toward a surface of the specimen; controlling the detection system to detect energy propagating from the surface of the specimen; and generating one or more output signals responsive to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 82
Dependent Claim
137 words
A computer-implemented method for controlling a system configured to determine at least two properties of a specimen during use, wherein the system comprises a measurement device, comprising: controlling the measurement device, wherein the measurement device comprises an illumination system and a detection system, and wherein the measurement device is coupled to a stage, comprising: controlling the illumination system to direct energy toward a surface of the specimen; controlling the detection system to detect energy propagating from the surface of the specimen; and generating one or more output signals responsive to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 83
Independent Claim
127 words
A method for fabricating a semiconductor device, comprising: forming a portion of the semiconductor device upon a specimen; disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system; generating one or more output signals in response to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 84
Independent Claim
127 words
A method for fabricating a semiconductor device, comprising: forming a portion of the semiconductor device upon a specimen; disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system; generating one or more output signals in response to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 85
Independent Claim
190 words
A system configured to determine at least two properties of a specimen during use, comprising: a stage configured to support the specimen during use; a measurement device coupled to the stage, comprising: an illumination system configured to direct energy toward a surface of the specimen during use; and a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy; a local processor coupled to the measurement device and configured to at least partially process the one or more output signals during use; and a remote controller computer coupled to the local processor, wherein the remote controller computer is configured to receive the at least partially processed one or more output signals and to determine a first property and a second property of the specimen from the at least partially processed one or more output signals during use, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 86
Independent Claim
190 words
A system configured to determine at least two properties of a specimen during use, comprising: a stage configured to support the specimen during use; a measurement device coupled to the stage, comprising: an illumination system configured to direct energy toward a surface of the specimen during use; and a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy; a local processor coupled to the measurement device and configured to at least partially process the one or more output signals during use; and a remote controller computer coupled to the local processor, wherein the remote controller computer is configured to receive the at least partially processed one or more output signals and to determine a first property and a second property of the specimen from the at least partially processed one or more output signals during use, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.
Claim 87
Independent Claim
179 words
A method for determining at least two properties of a specimen, comprising: disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system: generating one or more output signals responsive to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen, comprising: at least partially processing the one or more output signals using a local processor, wherein the local processor is coupled to the measurement device; sending the partially processed one or more output signals from the local processor to a remote controller computer; and further processing the partially processed one or more output signals using the remote controller computer.
Claim 88
Independent Claim
179 words
A method for determining at least two properties of a specimen, comprising: disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system; directing energy toward a surface of the specimen using the illumination system; detecting energy propagating from the surface of the specimen using the detection system: generating one or more output signals responsive to the detected energy; and processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen, comprising: at least partially processing the one or more output signals using a local processor, wherein the local processor is coupled to the measurement device; sending the partially processed one or more output signals from the local processor to a remote controller computer; and further processing the partially processed one or more output signals using the remote controller computer.
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