US5695568A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition chamber
Assignee: Applied Materials Inc
•
Filing: 1994-02-23
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Granted: 1997-12-09
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Expires: 2014-02-23
Abstract
Abstract An improved deposition chamber deposits useful layers on substrates. The improved chamber includes a substrate edge protection system which, in combination with a purge gas, protects selected portions of the edge and underside of the substrate from the deposition gas while preventing the creation of a masked area on the substrate edge. The substrate is supported on a solid receiving plate, which is supported by a stem having a heat limiting member and a shroud to protect the stem and a positioning assembly aligns the substrate to the receiving plate.
Inventors
- 👤 Ashok Sinha
- 👤 Mei Chang
- 👤 Ilya Perlov
- 👤 Karl Littau
- 👤 Alan Morrison
- 👤 Lawrence Chung-Lai Lei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:06
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/4412; C23C16/45521; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C16/46; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/50; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/7608; H10P72/7611; H10P72/7614; H10P72/7624; H10P72/7626; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
70 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a moveable substrate support member disposed within said enclosure; a stem extending outwardly through said enclosure and interconnected to said substrate support member to move said substrate support member within said enclosure; and a heat limiting member disposed about said stem to limit heat transfer along said stem.
Claim 2
Independent Claim
70 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a moveable substrate support member disposed within said enclosure; a stem extending outwardly through said enclosure and interconnected to said substrate support member to move said substrate support member within said enclosure; and a heat limiting member disposed about said stem to limit heat transfer along said stem.
Claim 3
Dependent Claim
18 words
The apparatus of claim 1, wherein said heat limiting member is a reduced area portion on said stem.
Claim 4
Dependent Claim
12 words
The apparatus of claim 1, further including a substrate edge protection member.
Claim 5
Dependent Claim
28 words
The apparatus of claim 3, further including a substrate alignment member to align a substrate on said substrate support member with respect to said substrate edge protection member.
Claim 6
Dependent Claim
45 words
The apparatus of claim 1, further including; a shroud extending about the portion of said stem extending outwardly of said enclosure and forming an enclosed space about said stem; and a gas supply ported to said space to supply a protective gas about said stem.
Claim 7
Dependent Claim
12 words
The apparatus of claim 5, wherein said space communicates with said enclosure.
Claim 8
Dependent Claim
44 words
The apparatus of claim 1, further comprising a substrate edge protection member integrally formed in said substrate support member, said protection member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member.
Claim 9
Dependent Claim
32 words
The apparatus of claim 1, further comprising a thermocouple disposed within a bore in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure.
Claim 10
Dependent Claim
31 words
The apparatus of claim 1, further comprising an exhaust manifold in communication with said enclosure, and an exhaust plate disposed over the exhaust manifold having a plurality of exhaust apertures therein.
Claim 11
Dependent Claim
96 words
The apparatus of claim 1, further comprising: a substrate edge protection member integrally formed in said substrate support member, said protection member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member; an exhaust manifold in communication with said enclosure; an exhaust plate having a plurality of exhaust apertures therein provided intermediate said enclosure and said exhaust manifold; and a thermocouple disposed within a bore in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure.
Claim 12
Dependent Claim
12 words
The apparatus of claim 1, wherein the stem is a tubular stem.
Claim 13
Independent Claim
134 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a moveable substrate support member disposed within said enclosure; a stem extending outwardly through said enclosure and interconnected to said substrate support member within said enclosure to move said substrate support member within said enclosure; a shroud disposed about said stem, said shroud extending outwardly of said enclosure and defining a space between said stem and said shroud wherein said space communicates with said enclosure; a gas manifold having a plurality of ports in communication with said space; and a conduit for directing a purge gas into said manifold, said purge gas flowing from said multiple ports in said manifold and into said space, and flowing from said space into said enclosure.
Claim 14
Independent Claim
134 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a moveable substrate support member disposed within said enclosure; a stem extending outwardly through said enclosure and interconnected to said substrate support member within said enclosure to move said substrate support member within said enclosure; a shroud disposed about said stem, said shroud extending outwardly of said enclosure and defining a space between said stem and said shroud wherein said space communicates with said enclosure; a gas manifold having a plurality of ports in communication with said space; and a conduit for directing a purge gas into said manifold, said purge gas flowing from said multiple ports in said manifold and into said space, and flowing from said space into said enclosure.
Claim 15
Independent Claim
74 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a substrate support member disposed within said enclosure and selectively maintainable at a high temperature; a stem extending outwardly through said enclosure and interconnected to said substrate support member within said enclosure to support said substrate support member within said enclosure; and a secondary support member biased against said substrate support member.
Claim 16
Independent Claim
74 words
An apparatus for depositing a layer on a substrate, comprising: a chamber having an enclosure for receiving and processing the substrate therein; a substrate support member disposed within said enclosure and selectively maintainable at a high temperature; a stem extending outwardly through said enclosure and interconnected to said substrate support member within said enclosure to support said substrate support member within said enclosure; and a secondary support member biased against said substrate support member.
Claim 17
Dependent Claim
85 words
The apparatus of claim 13, wherein said secondary support member includes: a sleeve having a first end and a second end, a support plate and a bias member; said first end interconnected to said stem outwardly of said enclosure and extending into said enclosure adjacent the interconnection of said stem and said substrate support member; and said second end interconnected to said support plate; whereby said bias member biases said sleeve upwardly in said enclosure to bias said support plate against said substrate support member.
Claim 18
Dependent Claim
48 words
The apparatus of claim 14 wherein: said stem includes a ledge thereon; said first end is disposed adjacent said ledge; and said bias member is a spring disposed on said ledge and engaged against said first end to bias the first end of said sleeve from said ledge.
Claim 19
Dependent Claim
44 words
The apparatus of claim 13, further comprising a substrate edge protection member integrally formed in said substrate support member, said protection member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member.
Claim 20
Dependent Claim
32 words
The apparatus of claim 13, further comprising a thermocouple disposed within a bore in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure.
Claim 21
Dependent Claim
34 words
The apparatus of claim 13, further comprising an exhaust manifold in communication with said enclosure, and an exhaust plate having a plurality of exhaust apertures therein provided intermediate said enclosure and said exhaust manifold.
Claim 22
Dependent Claim
96 words
The apparatus of claim 13, further comprising: a substrate edge protection member integrally formed in said substrate support member, said protection member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member; an exhaust manifold in communication with said enclosure; an exhaust plate having a plurality of exhaust apertures therein provided intermediate said enclosure and said exhaust manifold; and a thermocouple disposed within a bore in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure.
Claim 23
Dependent Claim
12 words
The apparatus of claim 13, wherein the stem is a tubular stem.
Claim 24
Independent Claim
158 words
An apparatus for processing substrates, comprising: a chamber having an enclosure; a moveable substrate support member disposed in said enclosure to receive a substrate thereon for processing in said enclosure; a substrate edge protection member integrally formed in said substrate support member, said member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member; a stem extending outwardly through said enclosure and interconnecting to said substrate support member to move said substrate support member within said enclosure; a heat limiting member disposed about said stem to limit heat transfer along said stem; an exhaust manifold in communication with said enclosure; an exhaust plate having a plurality of exhaust apertures therein provided intermediate said enclosure and said exhaust manifold; and a bore disposed in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure having a thermocouple disposed therein.
Claim 25
Independent Claim
158 words
An apparatus for processing substrates, comprising: a chamber having an enclosure; a moveable substrate support member disposed in said enclosure to receive a substrate thereon for processing in said enclosure; a substrate edge protection member integrally formed in said substrate support member, said member including a gas manifold positioned to direct a purge gas along the edge of a substrate received on the substrate support member; a stem extending outwardly through said enclosure and interconnecting to said substrate support member to move said substrate support member within said enclosure; a heat limiting member disposed about said stem to limit heat transfer along said stem; an exhaust manifold in communication with said enclosure; an exhaust plate having a plurality of exhaust apertures therein provided intermediate said enclosure and said exhaust manifold; and a bore disposed in said substrate support member and maintained in communication with the conditions present on the exterior of said enclosure having a thermocouple disposed therein.
Claim 26
Dependent Claim
12 words
The apparatus of claim 21, wherein the stem is a tubular stem.
References Cited (Backward Citations)
FR2171877A1
Cited
US4061800A
Cited
US4209357A
Cited
US4585920A
Cited
US4579618A
Cited
JPS636833A
Cited
US5228501A
Cited
US4892753A
Cited
US4872947A
Cited
US5374315A
Cited
US5198034A
Cited
US4997677A
Cited
US4981103A
Cited
US4883560A
Cited
WO1990013687A2
Cited
US5231690A
Cited
EP0456372A1
Cited
US5238499A
Cited
EP0467623A2
Cited
US5230741A
Cited
US5148714A
Cited
JPH05226252A
Cited
WO1994001597A1
Cited
US5343938A
Cited
US5492566A
Cited
US5421893A
Cited
US5516367A
Cited
US5443648A
Cited
US5324553A
Cited
US5525160A
Cited
US5556476A
Cited
US5476548A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-12-08 | 2001-06-09 | 2001-12-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-12-08 | 2005-06-09 | 2005-12-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-12-08 | 2009-06-09 | 2009-12-09 | $7700.00 | Window Closed / Lapsed |