US5492566A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Support for disk-shaped articles using the Bernoulli principle
Assignee: Lam Research AG
•
Filing: 1994-02-08
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Granted: 1996-02-20
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Expires: 2014-02-08
Abstract
Abstract A support (1, 100) for disk-shaped articles (11), comprises an annular nozzle (8) in a circular surface (9, 10) of the support (1, 100) facing the article (11). The nozzle is fed with compressed gas for the formation of a gas cushion between the support (1) and the disk-shaped article (11). At least one projection (85, 90, 108) in the surface (9, 10) of the support (1, 100) facing the article (11) serves as a rest for the articles. The projection (85, 90, 108) is arranged within the nozzle (8) provided in the surface (9, 10) of the support (1, 100) facing the article (11), at a radial distance outward from the axis (14) of the support (1, 100) but at a distance radially inward from the nozzle (8). The support thus provides a rest for the article (11). The nozzle (8) is so shaped as to direct the gas radially outwardly in all directions from the disk-shaped article (11), thereby to draw the article against the support (1, 100) by the Bernoulli principle.
Inventors
- 👤 Franz Sumnitsch
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:24
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448; H10P72/70; H10P72/78
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
207 words
A support (1, 100) for disk-shaped articles (11), comprising an annular nozzle (8) in a circular surface (9, 10) of the support (1, 100) facing the article (11), means for feeding said nozzle with compressed gas for the formation of a gas cushion between the support (1) and the disk-shaped article (11), and at least one projection (85, 90, 108) in the surface (9, 10) of the support (1, 100) facing the article (11) as a rest for the article, wherein the projection (85, 90, 108) is arranged within the nozzle (8) provided in the surface (9, 10) of the support (1, 100) facing the article (11), the projection (85, 90, 108) being provided at a radial distance outward from the axis (14) of the support (1, 100) but at a distance radially inward from the nozzle (8) and providing a rest for the article (11), the nozzle (8) being so shaped as to direct said gas radially outwardly in all directions from the disk-shaped article (11), thereby to draw the article against the support (1, 100) by the Bernoulli principle, the projection (85, 90, 108) being elastically resilient in a direction perpendicular to the surface (9, 10) of the support (1, 100) facing the article (11).
Claim 2
Dependent Claim
207 words
A support (1, 100) for disk-shaped articles (11), comprising an annular nozzle (8) in a circular surface (9, 10) of the support (1, 100) facing the article (11), means for feeding said nozzle with compressed gas for the formation of a gas cushion between the support (1) and the disk-shaped article (11), and at least one projection (85, 90, 108) in the surface (9, 10) of the support (1, 100) facing the article (11) as a rest for the article, wherein the projection (85, 90, 108) is arranged within the nozzle (8) provided in the surface (9, 10) of the support (1, 100) facing the article (11), the projection (85, 90, 108) being provided at a radial distance outward from the axis (14) of the support (1, 100) but at a distance radially inward from the nozzle (8) and providing a rest for the article (11), the nozzle (8) being so shaped as to direct said gas radially outwardly in all directions from the disk-shaped article (11), thereby to draw the article against the support (1, 100) by the Bernoulli principle, the projection (85, 90, 108) being elastically resilient in a direction perpendicular to the surface (9, 10) of the support (1, 100) facing the article (11).
Claim 3
Dependent Claim
16 words
Support according to claim 1, wherein the projection is a plate of ceramic or synthetic resin.
Claim 4
Dependent Claim
20 words
Support according to claim 1, wherein the projection is arranged concentrically to the axis (14) of the support (1, 100).
Claim 5
Dependent Claim
32 words
Support according to claim 1, wherein the projection (85) is a plate (85) of an elastically resilient material countersunk into the surface (9, 10) of the support (1) facing the article (11).
Claim 6
Dependent Claim
11 words
Support according to claim 4, wherein the plate (85) is porous.
Claim 7
Dependent Claim
15 words
Support according to claim 1, wherein the projection is supported by a coil spring (94).
Claim 8
Dependent Claim
43 words
Support according to claim 1, wherein the projection in the surface (9, 10) of the support (100) facing the article (11)is a ring (108) of an elastically resilient material inserted in the surface (9, 10) of the support (100) facing the article (11).
Claim 9
Dependent Claim
32 words
Support according to claim 7, wherein the ring (108) of elastically resilient material is inserted in a circular-ring-shaped groove (107) in the surface (10) of the support (100) facing the article (11).
Claim 10
Dependent Claim
16 words
Support according to claim 7, wherein the annular projection (108) consists of silicone encased with "polytetrafluoroethylene".
Claim 11
Dependent Claim
18 words
Support according to claim 7, wherein the ring (108) consists of a porous synthetic resin or is hollow.
Claim 12
Dependent Claim
26 words
Support according to claim 1, wherein, in the surface (10) of the support (1) facing the article (11), several projections (90) are arranged in a circle.
Claim 13
Dependent Claim
22 words
Support according to claim 11, wherein each projection (90) is supported with respect to the support (1) by an elastic element (94).
Claim 14
Dependent Claim
14 words
Support according to claim 12, wherein the elastic element is a coil spring (94).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-02-19 | 1999-08-21 | 2000-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-02-19 | 2003-08-21 | 2004-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-02-19 | 2007-08-21 | 2008-02-20 | $7700.00 | Window Closed / Lapsed |