EP0444714A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Holder device for processing disc-like articles
Assignee: Lam Research AG
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Filing: 1988-10-31
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Granted: —
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Expires: 2008-10-31
Abstract
Abstract The handling device has a rotary carrier (1) contained within the inner space (21) of an annular head (20), with 3 open annular channels (25, 26, 27) communicating with the head, allowing a treatment medium to be supplied to the disc supported by the carrier (1). The position of the carrier (1) is made relative to the head (20), by raising and lowering the carrier shaft (7) coupled to a motor, to allow rotation of the carrier.
Inventors
- 👤 Franz Sumnitsch
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0422; H10P72/0424; H10P72/70; H10P72/78; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
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References Cited (Backward Citations)
EP0129108A1
Cited
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