US5556476A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Controlling edge deposition on semiconductor substrates
Assignee: Applied Materials Inc
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Filing: 1994-10-21
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Granted: 1996-09-17
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Expires: 2014-10-21
Abstract
Abstract A substrate processing apparatus comprising a housing defining a processing chamber for receiving a substrate therein. Inside the chamber a substrate supporting susceptor, including an upper substrate receiving portion is located. The receiving portion defines a walled pocket dimensioned to receive the substrate therein. When the substrate is so received the walls of the pocket define an annulus with the outer edge of the substrate. Typically the pocket walls are perpendicular to a primary plane of the substrate and are at least as high, and preferably twice as high, as the substrate is thick. At the outer, circumferential edge of the pocket a gas manifold is formed. The manifold is arranged so that, during processing, a gas which can be projected toward the edge of a substrate received in the pocket. This gas moves upwards between the annulus defined between the wall of the pocket and the outer edge of the substrate, thereby preventing processing gas from contacting the edge portion of the substrate.
Inventors
- 👤 Lawrence C. Lei
- 👤 Cissy Leung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:35
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/45521; H; H10; H10P; H10P14/00; H10P14/20; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7611; H10P72/7612; H10P72/7626; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
105 words
An apparatus for processing a generally planar substrate including a circumferential edge and a first face for processing and a second face, comprising: (i) a housing defining a substrate processing chamber; (ii) a substrate support disposed in the chamber for receiving a substrate for processing thereon; (iii) a substrate receiving pocket defined by the substrate support and including a floor for supporting the substrate and a wall, the receiving pocket being sized to expose the entire first face for processing; and (iv) a gas inlet positioned to direct a gas along the circumferential edge of the substrate when the substrate is received in the pocket.
Claim 2
Independent Claim
105 words
An apparatus for processing a generally planar substrate including a circumferential edge and a first face for processing and a second face, comprising: (i) a housing defining a substrate processing chamber; (ii) a substrate support disposed in the chamber for receiving a substrate for processing thereon; (iii) a substrate receiving pocket defined by the substrate support and including a floor for supporting the substrate and a wall, the receiving pocket being sized to expose the entire first face for processing; and (iv) a gas inlet positioned to direct a gas along the circumferential edge of the substrate when the substrate is received in the pocket.
Claim 3
Dependent Claim
38 words
The apparatus of claim 1, wherein said gas inlet includes a channel formed in the floor of the pocket, the channel extending about the circumference of the substrate when the substrate is received in the substrate receiving pocket.
Claim 4
Dependent Claim
21 words
The apparatus of claim 2, wherein the channel is formed at an intersection between the wall and floor of the pocket.
Claim 5
Dependent Claim
18 words
The apparatus of claim 1, wherein the wall is arranged generally perpendicular to the floor of the pocket.
Claim 6
Dependent Claim
20 words
The apparatus of claim 4, wherein the wall is at least as high as a maximum thickness of the substrate.
Claim 7
Dependent Claim
17 words
The apparatus of claim 4, wherein the wall is as high a maximum thickness of the substrate.
Claim 8
Dependent Claim
19 words
The apparatus of claim 5, wherein the wall has a height greater than the maximum thickness of the substrate.
Claim 9
Dependent Claim
20 words
The apparatus of claim 5, wherein the wall is about twice as high as the maximum thickness of the substrate.
Claim 10
Dependent Claim
44 words
The apparatus of claim 4, wherein the wall has a height such that when a laminar flow of a processing gas flows in a direction from a central region of the substrate and over the wall, the flow is maintained substantially laminar and non-turbulent.
Claim 11
Dependent Claim
16 words
The apparatus of claim 8, wherein the wall has an upwardly and outwardly sloping upper portion.
Claim 12
Dependent Claim
18 words
The apparatus of claim 10, wherein the sloping upper portion slopes at about 15° back from the vertical.
Claim 13
Dependent Claim
11 words
The apparatus of claim 1, further comprising a substrate alignment system.
Claim 14
Dependent Claim
33 words
The apparatus of claim 12, wherein the alignment system includes a plurality of alignment protrusions disposed on the substrate support to align a substrate received on said substrate support member within the pocket.
Claim 15
Independent Claim
102 words
An apparatus for processing a generally planar substrate including a circumferential edge and a first face for processing and a second face, comprising: (i) a housing defining a substrate processing chamber; (ii) a substrate support disposed in the chamber for receiving a substrate for processing thereon; (iii) a substrate circumscribing hoop including an inner face, the hoop being sized to circumscribe the entire substrate whereby an annulus is defined between the substrate edge and the hoop inner face for exposing the entire first face of the substrate for processing; and (iv) a gas inlet positioned to direct a gas through the annulus.
Claim 16
Independent Claim
102 words
An apparatus for processing a generally planar substrate including a circumferential edge and a first face for processing and a second face, comprising: (i) a housing defining a substrate processing chamber; (ii) a substrate support disposed in the chamber for receiving a substrate for processing thereon; (iii) a substrate circumscribing hoop including an inner face, the hoop being sized to circumscribe the entire substrate whereby an annulus is defined between the substrate edge and the hoop inner face for exposing the entire first face of the substrate for processing; and (iv) a gas inlet positioned to direct a gas through the annulus.
Claim 17
Dependent Claim
28 words
The apparatus of claim 14, wherein the gas inlet includes a channel extending about the circumference of the substrate when the substrate is received on the substrate support.
Claim 18
Dependent Claim
21 words
The apparatus of claim 15, wherein the hoop inner face is arranged generally perpendicular to a primary plane of the substrate.
Claim 19
Dependent Claim
22 words
The apparatus of claim 16, wherein the hoop inner face is at least as high as a maximum thickness of the substrate.
Claim 20
Dependent Claim
22 words
The apparatus of claim 17, wherein the hoop inner face is about twice as high as the maximum thickness of the substrate.
Claim 21
Dependent Claim
11 words
The apparatus of claim 18, further comprising a substrate alignment system.
Claim 22
Dependent Claim
40 words
The apparatus of claim 19, wherein the alignment system includes a plurality of alignment protrusions disposed on the substrate support to align a substrate received on the substrate support member with respect to the circumscribing hoop to define the annulus.
Claim 23
Independent Claim
86 words
A method of processing a substrate including a circumferential edge and a first face for processing and a second face, the method comprising the steps of: (i) providing a substrate support for receiving the substrate in a processing chamber; (ii) defining an annulus about the circumferential edge with a substrate circumscribing hoop to expose the entire first face of the substrate to a processing gas; and (iii) passing a gas through the annulus to prevent the processing gas from contacting the circumferential edge of the substrate.
Claim 24
Independent Claim
86 words
A method of processing a substrate including a circumferential edge and a first face for processing and a second face, the method comprising the steps of: (i) providing a substrate support for receiving the substrate in a processing chamber; (ii) defining an annulus about the circumferential edge with a substrate circumscribing hoop to expose the entire first face of the substrate to a processing gas; and (iii) passing a gas through the annulus to prevent the processing gas from contacting the circumferential edge of the substrate.
Claim 25
Dependent Claim
31 words
The method of claim 21, wherein the annulus is defined by a circumscribing hoop including an inner face which is at least as high as a maximum thickness of the substrate.
Claim 26
Dependent Claim
29 words
The method of claim 21, wherein the annulus is defined by a circumscribing hoop including an inner face which is as high as a maximum thickness of a substrate.
Claim 27
Dependent Claim
31 words
The method of claim 21, wherein the annulus is defined by a circumscribing hoop including an inner face which is about twice as high as a maximum thickness of the substrate.
Claim 28
Dependent Claim
19 words
The method of claim 24, further comprising the step of aligning the substrate with respect to the circumscribing hoop.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-09-17 | 2000-03-18 | 2000-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-09-17 | 2004-03-18 | 2004-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-09-17 | 2008-03-18 | 2008-09-17 | $7700.00 | Window Closed / Lapsed |