Rotary/linear actuator for closed chamber, and reaction chamber utilizing same

Claim 3

The apparatus of claim 1, wherein the engaging means comprises a frictional coupling.

Claim 4

The apparatus of claim 2, wherein the frictional coupling comprises a shaft seal.

Claim 5

The apparatus of claim 1, wherein the controllable means includes means for mechanically engaging the sleeve to prevent rotation of the sleeve.

Claim 6

The apparatus of claim 1, wherein the translating means includes threads on the shaft and matching threads on the sleeve.

Claim 7

The apparatus of claim 1, further including a seal on the translating means to prevent particles from escaping.

Claim 8

The apparatus of claim 1, wherein the engaging means comprises a frictional coupling which seals the translating means to prevent particles from escaping.

Claim 9

The apparatus of claim 7, wherein the frictional coupling comprises a shaft seal.

Claim 12

The apparatus of claim 9, wherein the engaging means comprises a frictional coupling.

Claim 13

The apparatus of claim 10, wherein the frictional coupling comprises a shaft seal.

Claim 14

The apparatus of claim 9, wherein the controllable means includes means for mechanically engaging the sleeve to prevent rotation of the sleeve.

Claim 15

The apparatus of claim 9, wherein the translating means includes threads on the shaft and matching threads on the sleeve.

Claim 16

The apparatus of claim 9, further including a seal on the translating means to prevent particles from escaping into the closed chamber.

Claim 17

The apparatus of claim 9, wherein the engaging means comprises a frictional coupling which seals the translating means to prevent particles from escaping into the closed chamber.

Claim 18

The apparatus of claim 15, wherein the frictional coupling comprises a shaft seal.

Claim 19

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece, including a shaft inside the reaction chamber, a rotary feedthrough, coupled to the shaft, for feeding rotational motion into the reaction chamber to induce a rotational velocity of the shaft, a sleeve, mounted over the shaft and coupled to the support structure, engaging means, coupled to the shaft and to the sleeve, for providing an engaging force between the sleeve and the shaft so that normally the sleeve and the support structure achieve respective rotational velocities in response to the rotational velocity of the shaft, controllable means, coupled to the sleeve and controllable from outside the reaction chamber, for overcoming the engaging force between the sleeve and the shaft to inhibit rotation of the sleeve, and translating means, coupled to the shaft and the sleeve, for translating a difference in the rotational velocities of the sleeve and the shaft into translating motion of the support structure; and a pump, having a port on the reaction chamber between the reaction region and the means for rotating and translating, for pumping exhaust gases from the reaction region and gas-born particles released by the means for rotating and translating, out of the reaction chamber.

Claim 20

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece, including a shaft inside the reaction chamber, a rotary feedthrough, coupled to the shaft, for feeding rotational motion into the reaction chamber to induce a rotational velocity of the shaft, a sleeve, mounted over the shaft and coupled to the support structure, engaging means, coupled to the shaft and to the sleeve, for providing an engaging force between the sleeve and the shaft so that normally the sleeve and the support structure achieve respective rotational velocities in response to the rotational velocity of the shaft, controllable means, coupled to the sleeve and controllable from outside the reaction chamber, for overcoming the engaging force between the sleeve and the shaft to inhibit rotation of the sleeve, and translating means, coupled to the shaft and the sleeve, for translating a difference in the rotational velocities of the sleeve and the shaft into translating motion of the support structure; and a pump, having a port on the reaction chamber between the reaction region and the means for rotating and translating, for pumping exhaust gases from the reaction region and gas-born particles released by the means for rotating and translating, out of the reaction chamber.

Claim 21

The apparatus of claim 17, wherein the engaging means comprises a frictional coupling.

Claim 22

The apparatus of claim 18, wherein the frictional coupling comprises a shaft seal.

Claim 23

The apparatus of claim 17, wherein the controllable means includes means for mechanically engaging the sleeve to prevent rotation of the sleeve.

Claim 24

The apparatus of claim 17, wherein the translating means includes threads on the shaft and matching threads on the sleeve.

Claim 25

The apparatus of claim 17, further including a seal on the translating means to prevent particles from escaping into the reaction chamber.

Claim 26

The apparatus of claim 17, wherein the engaging means comprises a frictional coupling which seals the translating means to prevent particles from escaping into the reaction chamber.

Claim 27

The apparatus of claim 23, wherein the frictional coupling comprises a shaft seal.

Claim 28

The apparatus of claim 17, wherein the translating means provides a range of translation having an end, and wherein at the end of the range of translation the shaft disengages from the sleeve for removal of the sleeve and support structure from the reaction chamber.

Claim 29

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber and having rigid walls; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece; sealing means, mounted within the reaction chamber, for sealing the means for rotating and translating to reduce particles released into the reaction region; and a pump, having a port on the reaction chamber between the reaction region and the means for rotating and translating, for pumping exhaust gases from the reaction region and gas-born particles released by the means for rotating and translating, out of the reaction chamber.

Claim 30

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber and having rigid walls; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece; sealing means, mounted within the reaction chamber, for sealing the means for rotating and translating to reduce particles released into the reaction region; and a pump, having a port on the reaction chamber between the reaction region and the means for rotating and translating, for pumping exhaust gases from the reaction region and gas-born particles released by the means for rotating and translating, out of the reaction chamber.

Claim 31

The apparatus of claim 26, wherein the means for rotating and translating includes: a shaft inside the reaction chamber; a feedthrough, coupled to the shaft, for feeding motion into the reaction chamber to induce a rotational velocity of the shaft; a sleeve, mounted over the shaft and coupled to the support structure; engaging means, coupled to the shaft and to the sleeve, for providing an engaging force between the sleeve and the shaft so that normally the sleeve and the support structure achieve respective rotational velocities in response to the rotational velocity of the shaft; controllable means, coupled to the sleeve and controllable from outside the reaction chamber, for overcoming the engaging force between the sleeve and the shaft to inhibit rotation of the sleeve; and translating means, coupled to the shaft and the sleeve, for translating a difference in the rotational velocities of the sleeve and the shaft into translating motion of the support structure.

Claim 32

The apparatus of claim 27, wherein the translating means provides a range of translation having an end, and wherein at the end of the range of translation the shaft disengages from the sleeve for removal of the sleeve and support structure from the reaction chamber.

Claim 33

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece; and cooling means, mounted within the reaction chamber, for cooling the means for rotating and translating to reduce formation of deposits on the means for rotating and translating.

Claim 34

A reduced-pressure reaction apparatus, comprising: a reaction chamber including a reaction region within the reaction chamber; an energy input, mounted with the reaction chamber, for supplying reaction energy into the reaction region; a reactant input, mounted with the reaction chamber, for supplying a flow of reactants into the reaction region; a support structure for supporting a workpiece within the reaction chamber; means, mounted within the reaction chamber and coupled to the support structure, for rotating and translating the workpiece; and cooling means, mounted within the reaction chamber, for cooling the means for rotating and translating to reduce formation of deposits on the means for rotating and translating.

Claim 35

The apparatus of claim 29, further including a pump, having a port on the reaction chamber between the reaction region and the means for rotating and translating, for pumping exhaust gases from the reaction region and gas-born particles released by the means for rotating and translating, out of the reaction chamber.

Claim 36

The apparatus of claim 29, wherein: the means for rotating and translating includes a shaft inside the reaction chamber; a feedthrough, coupled to the shaft, for feeding motion into the reaction chamber to induce a rotational velocity of the shaft; a sleeve, mounted over the shaft and coupled to the support structure; engaging means, coupled to the shaft and to the sleeve, for providing an engaging force between the sleeve and the shaft so that normally the sleeve and the support structure achieve respective rotational velocities in response to the rotational velocity of the shaft; controllable means, coupled to the sleeve and controllable from outside the reaction chamber, for overcoming the engaging force between the sleeve and the shaft to inhibit rotation of the sleeve; and translating means, coupled to the shaft and the sleeve, for translating a difference in the rotational velocities of the sleeve and the shaft into translating motion of the support structure; and the means for cooling includes means for supplying a flow of cooling fluid in heat flow communication with the shaft and sleeve.

Claim 37

The apparatus of claim 31, wherein the shaft includes a channel for receiving the flow of cooling fluid.