US3862397A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cool wall radiantly heated reactor
Assignee: Applied Materials Technology Ltd
•
Filing: 1973-09-17
•
Granted: 1975-01-21
•
Expires: 1993-09-17
Abstract
Abstract A cool wall radiantly heated chemical vapor deposition reactor includes a plurality of banks of elongated heat lamps surrounding the radiant energy transmissive wall of the reactor for heating the susceptor in the reactor on which the wafer substrates are supported. Each bank of lamps includes a segmented reflector assembly having the reflector segments spaced from each other to provide slots aligned with the lamp filaments for permitting a gaseous coolant to be introduced from a cooling structure into contact with the lamps and with the wall of the reactor and which precludes direct reflection of radiant heat back on the lamp filaments which would cause damage thereto and shorten lamp life. Furthermore, reflector segments are arranged to isolate the individual lamps in each bank from each other to further enhance lamp life by precluding direct filament-to-filament radiation transfer between adjacent lamps. The reflector segments are hollow and the cooling structure is designed to introduce the gaseous coolant directly into the hollow interior of the reflector segments from which the coolant thereafter circulates through the slots and over the lamps. Each reflector segment may also be provided with conduit means through with a liquid coolant is circulated to additionally cool the segments.
Inventors
- 👤 Emmett R Anderson
- 👤 Douglas S Schatz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 23:52
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/10; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/481; H; H05; H05B; H05B3/00; H05B3/0033; H05B3/0038; H05B3/0047
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
333 words
A cool wall radiantly heated chemical vapor deposition reactor comprising in combination a plurality of banks of elongated radiant energy heat lamps for heating substrates to be treated in said reactor, each of said lamps including an elongated filament therein; a radiant energy transmissive cool wall reaction chamber in which said substrates are to be treated, said banks of lamps being oriented to generally surround said reaction chamber to transmit radiant energy through the wall thereof; a reflector assembly; for each bank comprising a plurality of adjacently disposed reflector segments; and cooling structure in conjunction with said reaction chamber and each of said lamp banks, said lamps of each bank being spaced from each other and from the wall of said reaction chamber with portions of adjacent segments of each reflector assembly being interposed between adjacent lamps to prevent direct transmission of radiant energy between the filaments of such adjacent lamps; each reflector assembly having the pluraLity of said reflector segments spaced from each other so that elongated generally slot shaped openings are provided between adjacent reflector segments, each of said lamps being positioned so that its elongated filament lies generally in line with one of said elongated openings, said openings being at least as wide as the width of said filaments and at least as long as the lenght of said filaments aligned therewith so that radiant energy passing in one direction from each said filament may exit length an adjacent opening so that reflection of said energy back toward said lamp filament is precluded; said cooling structure comprising dual purpose conduit means associated with each reflector assembly for introducing a coolant through said slot shaped openings of each reflector assembly, such coolant upon passing through such openings passing over each of said lamps in said bank positioned in line therewith to effect cooling of such lamps, and further passing over the wall of said reaction chamber to assist in maintaining such chamber wall cool during treatment of substrates in said reactor.
Claim 2
Dependent Claim
333 words
A cool wall radiantly heated chemical vapor deposition reactor comprising in combination a plurality of banks of elongated radiant energy heat lamps for heating substrates to be treated in said reactor, each of said lamps including an elongated filament therein; a radiant energy transmissive cool wall reaction chamber in which said substrates are to be treated, said banks of lamps being oriented to generally surround said reaction chamber to transmit radiant energy through the wall thereof; a reflector assembly; for each bank comprising a plurality of adjacently disposed reflector segments; and cooling structure in conjunction with said reaction chamber and each of said lamp banks, said lamps of each bank being spaced from each other and from the wall of said reaction chamber with portions of adjacent segments of each reflector assembly being interposed between adjacent lamps to prevent direct transmission of radiant energy between the filaments of such adjacent lamps; each reflector assembly having the pluraLity of said reflector segments spaced from each other so that elongated generally slot shaped openings are provided between adjacent reflector segments, each of said lamps being positioned so that its elongated filament lies generally in line with one of said elongated openings, said openings being at least as wide as the width of said filaments and at least as long as the lenght of said filaments aligned therewith so that radiant energy passing in one direction from each said filament may exit length an adjacent opening so that reflection of said energy back toward said lamp filament is precluded; said cooling structure comprising dual purpose conduit means associated with each reflector assembly for introducing a coolant through said slot shaped openings of each reflector assembly, such coolant upon passing through such openings passing over each of said lamps in said bank positioned in line therewith to effect cooling of such lamps, and further passing over the wall of said reaction chamber to assist in maintaining such chamber wall cool during treatment of substrates in said reactor.
Claim 3
Dependent Claim
37 words
The combination of claim 1 in which at least some of said reflector segments are hollow and have a coolant entrance so that coolant from said cooling structure may enter said segments to cool the same internally.
Claim 4
Dependent Claim
65 words
The combination of claim 2 in which said conduit means comprises an air manifold defined by a plurality of conduit sections, each of said conduit sections being aligned with the coolant entrance extending into a hollow reflector segment, whereby coolant may be introduced directly into said reflector segments and thereafter may circulate from such segments into and through said slot shaped openings over said lamps.
Claim 5
Dependent Claim
44 words
The combination of claim 1 in which said cooling structure further includes elongated conduits positioned within at least some of said reflector segments, said conduits being operatively connected with means for introducing a coolant into said conduits for circulation therethrough and through said segments.
Claim 6
Dependent Claim
34 words
The combination of claim 1 in which said conduit means comprises an air manifold defined by a plurality of conduit sections arranged to direct air over and between said segments of each reflector assembly.
References Cited (Backward Citations)
US3114322A
Cited
US3240915A
Cited
US3472721A
Cited
US3381125A
Cited
US3427435A
Cited
US3654471A
Cited
US3623712A
Cited
US3761677A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-01-20 | 1978-07-22 | 1979-01-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-01-20 | 1982-07-22 | 1983-01-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-01-20 | 1986-07-22 | 1987-01-21 | $7700.00 | Window Closed / Lapsed |