US6103014A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition chamber
Assignee: Applied Materials Inc
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Filing: 1996-02-23
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Granted: 2000-08-15
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Expires: 2016-02-23
Abstract
Abstract Vacuum CVD chambers are disclosed which provide a more uniformly deposited thin film on a substrate. The chamber susceptor mount for the substrate is heated resistively with a single coil firmly contacting the metal of the susceptor on all sides, providing uniform temperatures across the susceptor mount for a substrate. A purge gas line is connected to openings in the susceptor outside of the periphery of the substrate to prevent edge and backside contamination of the substrate. A vacuum feed line mounts the substrate to the susceptor plate during processing. A refractory purge guide, or a plurality of placement pins, maintain a fixed gap passage for the purge gases to pass alongside the edge of the wafer and into the processing area of the chamber. An exhaust pumping plate improves the uniformity of exhaustion of spent gases from the chamber.
Inventors
- 👤 Lawrence Chung-Lai Lei
- 👤 Ilya Perlov
- 👤 Karl Anthony Littau
- 👤 Alan Ferris Morrison
- 👤 Mei Chang
- 👤 Ashok K. Sinha
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:17
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45519; C23C16/4412; C23C16/45521; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C16/46; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0432; H10P72/50; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H10P72/7608; H10P72/7611; H10P72/7614; H10P72/7624; H10P72/7626; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
50 words
An exhaust system for a processing area in a deposition chamber, comprising: an exhaust plate having a channel extending about the processing area; a plurality of openings in the exhaust plate extending between the processing area and said channel; and an exhaust manifold disposed adjacent a portion of said channel.
Claim 2
Dependent Claim
50 words
An exhaust system for a processing area in a deposition chamber, comprising: an exhaust plate having a channel extending about the processing area; a plurality of openings in the exhaust plate extending between the processing area and said channel; and an exhaust manifold disposed adjacent a portion of said channel.
Claim 3
Dependent Claim
16 words
The exhaust system of claim 1, wherein said openings are evenly spaced about the enclosure wall.
Claim 4
Dependent Claim
15 words
The exhaust system of claim 1, wherein holes extend between said channel and said manifold.
Claim 5
Dependent Claim
13 words
The exhaust system of claim 3, wherein said exhaust plate comprises said holes.
Claim 6
Dependent Claim
19 words
The exhaust system of claim 1, wherein said openings are restrictive and are evenly spaced around the processing area.
Claim 7
Dependent Claim
62 words
An exhaust system for a processing area in a deposition chamber, comprising: an exhaust plate having a channel surrounding the processing area; an exhaust manifold disposed adjacent a portion of the channel; a plurality of evenly spaced openings disposed in said exhaust plate between said processing area and said channel; and holes providing fluid communication between said channel and said exhaust manifold.
Claim 8
Dependent Claim
62 words
An exhaust system for a processing area in a deposition chamber, comprising: an exhaust plate having a channel surrounding the processing area; an exhaust manifold disposed adjacent a portion of the channel; a plurality of evenly spaced openings disposed in said exhaust plate between said processing area and said channel; and holes providing fluid communication between said channel and said exhaust manifold.
Claim 9
Dependent Claim
16 words
The exhaust system of claim 6, wherein said manifold is interrupted by a slit valve opening.
Claim 10
Dependent Claim
16 words
The exhaust system of claim 6, wherein said openings are evenly spaced about the processing area.
Claim 11
Dependent Claim
13 words
The exhaust system of claim 6, wherein the exhaust plate comprises said holes.
Claim 12
Dependent Claim
19 words
The exhaust system of claim 6, wherein said openings are restrictive and are evenly spaced around the processing area.
Claim 13
Independent Claim
59 words
A method for exhausting a processing area in a deposition chamber, comprising: evacuating an exhaust manifold; and withdrawing a processing gas from said processing area through a plurality of spaced openings extending through an exhaust plate having a channel, wherein said processing area and said exhaust manifold communicate through said channel and the manifold partially extends below the channel.
Claim 14
Independent Claim
59 words
A method for exhausting a processing area in a deposition chamber, comprising: evacuating an exhaust manifold; and withdrawing a processing gas from said processing area through a plurality of spaced openings extending through an exhaust plate having a channel, wherein said processing area and said exhaust manifold communicate through said channel and the manifold partially extends below the channel.
Claim 15
Dependent Claim
15 words
The method of claim 11, wherein said openings are evenly spaced around the processing area.
Claim 16
Dependent Claim
27 words
The method of claim 11, wherein said spaced openings extend between the processing area and the channel, and holes extend between the channel and said exhaust manifold.
Claim 17
Dependent Claim
18 words
The method of claim 13, wherein said openings are restrictive and are evenly spaced around the processing area.
Claim 18
Dependent Claim
13 words
The method of claim 14, wherein said holes extend through said exhaust plate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-15 | 2004-02-14 | 2004-08-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-15 | 2008-02-14 | 2008-08-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-15 | 2012-02-14 | 2012-08-15 | $7700.00 | Window Closed / Lapsed |