US5517312A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for measuring the thickness of thin films
Assignee: Nova Ltd
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Filing: 1994-04-01
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Granted: 1996-05-14
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Expires: 2014-04-01
Abstract
Abstract A thin film thickness measuring device is disclosed. The device includes an illuminator, a receiver and a beam deflector. The illuminator provides a collimated input light beam along an input axis. The receiver includes a lens and a diaphragm having a pinhole located at a focal point of the lens and receives a collimated output light beam along an output axis parallel to the input axis. The beam deflector is translatable at least along a scanning axis parallel to the input axis. The beam deflector directs the input light beam towards a sample and the output light beam from the sample towards the receiver.
Inventors
- 👤 Moshe Finarov
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 22:07
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641; G01B11/065
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
121 words
A thickness measuring device for measuring the thickness of thin films on a sample, the device comprising: a stationary illuminator for providing a collimated input light beam along an input axis; a beam deflector for directing said input light beam towards said sample and for directing and collimating an output light beam from said sample, said beam deflector comprising a collimating lens which receives at least said output light beam and two-dimensional translation means for translating said beam deflector along a first scanning axis parallel to said input axis and along a second scanning axis perpendicular to said first scanning axis; and a stationary receiver for receiving said collimated output light beam along an output axis parallel to said input axis.
Claim 2
Dependent Claim
121 words
A thickness measuring device for measuring the thickness of thin films on a sample, the device comprising: a stationary illuminator for providing a collimated input light beam along an input axis; a beam deflector for directing said input light beam towards said sample and for directing and collimating an output light beam from said sample, said beam deflector comprising a collimating lens which receives at least said output light beam and two-dimensional translation means for translating said beam deflector along a first scanning axis parallel to said input axis and along a second scanning axis perpendicular to said first scanning axis; and a stationary receiver for receiving said collimated output light beam along an output axis parallel to said input axis.
Claim 3
Dependent Claim
76 words
A device according to claim 1 and wherein said beam deflector additionally comprises a first beam deflecting element for deflecting said input light beam at an angle of incidence towards said sample and a second beam deflecting element, different from said first beam deflecting element, for deflecting a light beam reflected at an angle from said sample along said output axis, wherein said objective lens receives said output light beam from said second beam deflecting element.
Claim 4
Dependent Claim
83 words
A device according to claim 1 and wherein said beam deflector additionally comprises a first mirror for deflecting said input light beam from said input axis to said second scanning axis, a second mirror for deflecting said input light beam from said second scanning axis to said sample, a third mirror deflecting a reflected light beam from said sample to said second scanning axis, and a fourth mirror for deflecting said reflected light beam from said second scanning axis to said output axis.
Claim 5
Dependent Claim
17 words
A device according to claim 2 and wherein said first and second beam deflecting elements are mirrors.
Claim 6
Dependent Claim
26 words
A device according to claim 2 and wherein said first beam deflecting element is a beam splitter and said second beam deflecting element is a mirror.
Claim 7
Dependent Claim
27 words
A device according to claim 5 wherein said receiver additionally comprises a spectrophotometer and wherein said collimating lens additionally focusses said input light beam on said sample.
Claim 8
Dependent Claim
38 words
A device according to claim 2 wherein said device is an ellipsometer, wherein said illuminator comprises a light source, a polarizer and a compensator, wherein said receiver comprises an analyzer, and wherein said polarizer and analyzer are rotatable.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-14 | 1999-11-13 | 2000-05-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-14 | 2003-11-13 | 2004-05-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-14 | 2007-11-13 | 2008-05-14 | $7700.00 | Window Closed / Lapsed |