US5061072A
Expired / Lapsed
US
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Differential ellipsometer
Assignee: Department of Defence
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Filing: 1989-01-10
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Granted: 1991-10-29
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Expires: 2009-01-10
Abstract
Abstract A differential ellipsometer to measure the epitaxial growth of crystalization materials by molecular beam epitaxy. The ellipsometer projects a light beam (3) to the surface, and the reflected light beam (5) is returned to another point on the surface with the P and s linear polarization states interchanged. The output beam (7) from the further point is brought into interference with part of the incident beam for measurement or analysis.
Inventors
- 👤 Margaret A. Folkard
- 👤 Richard H. Hartley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 09:03
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; C; C30; C30B; C30B23/00; C30B23/02; G01N2021/1748
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
78 words
A method for measuring epitaxial growth on a surface, comprising the steps of: reflecting an incident light beam from the surface; scanning or expanding said light beam across said surface; comparing ellipsometric information on said light beam obtained from a reference point area of said surface with ellipsometric information on said light beam from a plurality of other points on said surface, to directly obtain differential measurement between said reference point area and each of said other points.
Claim 2
Independent Claim
78 words
A method for measuring epitaxial growth on a surface, comprising the steps of: reflecting an incident light beam from the surface; scanning or expanding said light beam across said surface; comparing ellipsometric information on said light beam obtained from a reference point area of said surface with ellipsometric information on said light beam from a plurality of other points on said surface, to directly obtain differential measurement between said reference point area and each of said other points.
Claim 3
Dependent Claim
39 words
A method as defined in claim 1 wherein the light beam reflected from the surface is returned to a further point on the surface with the same angle of incidence with the p and s linear polarisation states interchanged.
Claim 4
Dependent Claim
57 words
A method as defined in claim 2 wherein the incident light beam and the beam reflected from the further point pass through a beam splitter, the incident beam from the beam splitter being returned to the beam splitter so that output light beam from the further point is brought into interference with part of the input beam.
Claim 5
Dependent Claim
75 words
A differential ellipsometer for measuring the epitaxial growth on a surface, said ellipsometer comprising means for projecting a light beam on to a point of the surface, means for returning the reflected beam to a further point on the surface with p and s linear polarisation states interchanged, and further means causing the output beam reflected from the further point to be brought into interference with part of the incident beam for measurement or analysis.
Claim 6
Dependent Claim
75 words
A differential ellipsometer for measuring the epitaxial growth on a surface, said ellipsometer comprising means for projecting a light beam on to a point of the surface, means for returning the reflected beam to a further point on the surface with p and s linear polarisation states interchanged, and further means causing the output beam reflected from the further point to be brought into interference with part of the incident beam for measurement or analysis.
Claim 7
Dependent Claim
18 words
A differential ellipsometer as defined in claim 4 wherein means for returning the reflected beam comprises a prism.
Claim 8
Dependent Claim
45 words
A differential ellipsometer as defined in claim 4 wherein said further means comprises a beam splitter, that portion of the incident beam split from the incident beam being returned by a prism to the beam splitter to be brought into interference with the output beam.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-28 | 1995-04-29 | 1995-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-28 | 1999-04-29 | 1999-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-28 | 2003-04-29 | 2003-10-29 | $7700.00 | Window Closed / Lapsed |