US4908508A
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US
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Process and apparatus for determining thicknesses of layers
Assignee: Akzo NV
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Filing: 1987-12-23
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Granted: 1990-03-13
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Expires: 2007-12-23
Abstract
Abstract A process for determining the thickness and/or change in thickness of a thin layer applied to a carrier, with the carrier coated with the thin layer being radiated with a plane polarized light beam and the reflectance on carrier and layer being detected. The light reflected by the carrier and the thin layer is split into a p-polarized part and an s-polarized part, after which the respective reflection values Rp and Rs are measured simultaneously for the two parts, and the quantity <MATH> is determined, in which formula m is a variable parameter and the quantity M is a function of the thickness of the thin layer. By measuring both the reflection of p-polarized radiation and that of s-polarized radiation, and by adroitly combining the measuring data obtained, the resulting signal will be insensitive to the intensity of the radiation source. An additional advantage is that the process has a greater sensitivity to variations in layer thickness, and that it is possible for the process to be carried out within a wide linear measuring range. In determining the growth of a protein layer the measuring result is independent -within wide limits- of the thickness and the index of refraction of a layer previously applied to the carrier.
Inventors
- 👤 Gerrit C. Dubbeldam
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 11:39
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/17; G01N21/21; G01N21/211; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641; G01B11/065
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
176 words
A process comprising radiating a carrier having a thin layer coated thereon with a plane polarized light beam at a single incident angle, detecting the reflectance on the carrier and layer, splitting the light reflected by the carrier and the thin layer into a p-polarized part and an s-polarized part, after which the respective intensities (I s )r and (I p ) r of the reflected s-polarized and p-polarized light are measured simultaneously for the two parts, and calculating a quantity M according to the equation: ##EQU3## in which R s is the ratio of the intensities (I s ) r and (I s ) i of the reflected and incident s-polarized light, respectively; R p is the ratio of the intensities (I p ) r and (I p ) i of the reflected and incident p-polarized light, respectively; m is the ratio of the intensities (I p ) i and (I s ) i of the incident p- and s-polarized light, respectively; the quantity M being a function of the thickness of the thin layer.
Claim 2
Dependent Claim
176 words
A process comprising radiating a carrier having a thin layer coated thereon with a plane polarized light beam at a single incident angle, detecting the reflectance on the carrier and layer, splitting the light reflected by the carrier and the thin layer into a p-polarized part and an s-polarized part, after which the respective intensities (I s )r and (I p ) r of the reflected s-polarized and p-polarized light are measured simultaneously for the two parts, and calculating a quantity M according to the equation: ##EQU3## in which R s is the ratio of the intensities (I s ) r and (I s ) i of the reflected and incident s-polarized light, respectively; R p is the ratio of the intensities (I p ) r and (I p ) i of the reflected and incident p-polarized light, respectively; m is the ratio of the intensities (I p ) i and (I s ) i of the incident p- and s-polarized light, respectively; the quantity M being a function of the thickness of the thin layer.
Claim 3
Dependent Claim
71 words
A process according to claim 1, wherein use is made, for determining the degree of growth of organic layers on a carrier, of a carrier previously coated with a thin layer of a transparent inorganic material or of an organic polymer of such a thickness that there is an almost linear relation between the quantity M and the thickness of the organic layer built up on the previously applied thin layer.
Claim 4
Dependent Claim
57 words
A process according to claim 2, wherein a carrier is used which is coated with a thin layer of transparent inorganic material or of an organic polymer of such a thickness that there is an almost linear relation between the quantity M and the thickness of the organic layer built up on the previously applied thin layer.
Claim 5
Dependent Claim
49 words
A process according to claim 1, wherein the carrier comprises a prism, with the light being directed to the prism in such a way that it will enter and leave through the respective lateral faces and be reflected on the base face on which the thin layer is present.
Claim 6
Dependent Claim
59 words
A process according to claim 1, wherein said carrier radiating step, said reflectance detecting step, said reflected light splitting step, said reflected s-polarized and p-polarized light measurement steps, and said M calculation step are applied a number of times using, in succession, different protein solutions as the thin layer applied to the carrier to determine protein/carrier and protein/protein interactions.
Claim 7
Independent Claim
187 words
An apparatus for use in determining the thickness of a layer, comprising a substrate for carrying said layer, a beam splitter, a laser source for directing a plane polarized beam toward said substrate, said plane polarized beam being reflected by said substrate and said layer toward said beam splitter, said beam splitter splitting the reflected polarized beam into a p-polarized beam and an s-polarized beam, a first detector for detecting an intensity of said p-polarized beam and a second detector for detecting an intensity of said s-polarized beam and a processing unit for calculating a quantity ##EQU4## in which R s is the ratio of the intensities (I s ) r and (I s ) i of the reflected and incident s-polarized light, respectively; R p is the ratio of the intensities (I p ) r and (I p ) i of the reflected and incident p-polarized light, respectively; m is the ratio of the intensities (I p ) i and (I s ) i of the incident p- and s-polarized light, respectively; and the quantity M is a function of the thickness of the thin layer.
Claim 8
Independent Claim
187 words
An apparatus for use in determining the thickness of a layer, comprising a substrate for carrying said layer, a beam splitter, a laser source for directing a plane polarized beam toward said substrate, said plane polarized beam being reflected by said substrate and said layer toward said beam splitter, said beam splitter splitting the reflected polarized beam into a p-polarized beam and an s-polarized beam, a first detector for detecting an intensity of said p-polarized beam and a second detector for detecting an intensity of said s-polarized beam and a processing unit for calculating a quantity ##EQU4## in which R s is the ratio of the intensities (I s ) r and (I s ) i of the reflected and incident s-polarized light, respectively; R p is the ratio of the intensities (I p ) r and (I p ) i of the reflected and incident p-polarized light, respectively; m is the ratio of the intensities (I p ) i and (I s ) i of the incident p- and s-polarized light, respectively; and the quantity M is a function of the thickness of the thin layer.
Claim 9
Dependent Claim
20 words
An apparatus according to claim 6, further comprising a cell for containing liquid, said substrate being provided in said liquid.
Claim 10
Dependent Claim
14 words
An apparatus as recited in claim 7 wherein said liquid comprises a protein solution.
Claim 11
Dependent Claim
19 words
An apparatus as recited in claim 6, wherein said polarized beam hits said substrate at approximately the Brewster angle.
Claim 12
Dependent Claim
16 words
An apparatus as recited in claim 6, wherein said laser source is a helium neon laser.
Claim 13
Dependent Claim
20 words
An apparatus as recited in claim 6, wherein said substrate comprises a silicon slide coated with a layer of polystyrene.
Claim 14
Dependent Claim
19 words
An apparatus as recited in claim 11, wherein said layer of polystyrene is about 50 to 60 nm thick.
Claim 15
Dependent Claim
22 words
An apparatus as recited in claim 11, wherein a polarization direction of said polarized beam is 30° to a plane of incidence.
Claim 16
Dependent Claim
42 words
An apparatus as recited in claim 6, wherein said substrate comprises an organic polymer layer of a thickness of at least ##EQU5## where λ is the wavelength of the polarized beam and n is the refractive index of said organic polymer layer.
Claim 17
Dependent Claim
14 words
An apparatus as recited in claim 6, wherein said substrate comprises an equilateral prism.
Claim 18
Dependent Claim
17 words
An apparatus as recited in claim 15, wherein said equilateral prism is made of heavy flint glass.
Claim 19
Dependent Claim
36 words
An apparatus as recited in claim 15, wherein equal planes of said equilateral prism are provided with an antireflection coating and a base face of said equilateral prism is coated with a thin layer of polystyrene.
Claim 20
Dependent Claim
26 words
An apparatus as recited in claim 15, wherein a base face of said equilateral prism includes a ring into which solutions to be examined are introduced.
Claim 21
Dependent Claim
15 words
An apparatus as recited in claim 15, wherein said laser source is a semiconductor laser.
Claim 22
Dependent Claim
22 words
An apparatus as recited in claim 15, wherein the polarization direction of said polarized beam is 8.05° to the plane of incidence.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1993-03-12 | 1993-09-11 | 1994-03-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-12 | 1997-09-11 | 1998-03-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-12 | 2001-09-11 | 2002-03-13 | $7700.00 | Window Closed / Lapsed |