US4873430A
Expired / Lapsed
US
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Method and apparatus for optically measuring characteristics of a thin film by directing a P-polarized beam through an integrating sphere at the brewster's angle of the film
Assignee: International Business Machines Corp
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Filing: 1988-10-25
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Granted: 1989-10-10
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Expires: 2008-10-25
Abstract
Abstract A method for optically measuring at least one characteristic of a thin film on a reflecting substrate. A p-polarized beam of collimated light of known intensity is directed through an integrating sphere onto the film at substantially the Brewster's angle of the film. All the light is reflected into the sphere, including all diffusely reflected light as well as the light specularly reflected at a region inside the sphere where the specularly reflected light is incident. A reflective surface is provided for determining the thickness of the film as a function of the total intensity of light sensed within the sphere. An absorptive surface is provided at said region for absorbing the specularly reflected light for determining the porosity or surface roughness of the film based on the intensity of the diffused light sensed within the sphere not reflected from the substrate.
Inventors
- 👤 Anthony Juliana
- 👤 Wai C. Leung
- 👤 Victor T. Pan
- 👤 Hal J. Rosen
- 👤 Timothy C. Strand
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 18:43
CPC Classifications
G; G01; G01N; G01N21/00; G01N21/84; G01N21/8422; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0641; G01B11/065; G01B11/30; G01B11/303; G01N15/00; G01N15/08; G01N2015/086; G01N21/17; G01N21/47; G01N2021/4702; G01N21/55; G01N2021/555; G01N21/21; G01N2201/00; G01N2201/06; G01N2201/065
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
105 words
A method of optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising the steps of: directing a p-polarized beam of collimated light of known intensity through one aperture in an integrating sphere and via a second aperture therein onto the film at substantially the Brewster's angle of the film; reflecting all the light into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; and sensing the light intensity within the sphere for measuring said at least one characteristic of the film.
Claim 2
Independent Claim
105 words
A method of optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising the steps of: directing a p-polarized beam of collimated light of known intensity through one aperture in an integrating sphere and via a second aperture therein onto the film at substantially the Brewster's angle of the film; reflecting all the light into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; and sensing the light intensity within the sphere for measuring said at least one characteristic of the film.
Claim 3
Dependent Claim
33 words
The method of claim 1, including the step of providing at said region a reflective surface for determining the thickness of the film as a function of the total intensity of light sensed.
Claim 4
Dependent Claim
44 words
The method of claim 1, including the step of: providing at said region an absorptive surface for absorbing the specularly reflected light for determining at least one characteristic of the film based on the intensity of the diffused light not reflected from the substrate.
Claim 5
Dependent Claim
10 words
The method of claim 3, wherein the characteristic is porosity.
Claim 6
Dependent Claim
11 words
The method of claim 3, wherein the characteristic is surface roughness.
Claim 7
Dependent Claim
23 words
The method of claim 1, including the step of: moving the substrate relative to the sphere for mapping selectable areas of the film.
Claim 8
Dependent Claim
15 words
The method of claim 6, wherein an R-θ stage is employed for the moving step.
Claim 9
Independent Claim
164 words
A method of optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising the steps of: splitting a beam of collimated light from a source; passing one portion of the beam through a photodiode detector to generate one analog signal corresponding to the light intensity of the source; p-polarizing the other portion of the beam and directing it into an integrating sphere and onto the film at substantially the Brewster's angle of the film; reflecting all the light into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; generating another analog signal corresponding to the sensed light intensity within the sphere; converting both analog signals to digital signals and dividing the digitized signals of said one and other signals to compensate for variations in light intensity from the source; and using said other digitized signal measuring a characteristic of the film.
Claim 10
Independent Claim
164 words
A method of optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising the steps of: splitting a beam of collimated light from a source; passing one portion of the beam through a photodiode detector to generate one analog signal corresponding to the light intensity of the source; p-polarizing the other portion of the beam and directing it into an integrating sphere and onto the film at substantially the Brewster's angle of the film; reflecting all the light into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; generating another analog signal corresponding to the sensed light intensity within the sphere; converting both analog signals to digital signals and dividing the digitized signals of said one and other signals to compensate for variations in light intensity from the source; and using said other digitized signal measuring a characteristic of the film.
Claim 11
Dependent Claim
52 words
The method of claim 8, including the further step of: moving the substrate relative to the sphere; and generating digital signals indicative of the location on the film at which the characteristic is being measured for providing said other digitized signals for each such location to map the characteristic at multiple locations.
Claim 12
Dependent Claim
134 words
Apparatus for optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising: an integrating sphere; means for directing a p-polarized beam of collimated light of known intensity through the sphere and onto the film at substantially the Brewster's angle of the film; means for maintaining the film substantially in contact with the sphere so that all of the light will be reflected into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; light-sensitive detecting means for generating an analog signal indicative of the intensity of light within the sphere; and means, including an analog-to-digital converter and processor, for measuring said at least one characteristic of the film from said analog signal.
Claim 13
Dependent Claim
134 words
Apparatus for optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising: an integrating sphere; means for directing a p-polarized beam of collimated light of known intensity through the sphere and onto the film at substantially the Brewster's angle of the film; means for maintaining the film substantially in contact with the sphere so that all of the light will be reflected into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; light-sensitive detecting means for generating an analog signal indicative of the intensity of light within the sphere; and means, including an analog-to-digital converter and processor, for measuring said at least one characteristic of the film from said analog signal.
Claim 14
Dependent Claim
41 words
The apparatus of claim 10, including means at said region for reflecting the specularly reflected light for enabling the last-mentioned means to determine the thickness of the film as a function of the total light intensity sensed by said detecting means.
Claim 15
Dependent Claim
42 words
The apparatus of claim 10, including means at said region for absorbing the specularly reflected light for enabling the last-mentioned means to determine a characteristic of the film based solely on the intensity of the diffused light not reflected from the substrate.
Claim 16
Dependent Claim
10 words
The apparatus of claim 12, wherein the characteristic is porosity.
Claim 17
Dependent Claim
11 words
The apparatus of claim 12 wherein the characteristic is surface roughness.
Claim 18
Independent Claim
183 words
An apparatus for optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising: means for splitting a beam of collimated light from a source; detector means through which one portion of the beam is passed to generate one analog signal corresponding to the light intensity of the source; an integrating sphere closely adjacent the film; means for p-polarizing the other portion of the beam and directing it into the sphere and onto the film at substantially the Brewster's angle of the film for causing all the light to be reflected into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; means for generating another analog signal corresponding to the sensed light intensity within the sphere; means for converting both analog signals to digital signals and dividing the digitized signals of said one and other signals to compensate for variations in light intensity from the source; and mean responsive to said other digitized signal for measuring a characteristic of the film.
Claim 19
Independent Claim
183 words
An apparatus for optically measuring at least one characteristic of a thin film on a reflecting substrate, comprising: means for splitting a beam of collimated light from a source; detector means through which one portion of the beam is passed to generate one analog signal corresponding to the light intensity of the source; an integrating sphere closely adjacent the film; means for p-polarizing the other portion of the beam and directing it into the sphere and onto the film at substantially the Brewster's angle of the film for causing all the light to be reflected into the sphere, including (i) all diffusely reflected light and (ii) the light specularly reflected at a region inside the sphere where the specularly reflected light is incident; means for generating another analog signal corresponding to the sensed light intensity within the sphere; means for converting both analog signals to digital signals and dividing the digitized signals of said one and other signals to compensate for variations in light intensity from the source; and mean responsive to said other digitized signal for measuring a characteristic of the film.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |