US5520769A
Expired / Lapsed
US
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Method for measuring concentration of dopant within a semiconductor substrate
Assignee: Advanced Micro Devices Inc
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Filing: 1994-12-07
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Granted: 1996-05-28
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Expires: 2014-12-07
Abstract
Abstract A method is provided for measuring at resolutions which are in some instances less than 20 nanometers the concentration densities within one or more diffusion regions within a semiconductor substrate. The diffusion regions are prepared for measurement by cleaving a cross-sectional surface and polishing that surface to a substantially flat, exposed profile. The profile is purposefully pre-etched to remove oxide abutting the implant area and thereafter dopant-selective etched in accordance with concentration densities within the substrate. Pre-etching of oxide and concentration density etching of doped silicon provides an exposed topological contour measurable by atomic force microscopy (AFM). AFM can detect the entire cross-sectional surface including conductors and dielectrics. The topological height of impurity region profiles of a calibration wafer are correlated to impurity concentrations to form a calibration curve. The calibration curve, in conjunction with topological contour of a target region profile, allows direct and quick measurement of concentration densities along the target region profile at each AFM scan location. The initial scan position is purposefully defined by an oxide pre-etch step to present an easily discernible AFM-read gradient which signals an initial AFM read position.
Inventors
- 👤 Michael C. Barrett
- 👤 Chih-Kang Shih
- 👤 Donald A. Tiffin
- 👤 Ying Li
- 👤 Michael J. Dennis
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 21:55
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/20; H10P74/203; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/852; Y10S977/854
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
140 words
A method for determining concentration of a dopant within a target semiconductor substrate, comprising: preparing a cross-section of a calibration semiconductor substrate having a calibration region of dopant placed therein; etching to a reduced height an oxide arranged upon the cross-section of said calibration semiconductor substrate; etching said calibration region with an etchant having an etch rate dependent upon a concentration of dopant atoms within said calibration region; measuring the upper surface topography of said calibration region by scanning a probe from an initial position adjacent said reduced height oxide to an ending position at least partially across said calibration region while periodically taking readings of the upper topography of said calibration region; and deriving a calibration curve of a concentration of dopant within said calibration region as a function of an etch depth determined from said immediately preceding step.
Claim 2
Independent Claim
140 words
A method for determining concentration of a dopant within a target semiconductor substrate, comprising: preparing a cross-section of a calibration semiconductor substrate having a calibration region of dopant placed therein; etching to a reduced height an oxide arranged upon the cross-section of said calibration semiconductor substrate; etching said calibration region with an etchant having an etch rate dependent upon a concentration of dopant atoms within said calibration region; measuring the upper surface topography of said calibration region by scanning a probe from an initial position adjacent said reduced height oxide to an ending position at least partially across said calibration region while periodically taking readings of the upper topography of said calibration region; and deriving a calibration curve of a concentration of dopant within said calibration region as a function of an etch depth determined from said immediately preceding step.
Claim 3
Dependent Claim
120 words
The method as recited in claim 1, further comprising: preparing a cross-section of a target semiconductor substrate having a target region of dopant formed at the same concentration as the dopant placed within said calibration region; and removing to a reduced height an oxide arranged upon the cross-section of said target semiconductor substrate and thereafter removing a portion of the target region with an etchant having an etch rate dependent upon the concentration of dopant within said target region, wherein partial removal of the target region and the oxide upon the target semiconductor substrate occur simultaneous with and under identical conditions and duration as each of said steps for etching the calibration region and oxide upon the calibration semiconductor substrate.
Claim 4
Dependent Claim
219 words
The method as recited in claim 1, further comprising: preparing a cross-section of a target semiconductor substrate having a target region of dopant formed with processing parameters similar to those used to form the dopant placed within said calibration region; removing to a reduced height an oxide arranged upon the cross-section of said target semiconductor substrate and thereafter removing a portion of the target region with an etchant having an etch rate dependent upon the concentration of said dopant within said target region, wherein partial removal of the target region and the oxide upon the target semiconductor substrate occur simultaneous with and under identical conditions and duration as each of said steps for etching the calibration region and oxide upon the calibration semiconductor substrate; measuring the upper surface of the target region by scanning a probe from an initial position adjacent the reduced height oxide of said target semiconductor substrate to an ending position at least partially across the target region while periodically taking readings of the upper topography of the target region resulting from said immediately preceding removing step; and computing from said calibration curve a concentration of dopant within said target region by correlating an etch amount taken from each reading of the upper topography of the target region with corresponding readings taken from said calibration curve.
Claim 5
Dependent Claim
39 words
The method as recited in claim 1, wherein said preparing step comprises cleaving a calibration wafer to produce an exposed cleaved surface and polishing said exposed cleaved surface to form a substantially flat cross-section of said calibration semiconductor substrate.
Claim 6
Dependent Claim
31 words
The method as recited in claim 4, wherein said polishing step comprises placing said exposed cleaved surface on a polishing surface arranged perpendicular to a backside surface of said calibration wafer.
Claim 7
Dependent Claim
39 words
The method as recited in claim 3, wherein said preparing step comprises cleaving a target wafer to produce an exposed cleaved surface and polishing said exposed cleaved surface to form a substantially flat cross-section of said calibration semiconductor substrate.
Claim 8
Dependent Claim
31 words
The method as recited in claim 6, wherein said polishing step comprises placing said exposed cleaved surface on a polishing surface arranged perpendicular to a backside surface of said calibration wafer.
Claim 9
Dependent Claim
55 words
The method as recited in claim 3, wherein the steps of etching and removing said oxide comprises exposing respective said calibration semiconductor substrate and said target semiconductor substrate simultaneously to a wet etchant sensitive to removal of only SiO x (1≦x≧2) for removing oxide by an identical amount on said calibration and target semiconductor substrates.
Claim 10
Dependent Claim
34 words
The method as recited in claim 3, wherein said measuring steps comprise scanning from a reduced height oxide of respective said calibration and target semiconductor substrates to respective abutting said calibration and target regions.
Claim 11
Dependent Claim
34 words
The method as recited in claim 1, wherein said deriving step comprising determining concentration of dopant along said test structure of said calibration region at a plurality of locations along said upper surface topography.
Claim 12
Dependent Claim
28 words
The method as recited in claim 10, wherein said determining step comprises taking resistive readings along said test structure and relating said resistive readings to concentration of dopant.
Claim 13
Dependent Claim
31 words
The method as recited in claim 10, wherein said determining step comprises sputter removing atoms of dopant from said test structure and mass analyzing the quantity of said sputter removed atoms.
Claim 14
Independent Claim
213 words
A method for deriving a concentration density of dopant within a dopant region as a function of etching depth into said dopant region, comprising the steps of: providing a wafer having an upper surface with an oxide formed thereon and a dopant region extending from said upper surface to a depth below said upper surface; cleaving said wafer perpendicular to said upper surface to expose a cross-section to said oxide and said dopant region; exposing said wafer to an oxide etchant and then to a dopant region etchant to remove along said cross-section a portion of the oxide and the dopant region, wherein said dopant region is removed at a rate proportional to a concentration of dopant atoms within said dopant region, and said oxide and a portion of the dopant region abutting said oxide are removed to a topological height disparity greater than 10 nm and less than 40 nm; scanning a probe of an atomic force microscope across said cross-section, wherein said topological height disparity signals to said atomic force microscope the uppermost boundary of said dopant region; and computing concentration of dopant within said dopant region from said uppermost boundary to depths below said uppermost boundary as a function of the amount of dopant region removed by the exposing step.
Claim 15
Independent Claim
213 words
A method for deriving a concentration density of dopant within a dopant region as a function of etching depth into said dopant region, comprising the steps of: providing a wafer having an upper surface with an oxide formed thereon and a dopant region extending from said upper surface to a depth below said upper surface; cleaving said wafer perpendicular to said upper surface to expose a cross-section to said oxide and said dopant region; exposing said wafer to an oxide etchant and then to a dopant region etchant to remove along said cross-section a portion of the oxide and the dopant region, wherein said dopant region is removed at a rate proportional to a concentration of dopant atoms within said dopant region, and said oxide and a portion of the dopant region abutting said oxide are removed to a topological height disparity greater than 10 nm and less than 40 nm; scanning a probe of an atomic force microscope across said cross-section, wherein said topological height disparity signals to said atomic force microscope the uppermost boundary of said dopant region; and computing concentration of dopant within said dopant region from said uppermost boundary to depths below said uppermost boundary as a function of the amount of dopant region removed by the exposing step.
Claim 16
Dependent Claim
33 words
The method as recited in claim 13, wherein said computing step comprises determining resistivity of said dopant region remaining after said exposing step and relating said resistive readings to concentration of dopant therein.
Claim 17
Dependent Claim
35 words
The method as recited in claim 13, wherein said computing step comprises sputter removing atoms of dopant from said dopant region remaining after said exposing step and analyzing the quantity of said sputter removed atoms.
Claim 18
Independent Claim
210 words
A method for deriving a calibration curve of concentration density versus etch depth on a calibration wafer and for relating etch depth on a target wafer to target wafer concentration density: forming cross-sections through calibration and target wafers having respective calibration and target oxides formed on one surface of said wafers and respective calibration and target doping regions formed directly beneath said calibration and target oxides; exposing the cross-sections of said calibration and target wafers to identical etchant conditions to remove a portion of the calibration and target oxides separate from the removal of a portion of the calibration and target regions, wherein a measurable upper surface disparity exists between said calibration oxide and said calibration region and well as between said target oxide and said target region, and wherein the calibration and target regions are removed at a rate proportional to a concentration density of dopants therein; scanning a probe of an atomic force microscope across the cross-sections of said calibration and target wafers to determine respective etch depth; deriving a calibration curve of concentration density versus etch depth across the cross-section of said calibration wafer; and from etch depth of said target wafer, relating comparable etch depth on said calibration curve to concentration density of said target wafer.
Claim 19
Independent Claim
210 words
A method for deriving a calibration curve of concentration density versus etch depth on a calibration wafer and for relating etch depth on a target wafer to target wafer concentration density: forming cross-sections through calibration and target wafers having respective calibration and target oxides formed on one surface of said wafers and respective calibration and target doping regions formed directly beneath said calibration and target oxides; exposing the cross-sections of said calibration and target wafers to identical etchant conditions to remove a portion of the calibration and target oxides separate from the removal of a portion of the calibration and target regions, wherein a measurable upper surface disparity exists between said calibration oxide and said calibration region and well as between said target oxide and said target region, and wherein the calibration and target regions are removed at a rate proportional to a concentration density of dopants therein; scanning a probe of an atomic force microscope across the cross-sections of said calibration and target wafers to determine respective etch depth; deriving a calibration curve of concentration density versus etch depth across the cross-section of said calibration wafer; and from etch depth of said target wafer, relating comparable etch depth on said calibration curve to concentration density of said target wafer.
Claim 20
Dependent Claim
19 words
The method as recited in claim 16, wherein said calibration region is larger in cross-section than said target region.
Claim 21
Dependent Claim
17 words
The method as recited in claim 16, wherein said calibration and target regions have n-type impurities therein.
Claim 22
Dependent Claim
17 words
The method as recited in claim 16, wherein said calibration and target regions having p-type impurities therein.
Claim 23
Dependent Claim
23 words
The method as recited in claim 16, wherein said measurable upper surface disparity is greater than 10 nm and less than 40 nm.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-05-28 | 1999-11-27 | 2000-05-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-05-28 | 2003-11-27 | 2004-05-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-05-28 | 2007-11-27 | 2008-05-28 | $7700.00 | Window Closed / Lapsed |