US6558755B2
Expired / Lapsed
US
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Plasma curing process for porous silica thin film
Assignee: Axcelis Technologies Inc
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Filing: 2001-03-19
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Granted: 2003-05-06
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Expires: 2021-03-19
Abstract
Abstract Low dielectric constant films with improved elastic modulus. The method of making such coatings involves providing a porous network coating produced from a resin containing at least 2 Si-H groups and plasma curing the coating to convert the coating into porous silica. Plasma curing of the network coating yields a coating with improved modulus, but with a higher dielectric constant. The costing is plasma cured for between about 15 and about 120 seconds at a temperature less than or about 350° C. The plasma cured coating can optionally be annealed. Rapid thermal processing (RTP) of the plasma cured coating reduces the dielectric constant of the coating while maintaining an improved elastic modulus as compared to the plasma cured porous network coating. The annealing temperature is typically loss than or about 475° C., and the annealing time is typically no more than or about 180 seconds. The annealed, plasma cured coating has a dielectric constant in the range of from about 1.1 to about 2.4 and an improved elastic modulus.
Inventors
- 👤 Ivan L. Berry, III
- 👤 Todd Bridgewater
- 👤 Wei Chen
- 👤 Qingyuan Han
- 👤 Eric S. Moyer
- 👤 Michael J. Spaulding
- 👤 Carlo Waldfried
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 11:16
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/113; C01B33/12; H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6925; C01B33/126; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/665
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
60 words
A method of making a plasma cured coating comprising: providing a porous network coating produced from a resin molecule containing at least 2 Si—H groups; and plasma curing the porous network coating to reduce an amount of Si—H bonds and to produce an SiO 2 —containlng plasma cured coating having a first dielectric constant and having a first elastic modulus.
Claim 2
Independent Claim
60 words
A method of making a plasma cured coating comprising: providing a porous network coating produced from a resin molecule containing at least 2 Si—H groups; and plasma curing the porous network coating to reduce an amount of Si—H bonds and to produce an SiO 2 —containlng plasma cured coating having a first dielectric constant and having a first elastic modulus.
Claim 3
Dependent Claim
26 words
The method of claim 1 wherein the porous network coating is plasma cured for a time in the range of about 15 to about 120 seconds.
Claim 4
Dependent Claim
22 words
The method of claim 1 wherein the porous network coating is plasma cured at a temperature less than or about 350° C.
Claim 5
Dependent Claim
27 words
The method of claim 1 wherein the porous network coating is plasma cured at a temperature in the range of about 80° C. to about 280° C.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein the porous network coating is plasma cured at a temperature in the range of about 195° C. to about 230° C.
Claim 7
Dependent Claim
46 words
The method of claim 1 further comprising annealing the plasma cured coating to provide an annealed, plasma cured coating having a second dielectric constant which is less than the first dielectric constant and having a second elastic modulus which is comparable to the first elastic modulus.
Claim 8
Dependent Claim
21 words
The method of claim 6 wherein the plasma cured coating is annealed at a temperature less than or about 475° C.
Claim 9
Dependent Claim
26 words
The method of claim 6 wherein the plasma cured coating is annealed at a temperature in the range of about 350° C. to about 450° C.
Claim 10
Dependent Claim
20 words
The method of claim 6 wherein the plasma cured coating is annealed for no more than or about 180 seconds.
Claim 11
Dependent Claim
23 words
The method of claim 6 wherein the second elastic modulus of the annealed, plasma cured coatIng is greater than or about 4 GPa.
Claim 12
Dependent Claim
25 words
The method of claim 6 wherein the second elastic modulus of the annealed, plasma cured coating is between about 4 GPa and about 10 GPa.
Claim 13
Dependent Claim
27 words
The method of claim 6 wherein the second dielectric constant of the annealed, plasma cured coating is in the range of from about 1.1 to about 3.5.
Claim 14
Dependent Claim
27 words
The method of claim 6 wherein the second dielectric constant of the annealed, plasma cured coating is in the range of from about 2 to about 2.5.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-05-05 | 2006-11-04 | 2007-05-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-05-05 | 2010-11-04 | 2011-05-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-05-05 | 2014-11-04 | 2015-05-06 | $7700.00 | Window Closed / Lapsed |