EP1003210A2
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EP
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A method of forming coatings
Assignee: Dow Silicones Corp
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Filing: 1999-11-05
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Granted: —
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Expires: 2019-11-05
Abstract
Abstract A coating is formed on a substrate by depositing a solution comprising a resin containing at least 2 Si-H groups and a solvent in a manner in which at least 5 volume % of the solvent remains in the coating after deposition followed by exposing the coating to an environment comprising a basic catalyst and water at a concentration sufficient to cause condensation of the Si-H groups and evaporating the solvent from the coating to form a porous network coating. The method of the invention is particularly useful for applying low dielectric constant coatings on electronic devices.
Inventors
- 👤 Kyuha Chung
- 👤 Eric Scott Moyer
- 👤 Michael John Spaulding
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 14:38
CPC Classifications
B; B32; B32B; B32B27/00; C; C04; C04B; C04B41/00; C04B41/45; C04B41/50; C04B41/5025; C04B41/5035; H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6546; H10P14/66; H10P14/665; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/31504; Y10T428/31652; Y10T428/31663
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
90 words
A method of forming a coating on a substrate
comprising: depositing a coating on a substrate with a
solution comprising a resin containing at least 2 Si-H
groups and a solvent in a manner in which at least 5 volume
% of the solvent remains in the coating after deposition; exposing the coating to an environment comprising
a basic catalyst and water at a concentration to cause
hydrolysis of the Si-H groups and at least partial
condensation; and evaporating the solvent from the coating to form a
porous network coating.
Claim 2
Dependent Claim
22 words
The method of claim 1 wherein the porous
network coating is heated to a temperature to convert the
coating to a ceramic.
Claim 3
Dependent Claim
78 words
The method of claim 1 or 2, wherein the resin
containing at least 2 Si-H groups has the formula: {R 3 SiO 1/2 } a {R 2 SiO 2/2 } b {RSiO 3/2 } c {SiO 4/2 } d wherein each R is independently selected from hydrogen,
alkyl, alkenyl and aryl groups and alkyl, alkenyl and aryl
groups substituted with halogen, nitrogen, oxygen, sulfur or
silicon atoms, with the proviso that at least 2 R groups are
hydrogen.
Claim 4
Dependent Claim
113 words
The method of claim 3 wherein the resin
comprises hydrogen silsesquioxane resin of the structure
selected from (HSiO 3/2 ) n , a polymer having units of the
formula HSi(OH) a O 3-x/2 or a polymer having units of the
formula HSi(OH) x (OR) y O z/2 , wherein each R is independently
an organic group which, when bonded to silicon through the
oxygen atom, forms a hydrolyzable substituent, a = 0-2, x =
0-2, y = 0-2, z = 1-3, x + y + z = 3, n is an integer
greater than 3 and the average value of y over all of the
units of the polymer is greater than 0.
Claim 5
Independent Claim
46 words
The method according to any of claims 1 to 4, wherein
the solvent is selected from alcohols, aromatic
hydrocarbons, alkanes, alkenes, ketones, esters, ethers or
mixtures thereof and is present in an amount sufficient to
dissolve the hydrogen silsesquioxane to between 0.1 and 95
weight percent.
Claim 6
Dependent Claim
15 words
The method of claim 5, wherein the solvent has
a boiling point greater than 175°C.
Claim 7
Dependent Claim
27 words
The method of claim 5, wherein the solvent is a
mixture of solvents and at least one of the solvents has a
boiling point greater than 175°C.
Claim 8
Dependent Claim
20 words
The method of claim 6 or 7, wherein the solvent with
a boiling point greater than 175°C. is a hydrocarbon.
Claim 9
Independent Claim
27 words
The method according to any of claims 2 to 8, wherein
the coating is heated to a temperature of 50 to 500°C. for
up to 6 hours.
Claim 10
Independent Claim
25 words
The method according to any of claims 1 to 9, wherein
the substrate is coated in a closed system to inhibit
evaporation of the solvent.
Claim 11
Independent Claim
33 words
The method according to any of claims 1 to 10,
wherein the coating is exposed to ammonia and water vapors
for up to 4 hours at a temperature of between 20°C. and
300°C.
Claim 12
Independent Claim
25 words
The method according to any of claims 1 to 11, in
which the formed porous network coating has a dielectric
constant of 1.1 to 2.4.
Claim 13
Dependent Claim
20 words
The method of claim 12, in which the formed porous
network coating has a dielectric constant of 1.5 to 2.2.
Claim 14
Dependent Claim
18 words
An electronic device containing a coating prepared by
the method according to any of claims 1 to 13.
Claim 15
Dependent Claim
18 words
An electronic circuit containing a coating prepared
by the method according to any of claims 1 to 14.
References Cited (Backward Citations)
No citation records indexed.
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