US5961851A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Microwave plasma discharge device
Assignee: Lam Research Corp
•
Filing: 1996-04-02
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Granted: 1999-10-05
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Expires: 2016-04-02
Abstract
Abstract A method of removing material from a substrate, and a plasma discharge device wherein a plasma is excited by microwave energy having an electric field which is azimuthally and axially uniform in relation to the plasma tube. The microwave cavity is divided longitudinally into sections by conducting partitions, each of which is separately fed with microwave energy, and the plasma tube extends through openings in the partitions.
Inventors
- 👤 Mohammad Kamarehi
- 👤 Richard Pingree
- 👤 Jianou Shi
- 👤 Gerald Cox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 02:35
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/10; H10P70/12; H10P70/125; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32266; H01J37/32284; H10P72/00; H10P72/04; H10P72/0402; H10P72/0404; H01J2237/00; H01J2237/32; H01J2237/33; H01J2237/335; H01J2237/3355
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
125 words
A method of removing material from a substrate comprising, providing a plasma discharge device comprised of a microwave cavity having a long dimension, including conducting partitions which divide the cavity lengthwise into sections, each partition having an opening therein, and an elongated plasma tube passing through said microwave cavity and through the opening in each partition in the direction of the long dimension of the cavity, flowing gas through said plasma tube, exciting said gas to a plasma by coupling microwave power to said gas which has an electric field which is substantially azimuthally and axially uniform in relation to said tube, and feeding the afterglow from the plasma to a process chamber where said substrate is located, for removing said material from said substrate.
Claim 2
Independent Claim
125 words
A method of removing material from a substrate comprising, providing a plasma discharge device comprised of a microwave cavity having a long dimension, including conducting partitions which divide the cavity lengthwise into sections, each partition having an opening therein, and an elongated plasma tube passing through said microwave cavity and through the opening in each partition in the direction of the long dimension of the cavity, flowing gas through said plasma tube, exciting said gas to a plasma by coupling microwave power to said gas which has an electric field which is substantially azimuthally and axially uniform in relation to said tube, and feeding the afterglow from the plasma to a process chamber where said substrate is located, for removing said material from said substrate.
Claim 3
Dependent Claim
142 words
A plasma discharge device for treating a workpiece comprising, a microwave cavity having a long dimension and including conducting partitions which divide the cavity into lengthwise sections, each partition having an opening therein, an elongated plasma tube passing through said microwave cavity and through the opening in each partition in the direction of said long dimension of the cavity, means for providing gas to said plasma tube, means for providing microwave power of predetermined frequency, which is fed to said cavity, said cavity being dimensioned in relation to said microwave frequency to create an electric field in said cavity for exciting said gas in said tube which is substantially azimuthally and axially uniform in relation to said tube, and a process chamber separate from said cavity which is adapted for containing said workpiece and is in fluid communication with said plasma tube.
Claim 4
Dependent Claim
142 words
A plasma discharge device for treating a workpiece comprising, a microwave cavity having a long dimension and including conducting partitions which divide the cavity into lengthwise sections, each partition having an opening therein, an elongated plasma tube passing through said microwave cavity and through the opening in each partition in the direction of said long dimension of the cavity, means for providing gas to said plasma tube, means for providing microwave power of predetermined frequency, which is fed to said cavity, said cavity being dimensioned in relation to said microwave frequency to create an electric field in said cavity for exciting said gas in said tube which is substantially azimuthally and axially uniform in relation to said tube, and a process chamber separate from said cavity which is adapted for containing said workpiece and is in fluid communication with said plasma tube.
Claim 5
Dependent Claim
21 words
The device of claim 1 further including coupling means for separately coupling the microwave power to each of the cavity sections.
Claim 6
Dependent Claim
23 words
The device of claim 3 wherein the electric field in the cavity is in the rectangular TM 110 or cylindrical TM 010 mode.
Claim 7
Dependent Claim
22 words
The device of claim 3 wherein the plasma tube is made of a material which is inclined to crack when heated unequally.
Claim 8
Dependent Claim
22 words
The device of claim 5 wherein said material has a linear thermal expansion coefficient greater than 7×10 -7 /K° at operating temperature.
Claim 9
Dependent Claim
13 words
The device of claim 5 wherein the plasma tube is made of sapphire.
Claim 10
Dependent Claim
14 words
The device of claim 6 wherein said gas comprises fluorine or a compound thereof.
Claim 11
Dependent Claim
31 words
The device of claim 3 wherein the openings in the partitions are made large enough so that the plasma tube is separated from the partition so as to provide microwave leakage.
Claim 12
Dependent Claim
16 words
The device of claim 3 wherein said coupling means is a plate with coupling irises therein.
Claim 13
Dependent Claim
35 words
The device of claim 3 wherein said tube is coaxial with an outer tube which surrounds said tube, and wherein pressurized cooling gas is fed through the space between said tube and said outer tube.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-04 | 2003-04-05 | 2003-10-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-04 | 2007-04-05 | 2007-10-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-04 | 2011-04-05 | 2011-10-05 | $7700.00 | Window Closed / Lapsed |