US4802183A
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Microwave excited excimer laser and method
Assignee: Leland Stanford Junior University
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Filing: 1982-04-07
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Granted: 1989-01-31
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Expires: 2002-04-07
Abstract
Abstract A microwave pumped excimer laser and method.
Inventors
- 👤 Stephen E. Harris
- 👤 James F. Young
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:46
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/09; H01S3/097; H01S3/0975; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
62 words
An excimer laser comprising a resonant optical cavity containing a gas-phase lasing molecular species, and means for coupling or applying microwave energy to said lasing species whereby the atoms or molecules of the lasing molecular species are excited or pumped into their upper or energetic level from which they can emit photons and make a transition to a lower unbound unexcited state.
Claim 2
Dependent Claim
62 words
An excimer laser comprising a resonant optical cavity containing a gas-phase lasing molecular species, and means for coupling or applying microwave energy to said lasing species whereby the atoms or molecules of the lasing molecular species are excited or pumped into their upper or energetic level from which they can emit photons and make a transition to a lower unbound unexcited state.
Claim 3
Dependent Claim
49 words
An excimer laser as in claim 1 in which the lasing species is placed in a second waveguide and a first waveguide is coupled to the second to transfer microwave energy from the first waveguide into the second to couple the energy to the lasing molecular or atom species.
Claim 4
Dependent Claim
23 words
An excimer laser as in claim 2 in which the lasing atoms or molecules are in a gas mixture, including a buffer gas.
Claim 5
Dependent Claim
20 words
An excimer laser as in claim 3 in which the gas mixture is at a pressure greater than one atmosphere.
Claim 6
Dependent Claim
17 words
An excimer laser as in claim 4 including means for circulating the gas mixture through the cavity.
Claim 7
Dependent Claim
23 words
An excimer laser as in claim 1 in which the lasing atoms or molecules are in a gas mixture, including a buffer gas.
Claim 8
Dependent Claim
20 words
An excimer laser as in claim 6 in which the gas mixture is at a pressure greater than one atmosphere.
Claim 9
Dependent Claim
17 words
An excimer laser as in claim 6 including means for circulating the gas mixture through the cavity.
Claim 10
Dependent Claim
15 words
An excimer laser as in claim 6 in which the gas mixture comprises a rare-gas-halogen-buffer.
Claim 11
Dependent Claim
14 words
An excimer laser as in claim 1 in which the lasing species is XeCl.
Claim 12
Dependent Claim
34 words
An excimer laser as in claim 1 in which the lasing species is selected from the group comprising Ar 2 , Kr 2 , XeCl, XeF, ArF, KrF, KrCl, XeBr, HgBr, Xe 2 .
Claim 13
Independent Claim
28 words
The method of pumping a lasing atom or molecular species in an excimer laser which comprises exciting or pumping said lasing atom or molecular species with microwave energy.
Claim 14
Independent Claim
28 words
The method of pumping a lasing atom or molecular species in an excimer laser which comprises exciting or pumping said lasing atom or molecular species with microwave energy.
Claim 15
Dependent Claim
12 words
The method of claim 12 in which the microwave energy is pulsed.
Claim 16
Dependent Claim
29 words
The method of claim 13 in which the lasing atom or molecular species is in a gas mixture and the mixture is at a pressure greater than one atmosphere.
Claim 17
Dependent Claim
18 words
The method of claim 14 including the additional step of circulating the gas mixture through the excitation region.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-01-31 | 1992-08-01 | 1993-01-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-01-31 | 1996-08-01 | 1997-01-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-01-31 | 2000-08-01 | 2001-01-31 | $7700.00 | Window Closed / Lapsed |