US6310362B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electro-optical device
Assignee: Semiconductor Energy Laboratory Co Ltd
•
Filing: 1999-10-26
•
Granted: 2001-10-30
•
Expires: 2019-10-26
Abstract
Abstract A display device is disclosed. The display device comprises a glass substrate, and an insulating film provided on the glass substrate and comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen. A thin film transistor and a pixel electrode are provided over the insulating film.
Inventors
- 👤 Yasuhiko Takemura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 02:40
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2922; H10P10/00; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/031; H10D30/0312; H10D30/0314; H10D30/0321; H10D86/00; H10D86/01; H10D86/021; H10D86/0221; H10D86/0223; H10D86/0225; H10D86/0227; H10D86/0229; H10P14/32; H10P14/3202; H10P14/3238; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/38; H10P14/3802; H10P14/3808; H10P14/3816; H10D30/60; H10D30/67; H10D30/6704; H10D30/6713; H10D30/6715; H10D30/6717; H10P14/3806
Claims Analysis
Total Claims: 115
Claim 1
Independent Claim
174 words
A display device comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
Claim 2
Dependent Claim
174 words
A display device comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
Claim 3
Dependent Claim
176 words
A display device comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 4
Dependent Claim
176 words
A display device comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 5
Dependent Claim
156 words
A display device comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 6
Dependent Claim
156 words
A display device comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 7
Dependent Claim
158 words
A display device comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 8
Dependent Claim
158 words
A display device comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 9
Dependent Claim
175 words
A liquid crystal display comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
Claim 10
Dependent Claim
175 words
A liquid crystal display comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode.
Claim 11
Dependent Claim
177 words
A liquid crystal display comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate: a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 12
Dependent Claim
177 words
A liquid crystal display comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate: a source region and a drain region provided over said insulating film; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 13
Dependent Claim
157 words
A liquid crystal display comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 14
Dependent Claim
157 words
A liquid crystal display comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 15
Dependent Claim
159 words
A liquid crystal display comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 16
Dependent Claim
159 words
A liquid crystal display comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200KÙ/square.
Claim 17
Dependent Claim
12 words
The device of claim 1 wherein said transparent organic film comprises polyimide.
Claim 18
Dependent Claim
12 words
The device of claim 2 wherein said transparent organic film comprises polyimide.
Claim 19
Dependent Claim
12 words
The device of claim 3 wherein said transparent organic film comprises polyimide.
Claim 20
Dependent Claim
12 words
The device of claim 4 wherein said transparent organic film comprises polyimide.
Claim 21
Dependent Claim
12 words
The display of claim 5 wherein said transparent organic film comprises polyimide.
Claim 22
Dependent Claim
12 words
The display of claim 6 wherein said transparent organic film comprises polyimide.
Claim 23
Dependent Claim
12 words
The display of claim 7 wherein said transparent organic film comprises polyimide.
Claim 24
Dependent Claim
12 words
The display of claim 8 wherein said transparent organic film comprises polyimide.
Claim 25
Dependent Claim
14 words
The device of claim 1 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 26
Dependent Claim
14 words
The device of claim 2 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 27
Dependent Claim
14 words
The device of claim 3 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 28
Dependent Claim
14 words
The device of claim 4 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 29
Dependent Claim
14 words
The display of claim 5 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 30
Dependent Claim
14 words
The display of claim 6 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 31
Dependent Claim
14 words
The display of claim 7 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 32
Dependent Claim
14 words
The display of claim 8 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 33
Dependent Claim
12 words
The device of claim 1 wherein said substrate comprises an insulating substrate.
Claim 34
Dependent Claim
12 words
The device of claim 2 wherein said substrate comprises an insulating substrate.
Claim 35
Dependent Claim
12 words
The device of claim 3 wherein said substrate comprises an insulating substrate.
Claim 36
Dependent Claim
12 words
The device of claim 4 wherein said substrate comprises an insulating substrate.
Claim 37
Dependent Claim
12 words
The display of claim 5 wherein said substrate comprises an insulating substrate.
Claim 38
Dependent Claim
12 words
The display of claim 6 wherein said substrate comprises an insulating substrate.
Claim 39
Dependent Claim
12 words
The display of claim 7 wherein said substrate comprises an insulating substrate.
Claim 40
Dependent Claim
12 words
The display of claim 8 wherein said substrate comprises an insulating substrate.
Claim 41
Dependent Claim
37 words
The device of claim 1 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 42
Dependent Claim
37 words
The device of claim 2 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 43
Dependent Claim
37 words
The device of claim 3 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 44
Dependent Claim
37 words
The device of claim 4 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 45
Dependent Claim
37 words
The display of claim 5 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 46
Dependent Claim
37 words
The display of claim 6 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 47
Dependent Claim
37 words
The display of claim 7 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 48
Dependent Claim
37 words
The display of claim 8 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 49
Dependent Claim
14 words
The device of claim 1 wherein said pixel electrode comprises an indium tin oxide.
Claim 50
Dependent Claim
14 words
The device of claim 2 wherein said pixel electrode comprises an indium tin oxide.
Claim 51
Dependent Claim
14 words
The device of claim 3 wherein said pixel electrode comprises an indium tin oxide.
Claim 52
Dependent Claim
14 words
The device of claim 4 wherein said pixel electrode comprises an indium tin oxide.
Claim 53
Dependent Claim
14 words
The display of claim 5 wherein said pixel electrode comprises an indium tin oxide.
Claim 54
Dependent Claim
14 words
The display of claim 6 wherein said pixel electrode comprises an indium tin oxide.
Claim 55
Dependent Claim
14 words
The display of claim 7 wherein said pixel electrode comprises an indium tin oxide.
Claim 56
Dependent Claim
14 words
The display of claim 8 wherein said pixel electrode comprises an indium tin oxide.
Claim 57
Dependent Claim
173 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 58
Dependent Claim
173 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode.
Claim 59
Dependent Claim
170 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
Claim 60
Dependent Claim
170 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
Claim 61
Dependent Claim
202 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
Claim 62
Dependent Claim
202 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square.
Claim 63
Dependent Claim
189 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square, and wherein said source region and said drain region have a sheet resistance of 300 to 800{tilde over (Ω)}square.
Claim 64
Dependent Claim
189 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a substrate; a source region and a drain region provided over said substrate; a channel forming region provided over said substrate between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200K{tilde over (Ω)}square, and wherein said source region and said drain region have a sheet resistance of 300 to 800{tilde over (Ω)}square.
Claim 65
Dependent Claim
218 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200 KΩsquare, and wherein said source region and said drain region have a sheet resistance of 300 to 800Ωsquare.
Claim 66
Dependent Claim
218 words
A liquid crystal display having an active matrix region, said active matrix region comprising: a glass substrate; an insulating film comprising aluminum nitride containing from 0.01 to 20% by atomic of oxygen therein with respect to nitrogen, said insulating film being provided on said glass substrate; a source region and a drain region provided over said insulating film; a channel forming region provided over said insulating film between said source region and said drain region; a gate electrode provided adjacent to said channel forming region with a gate insulating film therebetween; a transparent organic film provided over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode; a pixel electrode provided over said transparent organic film; a contact hole provided in said transparent organic film; a lightly doped drain provided between said channel forming region and said drain region; and an electrode connected with one of said source region and said drain region through said contact hole and connected with said pixel electrode and provided over at least a side edge part of said pixel electrode, wherein said lightly doped drain has a sheet resistance of 10 to 200 KΩsquare, and wherein said source region and said drain region have a sheet resistance of 300 to 800Ωsquare.
Claim 67
Dependent Claim
36 words
The device of claim 1 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 68
Dependent Claim
34 words
The device of claim 54 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 69
Dependent Claim
36 words
The device of claim 2 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 70
Dependent Claim
34 words
The device of claim 56 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 71
Dependent Claim
36 words
The device of claim 3 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 72
Dependent Claim
34 words
The device of claim 58 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 73
Dependent Claim
36 words
The device of claim 4 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 74
Dependent Claim
34 words
The device of claim 60 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 75
Dependent Claim
36 words
The display of claim 5 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 76
Dependent Claim
34 words
The display of claim 62 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 77
Dependent Claim
36 words
The display of claim 6 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 78
Dependent Claim
34 words
The device of claim 64 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 79
Dependent Claim
36 words
The display of claim 7 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 80
Dependent Claim
34 words
The display of claim 66 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 81
Dependent Claim
36 words
The display of claim 8 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 82
Dependent Claim
34 words
The display of claim 68 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 83
Dependent Claim
36 words
The display of claim 49 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 84
Dependent Claim
34 words
The display of claim 70 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 85
Dependent Claim
36 words
The display of claim 50 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 86
Dependent Claim
34 words
The display of claim 72 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 87
Dependent Claim
36 words
The display of claim 51 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 88
Dependent Claim
34 words
The display of claim 74 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 89
Dependent Claim
36 words
The display of claim 52 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 90
Dependent Claim
34 words
The display of claim 76 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 91
Dependent Claim
36 words
The display of claim 53 wherein said source region and said drain region and said channel forming region are provided in a semiconductor film comprising a silicon and an element promoting crystallization of said semiconductor film.
Claim 92
Dependent Claim
34 words
The display of claim 78 wherein said element is selected from the group consisting of Ni, Fe, Co, Ru, Rh, Pd, Os, Ir, Pt, Sc, Ti, V, Cr, Mn, Cu, Zn, Au and Ag.
Claim 93
Dependent Claim
12 words
The display of claim 49 wherein said transparent organic film comprises polyimide.
Claim 94
Dependent Claim
12 words
The display of claim 50 wherein said transparent organic film comprises polyimide.
Claim 95
Dependent Claim
12 words
The display of claim 51 wherein said transparent organic film comprises polyimide.
Claim 96
Dependent Claim
12 words
The display of claim 52 wherein said transparent organic film comprises polyimide.
Claim 97
Dependent Claim
12 words
The display of claim 53 wherein said transparent organic film comprises polyimide.
Claim 98
Dependent Claim
14 words
The display of claim 49 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 99
Dependent Claim
14 words
The display of claim 50 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 100
Dependent Claim
14 words
The display of claim 51 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 101
Dependent Claim
14 words
The display of claim 52 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 102
Dependent Claim
14 words
The display of claim 53 wherein said pixel electrode comprises a transparent pixel electrode.
Claim 103
Dependent Claim
12 words
The display of claim 50 wherein said substrate comprises an insulating substrate.
Claim 104
Dependent Claim
12 words
The display of claim 52 wherein said substrate comprises an insulating substrate.
Claim 105
Dependent Claim
37 words
The display of claim 49 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 106
Dependent Claim
37 words
The display of claim 50 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 107
Dependent Claim
37 words
The display of claim 51 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 108
Dependent Claim
37 words
The display of claim 52 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 109
Dependent Claim
37 words
The display of claim 53 wherein said transparent organic film provides a leveled upper surface over said source region and said drain region and said channel forming region and said gate insulating film and said gate electrode.
Claim 110
Dependent Claim
14 words
The display of claim 49 wherein said pixel electrode comprises an indium tin oxide.
Claim 111
Dependent Claim
14 words
The display of claim 50 wherein said pixel electrode comprises an indium tin oxide.
Claim 112
Dependent Claim
14 words
The display of claim 51 wherein said pixel electrode comprises an indium tin oxide.
Claim 113
Dependent Claim
14 words
The display of claim 52 wherein said pixel electrode comprises an indium tin oxide.
Claim 114
Dependent Claim
14 words
The display of claim 53 wherein said pixel electrode comprises an indium tin oxide.
Claim 115
Dependent Claim
21 words
The display of claim 49 further comprising a lightly doped drain provided between said channel forming region and said drain region.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2004-10-29 | 2005-04-30 | 2005-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-10-29 | 2009-04-30 | 2009-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-10-29 | 2013-04-30 | 2013-10-30 | $7700.00 | Window Closed / Lapsed |