Patent US6162585A successfully refreshed from Google Patents.
US6162585A
Expired / Lapsed
US
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Polyimide as a mask in vapor hydrogen fluoride etching
Assignee: Micron Technology Inc
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Filing: 1998-07-01
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Granted: 2000-12-19
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Expires: 2018-07-01
Abstract
Abstract A layer of polyimide or polysilicon is used as a mask in vapor hydrogen fluoride etching. Both non-photosensitive and photosensitive type polyimide may be used. A non-photosensitive polyimide mask requires the use of photoresist for patterning with a lithographic mask. Alternatively, photosensitive type polyimide may be patterned directly with the use of a lithographic mask. The resulting polyimide mask enables the etching of very small features with great uniformity. Such etching may be used to expose micropoint emitters of field emission devices.
Inventors
- 👤 Tianhong Zhang
- 👤 John K. Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:18
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
57 words
A method for selectively removing portions of an etchable material comprising: forming a layer of polyimide on the etchable material; patterning said layer of polyimide to expose portions of the etchable material; etching the etchable material using vapor hydrogen fluoride in accordance with a pattern defined by said layer of polyimide; and removing said layer of polyimide.
Claim 2
Independent Claim
57 words
A method for selectively removing portions of an etchable material comprising: forming a layer of polyimide on the etchable material; patterning said layer of polyimide to expose portions of the etchable material; etching the etchable material using vapor hydrogen fluoride in accordance with a pattern defined by said layer of polyimide; and removing said layer of polyimide.
Claim 3
Dependent Claim
47 words
The method of claim 1 wherein patterning said layer of polyimide comprises: forming a layer of photoresist over said layer of polyimide; selectively exposing said layer of photoresist; removing portions of said layers of photoresist and polyimide to define said pattern; and stripping said layer of photoresist.
Claim 4
Dependent Claim
28 words
The method of claim 1 wherein patterning said layer of polyimide comprises: selectively exposing said layer of polyimide; and developing said layer of polyimide to define said pattern.
Claim 5
Dependent Claim
21 words
The method of claim 1 wherein removing said layer of polyimide comprises subjecting said layer of polyimide to a polyimide stripper.
Claim 6
Dependent Claim
22 words
The method of claim 1 wherein etching the etchable material comprises the use of N 2 gas and vapor H 2 O.
Claim 7
Dependent Claim
19 words
The method of claim 1 wherein said etchable material is etched to a depth of greater than 4000 angstroms.
Claim 8
Dependent Claim
19 words
The method of claim 6 wherein said etchable material is etched to a depth of at least 8000 angstroms.
Claim 9
Independent Claim
77 words
A method for selectively removing portions of an etchable material comprising: cleaning the etchable material; forming a layer of polyimide over the etchable material; forming a layer of photoresist over said layer of polyimide; patterning said layer of photoresist; patterning said layer of polyimide in accordance with said layer of patterned photoresist and thereby uncovering portions of the etchable material; and exposing said layer of polyimide and said uncovered portions of etchable material to vapor hydrogen fluoride.
Claim 10
Independent Claim
77 words
A method for selectively removing portions of an etchable material comprising: cleaning the etchable material; forming a layer of polyimide over the etchable material; forming a layer of photoresist over said layer of polyimide; patterning said layer of photoresist; patterning said layer of polyimide in accordance with said layer of patterned photoresist and thereby uncovering portions of the etchable material; and exposing said layer of polyimide and said uncovered portions of etchable material to vapor hydrogen fluoride.
Claim 11
Dependent Claim
31 words
The method of claim 8 wherein forming said layer of polyimide comprises spin coating said layer of polyimide over the etchable material at a spin speed of at least 2300 rpm.
Claim 12
Dependent Claim
17 words
The method of claim 9 wherein said exposing step has a duration of less than 20 seconds.
Claim 13
Independent Claim
97 words
A method for selectively removing portions of an etchable material comprising: forming a layer of polyimide on the etchable material; patterning said layer of polyimide to expose portions of the etchable material; etching the etchable material in accordance with a pattern defined by said layer of polyimide, said etching including: purging the etchable material with N 2 gas; pretreating the etchable material with N 2 gas and vapor H 2 O; and exposing the etchable material to a combination of N 2 gas, vapor H 2 O and vapor hydrogen fluoride; and removing said layer of polyimide.
Claim 14
Independent Claim
97 words
A method for selectively removing portions of an etchable material comprising: forming a layer of polyimide on the etchable material; patterning said layer of polyimide to expose portions of the etchable material; etching the etchable material in accordance with a pattern defined by said layer of polyimide, said etching including: purging the etchable material with N 2 gas; pretreating the etchable material with N 2 gas and vapor H 2 O; and exposing the etchable material to a combination of N 2 gas, vapor H 2 O and vapor hydrogen fluoride; and removing said layer of polyimide.
Claim 15
Dependent Claim
21 words
The method of claim 11 wherein removing said layer of polyimide comprises subjecting said layer of polyimide to a polyimide stripper.
Claim 16
Independent Claim
86 words
A method comprising: providing an etchable material; forming a layer of polyimide over the etchable material, the polyimide layer covering a first portion of the etchable material, a second portion of the etchable material not being covered by the polyimide layer; exposing the polyimide layer and the second portion of the etchable material to vapor hydrogen fluoride, the vapor hydrogen fluoride etching the second portion of the etchable material, the polyimide layer preventing the vapor hydrogen fluoride from etching the first portion of the etchable material.
Claim 17
Independent Claim
86 words
A method comprising: providing an etchable material; forming a layer of polyimide over the etchable material, the polyimide layer covering a first portion of the etchable material, a second portion of the etchable material not being covered by the polyimide layer; exposing the polyimide layer and the second portion of the etchable material to vapor hydrogen fluoride, the vapor hydrogen fluoride etching the second portion of the etchable material, the polyimide layer preventing the vapor hydrogen fluoride from etching the first portion of the etchable material.
Claim 18
Dependent Claim
44 words
A method according to claim 13, wherein forming a layer of polyimide over the etchable material comprises covering the first and second portions of the etchable material with polyimide and then removing portions of the polyimide over the second portion of the etchable material.
Claim 19
Dependent Claim
23 words
A method according to claim 13, further comprising covering portions of the polyimide overlying the first portion of the etchable material with photoresist.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-19 | 2004-06-19 | 2004-12-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-19 | 2008-06-19 | 2008-12-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-19 | 2012-06-19 | 2012-12-19 | $7700.00 | Window Closed / Lapsed |