US5653619A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to form self-aligned gate structures and focus rings
Assignee: Micron Technology Inc
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Filing: 1994-09-06
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Granted: 1997-08-05
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Expires: 2014-09-06
Abstract
Abstract A selective etching and chemical mechanical planarization process is employed for the formation of self-aligned gate and focus ring structures surrounding an electron emission tip for use in field emission displays. The process is employed to construct an emission grid whereby the gate structure is capable of producing a field strength at the cathode tip sufficient to generate electron emission. The gate is disposed at a location above the tip such that the gate physically intercepts the outermost lateral portions of the beam, yet does not induce a significant electrostatic outward divergence of the beam, thereby reducing the cross-section of the beam.
Inventors
- 👤 Eugene H. Cloud
- 👤 Trung T. Doan
- 👤 Tyler A. Lowrey
- 👤 David A. Cathey
- 👤 J. Brett Rolfson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:27
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; H01J2209/00; H01J2209/02; H01J2209/022; H01J2209/0223; H01J2209/0226; H01J2329/00
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
93 words
A method of forming a structure which intercepts a portion of an electron beam, comprising the steps of: forming at least one emitter tip on a substrate, said emitter tip having an apex; disposing an insulating layer over said emitter tip, said insulating layer having an upper surface at least as high as the height of said emitter tip apex; disposing a conductive layer over said insulating layer; planarizing said conductive layer; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip.
Claim 2
Independent Claim
93 words
A method of forming a structure which intercepts a portion of an electron beam, comprising the steps of: forming at least one emitter tip on a substrate, said emitter tip having an apex; disposing an insulating layer over said emitter tip, said insulating layer having an upper surface at least as high as the height of said emitter tip apex; disposing a conductive layer over said insulating layer; planarizing said conductive layer; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip.
Claim 3
Dependent Claim
15 words
The method according to claim 1, wherein said step of planarizing includes chemical mechanical polishing.
Claim 4
Dependent Claim
16 words
The method according to claim 1, wherein said conductive layer is generally parallel to said substrate.
Claim 5
Dependent Claim
12 words
The method according to claim 1, wherein said conductive layer is planar.
Claim 6
Independent Claim
134 words
A method of forming a structure which intercepts a portion of an electron beam, said method comprising the steps of: forming at least one emitter tip on a substrate, said emitter having an apex; disposing an insulating layer over said emitter tip, said insulating layer having a thickness substantially equal to or greater than the height of said emitter tip; disposing a conductive layer over said insulating layer, said conductive layer having a lower surface substantially level to or higher than said apex of said emitter tip, said conductive layer is disposed to pull electrons from said emitter tip when a voltage differential is created therebetween; planarizing at least one of said layers; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip.
Claim 7
Independent Claim
134 words
A method of forming a structure which intercepts a portion of an electron beam, said method comprising the steps of: forming at least one emitter tip on a substrate, said emitter having an apex; disposing an insulating layer over said emitter tip, said insulating layer having a thickness substantially equal to or greater than the height of said emitter tip; disposing a conductive layer over said insulating layer, said conductive layer having a lower surface substantially level to or higher than said apex of said emitter tip, said conductive layer is disposed to pull electrons from said emitter tip when a voltage differential is created therebetween; planarizing at least one of said layers; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip.
Claim 8
Independent Claim
128 words
A method of forming a structure which intercepts a portion of an electron beam, said method comprising the steps of: forming at least one emitter tip on a substrate, said emitter having an apex; disposing an insulating layer over said emitter tip, said insulating layer having a thickness substantially equal to or greater than the height of said emitter tip; disposing a conductive layer over said insulating layer, said conductive layer having a lower surface substantially level to or higher than said apex of said emitter tip; planarizing at least one of said layers; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip, wherein said formed opening is conical and is spaced above said emitter tip.
Claim 9
Independent Claim
128 words
A method of forming a structure which intercepts a portion of an electron beam, said method comprising the steps of: forming at least one emitter tip on a substrate, said emitter having an apex; disposing an insulating layer over said emitter tip, said insulating layer having a thickness substantially equal to or greater than the height of said emitter tip; disposing a conductive layer over said insulating layer, said conductive layer having a lower surface substantially level to or higher than said apex of said emitter tip; planarizing at least one of said layers; and selectively removing portions of said layers to form an opening in said layers, exposing said apex of said emitter tip, wherein said formed opening is conical and is spaced above said emitter tip.
Claim 10
Independent Claim
100 words
A method of forming a field emission device, the method comprising the steps of: providing a substrate wafer having at least one electron emitter supported thereon; applying at least one insulating material layer over the substrate wafer and the emitter; applying at least one conductive material layer over the insulating material layer, the conductive material layer located at a distance from said substrate at least equal to the height of the emitter tip; and removing a portion of at least said conductive material layer to create at least one gate aperture exposing at least a portion of said electron emitter.
Claim 11
Independent Claim
100 words
A method of forming a field emission device, the method comprising the steps of: providing a substrate wafer having at least one electron emitter supported thereon; applying at least one insulating material layer over the substrate wafer and the emitter; applying at least one conductive material layer over the insulating material layer, the conductive material layer located at a distance from said substrate at least equal to the height of the emitter tip; and removing a portion of at least said conductive material layer to create at least one gate aperture exposing at least a portion of said electron emitter.
Claim 12
Dependent Claim
31 words
The method of claim 7, wherein the removing step comprises the steps of: planarizing a portion of at least one of said layers; and selectively removing exposed portions of said layers.
Claim 13
Dependent Claim
18 words
The method of claim 7, wherein each one of said layers is generally conformal to said electron emitters.
Claim 14
Dependent Claim
35 words
The method of claim 7, wherein the removing step includes removing portions of the conductive material layer, and etching away portions of the insulating material layer using said conductive material layer as an etching mask.
Claim 15
Dependent Claim
22 words
The method of claim 7, wherein said insulating material layer has a thickness at least equal to the height of said emitter.
Claim 16
Dependent Claim
53 words
The method of claim 7, further comprising the steps of: overlaying a second insulating material layer over the conductive material layer; overlaying a second conductive material layer over the additional insulating material layer; and removing a portion of at least the second conductive material layer to create at least one focus ring aperture.
Claim 17
Dependent Claim
29 words
The method of claim 12, further comprising the step of removing a portion of the additional insulating material layer generally intermediate the gate aperture and the focus ring aperture.
Claim 18
Dependent Claim
48 words
The method of claim 7, wherein each one of said layers is generally conformal to said emitter and the steps of applying said layers results in a layered peak overlying the emitter, and wherein the step of removing includes planarizing at least a portion of said layered peak.
Claim 19
Dependent Claim
23 words
The method of claim 14, wherein the removing step further includes the step of selectively removing additional portions of said insulating material layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-08-04 | 2001-02-03 | 2001-08-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-08-04 | 2005-02-03 | 2005-08-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-08-04 | 2009-02-03 | 2009-08-05 | $7700.00 | Window Closed / Lapsed |