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US5286679A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for attaching a semiconductor die to a leadframe using a patterned adhesive layer

Assignee: Round Rock Research LLC
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Filing: 1993-03-18
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Granted: 1994-02-15
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Expires: 2013-03-18
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Abstract

Abstract An improved method for attaching a semiconductor die to a leadframe is provided The improved method comprises forming a patterned adhesive layer on a side of a semiconductor wafer prior to singulation of the dies from the wafer. The adhesive layer is patterned such that wire bonding pads on the dies, as well as the streets between the dies, are free of adhesive material The adhesive layer may be deposited and patterned using a hot or cold screen printing process, by depositing and photopatterning a photosensitive adhesive, or using a resist etch back method. During a packaging process for attaching a die to a leadframe, the adhesive layer is heated and the lead fingers of the leadframe are placed in contact with the die under pressure. In an alternate embodiment of the invention, the lead fingers, rather than a side of the dies, are coated with an adhesive layer.

Inventors

  • 👤 Warren M. Farnworth
  • 👤 Ed A. Shrock
  • 👤 Scott Clifford
  • 👤 Jerrold L. King
  • 👤 Walter Moden

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 08:29
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/40; H10W70/411; H10W70/415; H10W70/417; H10W72/00; H10W72/071; H10W72/073; H10W72/07331; H10W72/07337; H10W72/07338; H10W72/07339; H10W72/075; H10W72/50; H10W72/59; H10W72/851; H10W72/853; H10W72/865; H10W72/90; H10W72/941; H10W72/944; H10W72/9445; H10W72/951; H10W72/952; H10W74/00; H10W90/00; H10W90/701; H10W90/731; H10W90/736; H10W90/751; H10W90/756

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 131 words
A method of attaching a semiconductor die formed with a plurality of bonding pads to a leadframe having a plurality of continuous metal lead fingers adapted to extend across a surface of the die for attachment to the bonding pads using fine bond wires, comprising: depositing an adhesive selected from the group consisting of thermoplastic adhesives or thermosetting adhesives on the die and patterning the adhesive to form a preapplied patterned adhesive layer on a surface of the die with the bonding pads of the die free of adhesive; heating the adhesive layer during a packaging process; and pressing the die, heated adhesive layer and lead fingers of the leadframe together during the packaging process to bond the adhesive layer and lead fingers and attach the lead fingers to the die.
Claim 2
Independent Claim 131 words
A method of attaching a semiconductor die formed with a plurality of bonding pads to a leadframe having a plurality of continuous metal lead fingers adapted to extend across a surface of the die for attachment to the bonding pads using fine bond wires, comprising: depositing an adhesive selected from the group consisting of thermoplastic adhesives or thermosetting adhesives on the die and patterning the adhesive to form a preapplied patterned adhesive layer on a surface of the die with the bonding pads of the die free of adhesive; heating the adhesive layer during a packaging process; and pressing the die, heated adhesive layer and lead fingers of the leadframe together during the packaging process to bond the adhesive layer and lead fingers and attach the lead fingers to the die.
Claim 3
Dependent Claim 37 words
The method as claimed in claim 1 and wherein the die is coated with an adhesive layer by depositing a patterned liquid adhesive layer on a front side of a wafer formed with a plurality of dies.
Claim 4
Dependent Claim 28 words
The method as claimed in claim 2 and wherein the adhesive layer is patterned such that the streets on the wafer between the dies are free of adhesive.
Claim 5
Dependent Claim 21 words
The method as claimed in claim 3 and wherein a liquid adhesive is deposited and patterned using a screen printing process.
Claim 6
Dependent Claim 30 words
The method as claimed in claim 3 and wherein a photosensitive liquid adhesive is deposited and patterned by a photopatterning/etching process and then hard baked to form the adhesive layer.
Claim 7
Dependent Claim 22 words
The method as claimed in claim 1 and wherein a liquid adhesive is deposited and patterned using a resist etch back process.
Claim 8
Dependent Claim 29 words
The method as claimed in claim 1 and wherein a liquid adhesive is deposited and patterned on a back side of a wafer formed with a plurality of dies.
Claim 9
Dependent Claim 22 words
The method as claimed in claim 3 and wherein the adhesive layer is heated during the packaging process by heating the leadframe.
Claim 10
Dependent Claim 22 words
The method as claimed in claim 3 and wherein the adhesive layer is heated during the packaging process by heating the die.
Claim 11
Dependent Claim 137 words
In semiconductor manufacture a method for attaching a semiconductor die to a leadframe, having a plurality of continuous metal lead fingers, said method comprising: forming a semiconductor wafer with a plurality of semiconductor dies having bond pads electrically connected to integrated circuits; coating a side of the wafer and dies with an adhesive selected from the group consisting of thermoplastic or thermosetting adhesives and patterning the adhesive to form a patterned adhesive layer on the wafer with the bond pads free of adhesive; separating the dies from the wafer; heating the patterned adhesive layer during a packaging process; pressing the lead fingers of the leadframe to a side of the adhesive coated die during the packaging process to bond the adhesive layer and leadframe and attach the lead fingers to the die; and continuing the packaging process.
Claim 12
Dependent Claim 137 words
In semiconductor manufacture a method for attaching a semiconductor die to a leadframe, having a plurality of continuous metal lead fingers, said method comprising: forming a semiconductor wafer with a plurality of semiconductor dies having bond pads electrically connected to integrated circuits; coating a side of the wafer and dies with an adhesive selected from the group consisting of thermoplastic or thermosetting adhesives and patterning the adhesive to form a patterned adhesive layer on the wafer with the bond pads free of adhesive; separating the dies from the wafer; heating the patterned adhesive layer during a packaging process; pressing the lead fingers of the leadframe to a side of the adhesive coated die during the packaging process to bond the adhesive layer and leadframe and attach the lead fingers to the die; and continuing the packaging process.
Claim 13
Dependent Claim 22 words
The method as claimed in claim 10 and wherein a liquid adhesive is deposited and patterned using a hot screen printing process.
Claim 14
Dependent Claim 22 words
The method as claimed in claim 10 and wherein a liquid adhesive is deposited and patterned using a cold screen printing process.
Claim 15
Dependent Claim 19 words
The method as claimed in claim 10 and wherein a liquid adhesive is deposited and patterned using a solvent.
Claim 16
Dependent Claim 26 words
The method as claimed in claim 10 and wherein a photosensitive the liquid adhesive is deposited and patterned using a photopatterning process and is hard baked.
Claim 17
Dependent Claim 22 words
The method as claimed in claim 10 and wherein a liquid adhesive is deposited and patterned using a resist etch back process.
Claim 18
Dependent Claim 32 words
The method as claimed in claim 10 and wherein the adhesive layer is formed on a front side of the die for attaching a lead-on-chip (LOC) die to a lead-on-chip (LOC) leadframe.
Claim 19
Dependent Claim 33 words
The method as claimed in claim 10 and wherein the adhesive layer is formed on a backside of the wafer for attaching a lead-under-chip (LUC) die to a leadframe or for chip stacking.
Claim 20
Dependent Claim 24 words
The method as claimed in claim 10 and wherein the adhesive layer has a thickness of from about 8 μm to about 200 μm.
Claim 21
Dependent Claim 23 words
The method as claimed in claim 19 and wherein the adhesive layer is formulated to function as an insulating/passivating layer for the wafer.
Claim 22
Independent Claim 110 words
A method for attaching a semiconductor die to a leadframe for a semiconductor package, comprising: providing a leadframe having a plurality of continuous lead fingers adapted to extend over a side of the die; applying an adhesive selected from the group consisting of thermoplastic adhesives or thermosetting adhesives to an underside of the lead fingers in a pattern that matches a placement of the lead fingers over the die to form a preapplied patterned adhesive layer; heating the patterned adhesive layer during a packaging process; and pressing the lead fingers, adhesive layer and die together to bond the adhesive layer and die and attach the lead fingers to the die.
Claim 23
Independent Claim 110 words
A method for attaching a semiconductor die to a leadframe for a semiconductor package, comprising: providing a leadframe having a plurality of continuous lead fingers adapted to extend over a side of the die; applying an adhesive selected from the group consisting of thermoplastic adhesives or thermosetting adhesives to an underside of the lead fingers in a pattern that matches a placement of the lead fingers over the die to form a preapplied patterned adhesive layer; heating the patterned adhesive layer during a packaging process; and pressing the lead fingers, adhesive layer and die together to bond the adhesive layer and die and attach the lead fingers to the die.
Claim 24
Dependent Claim 30 words
The method as claimed in claim 20 and wherein a liquid adhesive is applied to the lead fingers and patterned to form the adhesive layer using a screen printing process.
Claim 25
Dependent Claim 16 words
The method as claimed in claim 20 and wherein the die is a lead-on-chip (LOC) die.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-02-14 1997-08-16 1998-02-15 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-02-14 2001-08-16 2002-02-15 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-02-14 2005-08-16 2006-02-15 $7700.00 Window Closed / Lapsed

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