US5628661A
Expired / Lapsed
US
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Method for fabricating a field emission display
Assignee: Samsung SDI Co Ltd
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Filing: 1995-06-07
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Granted: 1997-05-13
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Expires: 2015-06-07
Abstract
Abstract A method is provided for fabricating a field emission device which can be adopted as the source for a flat panel display, an ultra-high frequency amplifier sensor, or an electron-beam-applied instrument. A polyimide layer is used as a release layer and a metal mask is formed thereon, thereby enabling the height of micro-tips to be easily controlled. Since the polyimide layer is soluble in an appropriate solvent, contamination does not occur during an etching process, thereby increasing the reliability of the device.
Inventors
- 👤 Jong-min Kim
- 👤 Nam-sin Park
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 02:19
CPC Classifications
H; H01; H01J; H01J17/00; H01J17/38; H01J17/48; H01J9/00; H01J9/02; H01J9/022; H01J9/025
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
193 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal layer etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide layer etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer; wherein in said metal layer etching step, said metal layer is etched by a reactive ion etching (RIE) process.
Claim 2
Independent Claim
193 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal layer etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide layer etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer; wherein in said metal layer etching step, said metal layer is etched by a reactive ion etching (RIE) process.
Claim 3
Independent Claim
192 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal laver etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide laver etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer; wherein in said insulation layer etching step, said insulation layer is etched by a CHF 3-O 2 plasma.
Claim 4
Independent Claim
192 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal laver etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide laver etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer; wherein in said insulation layer etching step, said insulation layer is etched by a CHF 3-O 2 plasma.
Claim 5
Independent Claim
97 words
A method for fabricating field emission device, said method comprising the steps of: forming a cathode pattern comprising a layer of conductive material on an insulation substrate; forming an insulation layer pattern comprising insulating material of a predetermined thickness over said cathode layer pattern; forming a gate electrode layer pattern, comprising a layer of conductive material on said insulation layer; forming a release layer pattern comprising a polymer with high temperature stability, over said gate electrode layer pattern; and forming micro-tips by depositing field emitting material over said release layer pattern; and etching said release layer pattern.
Claim 6
Independent Claim
97 words
A method for fabricating field emission device, said method comprising the steps of: forming a cathode pattern comprising a layer of conductive material on an insulation substrate; forming an insulation layer pattern comprising insulating material of a predetermined thickness over said cathode layer pattern; forming a gate electrode layer pattern, comprising a layer of conductive material on said insulation layer; forming a release layer pattern comprising a polymer with high temperature stability, over said gate electrode layer pattern; and forming micro-tips by depositing field emitting material over said release layer pattern; and etching said release layer pattern.
Claim 7
Dependent Claim
15 words
The method according to claim 3, wherein said release layer pattern comprises a polyimide layer.
Claim 8
Independent Claim
174 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal layer etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide layer etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer.
Claim 9
Independent Claim
174 words
A method for fabricating a field emission device comprising the steps of: forming cathodes on a substrate in striped patterns; forming an insulation layer on said substrate having striped cathodes formed thereon; forming gate electrodes by depositing a gate electrode layer on said insulation layer and etching said gate electrodes in a predetermined striped pattern across said cathodes; forming a polyimide layer on said insulation layer having said gate electrodes formed thereon; depositing a metal on said polyimide layer to form a metal layer; etching said metal layer to form openings having predetermined diameters; etching said polyimide layer to form holes aligned with said openings formed in said metal layer etching step; etching said gate electrodes to form apertures aligned with said holes formed in said polyimide layer etching step; etching said insulation layer to form holes aligned with said apertures formed in said gate electrodes etching step; forming field emitting micro-tips on said cathodes on the bottom of said holes formed in said insulation layer etching step; and lifting off said polyimide layer.
Claim 10
Dependent Claim
29 words
A method for fabricating a field emission device as claimed in claim 5, wherein said insulation layer is formed of a 1 μm thick layer of SiO 2 .
Claim 11
Dependent Claim
31 words
A method for fabricating a field emission device as claimed in claim 5, wherein said insulation layer is formed of a 1 μm thick layer of Al 2 O 3 .
Claim 12
Dependent Claim
30 words
A method for fabricating a field emission device as claimed in claim 5, wherein said gate electrode layer is formed of a layer of molybdenum (Mo) having a predetermined thickness.
Claim 13
Dependent Claim
46 words
A method for fabricating a field emission device as claimed in claim 5, wherein said polyimide layer forming step includes the steps of spin-coating a polyimide to a thickness of 2-3 μm, and pre-baking the coated polyimide layer at a predetermined temperature to cure the same.
Claim 14
Dependent Claim
32 words
A method for fabricating afield emission devices as claimed in claim 5, wherein in said metal depositing step, said metal is aluminum and is deposited to form a predetermined thickness of aluminum.
Claim 15
Dependent Claim
30 words
A method for fabricating a field emission device as claimed in claim 5, wherein in said polyimide layer etching step, said polyimide layer is etched by an O 2 plasma.
Claim 16
Dependent Claim
32 words
A method for fabricating a field emission device as claimed in claim 5, wherein in said gate electrode etching step, said gate electrodes are etched by a CF 4 -O 2 plasma.
Claim 17
Dependent Claim
22 words
A method for fabricating a field emission device as claimed in claim 5, comprising using said polyimide layer as a release layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-12 | 2000-11-11 | 2001-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-12 | 2004-11-11 | 2005-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-12 | 2008-11-11 | 2009-05-13 | $7700.00 | Window Closed / Lapsed |