US6159855A
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Organometallic compound mixtures in chemical vapor deposition
Assignee: Micron Technology Inc
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Filing: 1998-04-28
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Granted: 2000-12-12
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Expires: 2018-04-28
Abstract
Abstract Multi-metallic films are prepared from multi-metallic mixtures of metalloamide compounds. The mixtures are subjected to vaporization to form a multi-metallic vapor having defined and controllable stoichiometry. The multi-metallic vapor is then transferred to a chemical vapor deposition chamber, with or without the presence of a reactant gas, to form the multi-metallic film. Multi-metallic nitride, oxide, sulfide, boride, silicide, germanide, phosphide, arsenide, selenide, telluride, etc. films may be prepared by appropriate choice of metalloamide compounds and reactant gas(es).
Inventors
- 👤 Brian A. Vaartstra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:56
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/43; C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/44; C23C16/448
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
84 words
A process for forming a multi-metallic layer on a substrate comprising the steps of: providing a multi-metallic mixture comprising first and second metalloamide compound, where the first metalloamide compound contains a metal that is not present in the second metalloamide compound and at least one metal in the first or second metalloamide compound is a non-Group-III metal; vaporizing the multi-metallic mixture to form a multi-metallic vapor; and depositing at least a portion of the multi-metallic vapor onto a substrate to form a multi-metallic layer.
Claim 2
Dependent Claim
84 words
A process for forming a multi-metallic layer on a substrate comprising the steps of: providing a multi-metallic mixture comprising first and second metalloamide compound, where the first metalloamide compound contains a metal that is not present in the second metalloamide compound and at least one metal in the first or second metalloamide compound is a non-Group-III metal; vaporizing the multi-metallic mixture to form a multi-metallic vapor; and depositing at least a portion of the multi-metallic vapor onto a substrate to form a multi-metallic layer.
Claim 3
Dependent Claim
40 words
The process of claim 1 wherein each of the first and second metalloamide compounds comprises the structural unit M(NR 2 ) where M is a metal, N is nitrogen and R is hydrogen or carbon, independently selected at each occurrence.
Claim 4
Dependent Claim
44 words
The process of claim 1 wherein the first metalloamide compound comprises the structural unit M 1 (NR 1 R 2 ) wherein M 1 is a metal, N is nitrogen, and each of R 1 and R 2 is independently selected from hydrocarbon groups.
Claim 5
Dependent Claim
13 words
The process of claim 3 wherein the hydrocarbon group is a C1-C5alkyl group.
Claim 6
Dependent Claim
44 words
The process of claim 3 wherein the second metalloamide compound comprises the structural unit M 2 (NR 3 R 4 ) wherein M 2 is a metal, N is nitrogen, and each of R 3 and R 4 is independently selected from hydrocarbon groups.
Claim 7
Dependent Claim
39 words
The process of claim 1 wherein at least two different metals selected from the group consisting of transition metals and the metals present in Groups IA, IIA, IIIA and IVA of the Periodic Table are present in the mixture.
Claim 8
Dependent Claim
23 words
The process of claim 6 wherein the group consists of transition metals and the metals present in Group IIIA of the Periodic Table.
Claim 9
Dependent Claim
12 words
The process of claim 1 wherein the mixture comprises aluminum and titanium.
Claim 10
Dependent Claim
12 words
The process of claim 1 wherein the mixture comprises tetrakis-(dimethylamido)-titanium and hexakis-(dimethylamido)-dialuminum.
Claim 11
Dependent Claim
47 words
The process of claim 1 wherein the mixture further comprises a third metalloamide compound M 3 (NR 5 R 6 ) where M 3 is a metal, N is nitrogen, and each of R 5 and R 6 are independently selected from hydrogen or a hydrocarbon group.
Claim 12
Dependent Claim
13 words
The process of claim 1 wherein the multi-metallic layer comprises a metal alloy.
Claim 13
Dependent Claim
30 words
The process of claim 1 wherein the multi-metallic layer comprises a metal compound selected from the group consisting of metal nitrides, metal oxides, metal sulfides, metal borides, and metal silicides.
Claim 14
Dependent Claim
13 words
The process of claim 1 wherein the multi-metallic layer comprises titanium aluminum nitride.
Claim 15
Dependent Claim
12 words
The process of claim 1 wherein the mixture further comprises a solvent.
Claim 16
Dependent Claim
30 words
The process of claim 14 wherein the solvent is selected from the group consisting of aliphatic hydrocarbons, aromatic hydrocarbons, ethers, polyethers, thioethers, esters, ammonia, amines, polyamines, nitriles, and silicone oils.
Claim 17
Dependent Claim
14 words
The process of claim 14 wherein the solvent is an aliphatic or aromatic hydrocarbon.
Claim 18
Dependent Claim
12 words
The process of claim 1 wherein the vaporizing is by flash vaporization.
Claim 19
Dependent Claim
71 words
In a chemical vapor deposition process for depositing gas-phase components onto a surface, the improvement comprising forming the gas-phase components by a process comprising vaporization of a multi-metallic mixture, wherein the multi-metallic mixture comprises first and second metalloamide compounds, the first metalloamide compound containing a metal that is not present in the second metalloamide compound, and at least one metal in the first or second metalloamide compound is a non-Group-III metal.
Claim 20
Dependent Claim
71 words
In a chemical vapor deposition process for depositing gas-phase components onto a surface, the improvement comprising forming the gas-phase components by a process comprising vaporization of a multi-metallic mixture, wherein the multi-metallic mixture comprises first and second metalloamide compounds, the first metalloamide compound containing a metal that is not present in the second metalloamide compound, and at least one metal in the first or second metalloamide compound is a non-Group-III metal.
Claim 21
Dependent Claim
17 words
The process of claim 18 wherein both of titanium and aluminum are present in the multi-metallic mixture.
Claim 22
Dependent Claim
14 words
The process of claim 18 wherein the multi-metallic mixture comprises a third metalloamide compound.
Claim 23
Dependent Claim
11 words
The process of claim 18 wherein the vaporization is flash vaporization.
Claim 24
Dependent Claim
21 words
The process of claim 1 wherein at least one metal in the first or second metalloamide compound is a Group-III metal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-12 | 2004-06-12 | 2004-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-12 | 2008-06-12 | 2008-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-12 | 2012-06-12 | 2012-12-12 | $7700.00 | Window Closed / Lapsed |