US5389401A
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Chemical vapor deposition of metal oxides
Assignee: Individual
•
Filing: 1994-02-23
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Granted: 1995-02-14
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Expires: 2014-02-23
Abstract
Abstract Films of metal oxides are deposited from vaporized precursor compounds, such as metal alkoxides, by reaction with the vapor of a compound, such as cyclohexenone, that is derived formally from a stable aromatic compound by replacing one hydrogen with a ketone functional group (═O) and adding three hydrogen atoms to other atoms in the aromatic system. For example, the vapor of titanium (IV) isopropoxide reacts with the vapor of 2-cyclohexen-1-one to deposit titanium dioxide at 400° C. The deposit is highly transparent and free of carbon impurity. This vapor mixture with added aluminum isopropoxide deposits a highly insulating film of aluminum-doped titanium dioxide.
Inventors
- 👤 Roy G. Gordon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407; C23C16/403; C23C16/405
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
43 words
A chemical vapor deposition process for forming a metal oxide or mixture of metal oxides by reaction of the vapor of a di-hydrogenated aromatic ketone, or an isomer thereof, with the vapor of one or more metal-containing compounds having ligands exchangeable with phenols.
Claim 2
Dependent Claim
43 words
A chemical vapor deposition process for forming a metal oxide or mixture of metal oxides by reaction of the vapor of a di-hydrogenated aromatic ketone, or an isomer thereof, with the vapor of one or more metal-containing compounds having ligands exchangeable with phenols.
Claim 3
Dependent Claim
14 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is 2-cyclohexen-1-one.
Claim 4
Dependent Claim
14 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is 3-methyl-2-cyclohexen-1-one.
Claim 5
Dependent Claim
15 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is a pyridinone.
Claim 6
Dependent Claim
15 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is a tetralone.
Claim 7
Dependent Claim
15 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is a pyrrolidinone.
Claim 8
Dependent Claim
23 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is selected from the group consisting of the butyrolactones and thiobutyrolactones.
Claim 9
Dependent Claim
24 words
The process as in claim 1, in which the di-hydrogenated aromatic ketone is selected from the group consisting of the indolones and their isomers.
Claim 10
Dependent Claim
23 words
The process as in claim 1, in which the metal-containing compound contains ligands selected from the group consisting of alkoxides, alkylamides and halides.
Claim 11
Dependent Claim
36 words
The process as in claim 1, in which the metal of the metal-containing compound is selected from the group consisting of titanium, zirconium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten, aluminum, gallium, indium, germanium and tin.
Claim 12
Dependent Claim
12 words
The process as in claim 10, in which the metal is titanium.
Claim 13
Dependent Claim
15 words
The process as in claim 11, in which the metal-containing compound is a titanium alkoxide.
References Cited (Backward Citations)
No citation records indexed.
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