US5616754A
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Compounds useful as chemical precursors in chemical vapor deposition of silicon-based ceramic materials
Assignee: Enichem SpA
•
Filing: 1995-01-26
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Granted: 1997-04-01
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Expires: 2015-01-26
Abstract
Abstract In order to reduce the rate of coke formation during the industrial pyrolysis of hydrocarbons, the interior surface of a reactor is coated with a thin layer of a ceramic material, the layer being deposited by thermal decomposition of a non-oxygen containing silicon-nitrogen precursor in the vapor phase, tin an inert or reducing gas atmosphere in order to minimize the formation of oxide ceramics.
Inventors
- 👤 Richard Cruse
- 👤 Veronika Szalai
- 👤 Terence Clark
- 👤 Stephen Rohman
- 👤 Robert Mininni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/32; C23C16/325; C07; C07F; C07F7/00; C07F7/02; C07F7/21; C10; C10B; C10B43/00; C10B43/14; C10G; C10G9/00; C10G9/14; C10G9/16; C23C16/34; C23C16/345; C23C16/36
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
80 words
A compound having the structure ##STR7## wherein R 6 is hydrogen or C 1-20 alkyl, R 7 is hydrogen, Li or SiR 8 R 9 R 10 where R 8 , R 9 , and R 10 are, independently, hydrogen or C 1-20 alkyl, and R 11 is hydrogen or C 1-20 alkyl; or a compound having the structure ##STR8## wherein R 6 and R 12 are, independently, hydrogen or C 1-20 alkyl; or a compound having the structure ##STR9##
Claim 2
Dependent Claim
80 words
A compound having the structure ##STR7## wherein R 6 is hydrogen or C 1-20 alkyl, R 7 is hydrogen, Li or SiR 8 R 9 R 10 where R 8 , R 9 , and R 10 are, independently, hydrogen or C 1-20 alkyl, and R 11 is hydrogen or C 1-20 alkyl; or a compound having the structure ##STR8## wherein R 6 and R 12 are, independently, hydrogen or C 1-20 alkyl; or a compound having the structure ##STR9##
Claim 3
Dependent Claim
26 words
A compound selected from the group consisting of heptamethyl-chloro-trisilazane, 1,2,3-trichloro-hexamethyl trisilazane, ethyl-heptamethyl trisilazane, chloro-octamethyl trisilazane, N-lithio-1,3-dichloro-tetramethyl disilazane, 1,2,3-trichloro-hexamethyl trisilazane, 1,1-dichloro-1-ethyl-trimethyl disilazane, N-dimethylsilyl-1,1,3,3,5,5-hexamethyl-cyclotrisilazane; bis(N-dimethylsilyl)-1,1,3,3,5,5-hexamethyl-cyclotrisilazane; tris(N-dimethylsilyl)-1,1,3,3,5,5-hexamethylcyclotrisilazane; and N-lithio-1,1,3,3,5,5-hexamethylcyclotrisilazane.
Claim 4
Dependent Claim
26 words
A compound selected from the group consisting of heptamethyl-chloro-trisilazane, 1,2,3-trichloro-hexamethyl trisilazane, ethyl-heptamethyl trisilazane, chloro-octamethyl trisilazane, N-lithio-1,3-dichloro-tetramethyl disilazane, 1,2,3-trichloro-hexamethyl trisilazane, 1,1-dichloro-1-ethyl-trimethyl disilazane, N-dimethylsilyl-1,1,3,3,5,5-hexamethyl-cyclotrisilazane; bis(N-dimethylsilyl)-1,1,3,3,5,5-hexamethyl-cyclotrisilazane; tris(N-dimethylsilyl)-1,1,3,3,5,5-hexamethylcyclotrisilazane; and N-lithio-1,1,3,3,5,5-hexamethylcyclotrisilazane.
Claim 5
Dependent Claim
27 words
The compound of claim 1, having the structure ##STR10## wherein R 6 and R 7 are as defined and R 11 is hydrogen or C 1-20 alkyl.
Claim 6
Dependent Claim
18 words
The compound of claim 3, wherein R 6 , R 7 and R 11 are C 1-8 alkyl.
Claim 7
Dependent Claim
22 words
The compound of claim 1, having the structure ##STR11## wherein R 6 and R 12 are, independently, hydrogen or C 1-20 alkyl.
Claim 8
Dependent Claim
15 words
The compound of claim 5, wherein R 6 and R 12 are C 1-8 alkyl.
Claim 9
Dependent Claim
74 words
A volitile CVD precursor compound having the structure ##STR12## wherein each R is, independently, hydrogen, C 2-20 alkyl, or NR 1 R 2 wherein R 1 and R 2 are, independently, C 1-20 alkyl, halogen or SiR 3 R 4 R 5 wherein R 3 , R 4 and R 5 are hydrogen, C 1-20 alkyl or NR 1 R 2 , and A is a divalent C 3+ -alkylene arylene or alkylarylene group.
Claim 10
Dependent Claim
74 words
A volitile CVD precursor compound having the structure ##STR12## wherein each R is, independently, hydrogen, C 2-20 alkyl, or NR 1 R 2 wherein R 1 and R 2 are, independently, C 1-20 alkyl, halogen or SiR 3 R 4 R 5 wherein R 3 , R 4 and R 5 are hydrogen, C 1-20 alkyl or NR 1 R 2 , and A is a divalent C 3+ -alkylene arylene or alkylarylene group.
Claim 11
Dependent Claim
33 words
The compound of claim 7, wherein R is C 2-8 alkyl, R 1 and R 2 are C 1-8 alkyl and A is C 3-6 alkylene, C 6-10 arylene or C 7-16 alkylarylene.
Claim 12
Dependent Claim
6 words
The compound having the structure ##STR13##
Claim 13
Dependent Claim
6 words
The compound having the structure ##STR13##
Claim 14
Dependent Claim
19 words
The compound of claim 7, wherein each R is, independently, C 2-20 alkyl or NR 1 R 2 .
Claim 15
Dependent Claim
11 words
The compound of claim 8, wherein A is C 7-16 alkylarylene.
Claim 16
Dependent Claim
11 words
The compound of claim 8, wherein A is C 6-10 arylene.
Claim 17
Dependent Claim
19 words
The compound of claim 7, wherein each R is hydrogen, C 2-8 alkyl or NR 1 R 2 .
Claim 18
Dependent Claim
12 words
The compound of claim 13, wherein one R is C 2-8 alkyl.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-03-31 | 2000-09-30 | 2001-04-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-03-31 | 2004-09-30 | 2005-04-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-03-31 | 2008-09-30 | 2009-04-01 | $7700.00 | Window Closed / Lapsed |