US5003092A
Expired / Lapsed
US
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Use of R2 MR' to prepare semiconductor and ceramic precursors
Assignee: Research Foundation of the State University of New York
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Filing: 1989-06-02
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Granted: 1991-03-26
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Expires: 2009-06-02
Abstract
Abstract Cyclopentadienyl compounds of aluminum, gallium and indium which when reacted at low temperature with amines, phosphines and arsines form compounds which are potential precursors to ceramic materials and semiconductors.
Inventors
- 👤 Orville T. Beachley, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 04:37
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C07; C07F; C07F5/00; C07F9/00; C07F9/02; C07F9/28; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/301; C30B29/00; C30B29/10; C30B29/40
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
101 words
A method of preparing a compound having the formula R 2 MYR' 2-n H n , where R is an organic group, M is selected from the group consisting of Al, Ga and In, Y is selected from the group consisting of N, P and As, R' is an organic group and n is an integer selected from 0-2; which comprises reacting R 2 MR" with R' 3-m YH m where R, M, Y and R' are as defined above, m is an integer selected from 1-3 and R" is selected from the group consisting of cyclopentadienyl, allyl, alkynyl and vinyl.
Claim 2
Independent Claim
101 words
A method of preparing a compound having the formula R 2 MYR' 2-n H n , where R is an organic group, M is selected from the group consisting of Al, Ga and In, Y is selected from the group consisting of N, P and As, R' is an organic group and n is an integer selected from 0-2; which comprises reacting R 2 MR" with R' 3-m YH m where R, M, Y and R' are as defined above, m is an integer selected from 1-3 and R" is selected from the group consisting of cyclopentadienyl, allyl, alkynyl and vinyl.
Claim 3
Dependent Claim
25 words
The method as recited in claim 1 wherein R and R' are independently selected from substituted and unsubstituted alkyl, cycloalkyl, aryl, alkenyl, cycloalkenyl and alkynyl.
Claim 4
Dependent Claim
13 words
The method as recited in claim 2 wherein R" is a cyclopentadienyl group.
Claim 5
Dependent Claim
14 words
The method as recited in claim 3 wherein R" is an unsubstituted cyclopentadienyl group.
Claim 6
Dependent Claim
14 words
The method as recited in claim 3 wherein R" is a substituted cyclopentadienyl group.
Claim 7
Dependent Claim
14 words
The method as recited in claim 4 wherein R 2 MR" is dimethylgallium cyclopentadienide.
Claim 8
Dependent Claim
14 words
The method as recited in claim 4 wherein R 2 MR" is diethylgallium cyclopentadienide.
Claim 9
Dependent Claim
14 words
The method as recited in claim 5 wherein R 2 MR" is dimethylgallium methylcyclopentadienide.
Claim 10
Dependent Claim
30 words
The method as recited in claim 3 wherein the organic groups are independently selected from the group consisting of methyl, ethyl, n-propyl, i-propyl, n-butyl, t-butyl, i-butyl, pentyl, hexyl and heptyl.
Claim 11
Dependent Claim
21 words
The method as recited in claim 3 wherein the reaction occurs at low temperatures between about -80° C. to ambient temperature.
Claim 12
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is cyclohexylamine and R 2 MYR' 2-n H n is dimethylgallium cyclohexylamide.
Claim 13
Dependent Claim
31 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is N-methylcyclohexylamine and R 2 MYR' 2-n H n is dimethylgallium N-methyl, N-cyclohexylamide.
Claim 14
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is tert-butylamine and R 2 MYR' 2 H n is dimethylgallium tert-butylamide.
Claim 15
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is diethylamine and R 2 MYR' 2<n H n is dimethylgallium diethylamide.
Claim 16
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is methylphenylphosphine and R 2 MYR' 2-n H n is dimethylgallium methylphenylphosphide.
Claim 17
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is N-ethylphenylamine and R 2 MYR' 2-n H n is dimethylgallium N-ethylanilide.
Claim 18
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is methylphenylphosphine and R 2 MYR' 2-n H n is dimethylgallium methylphenylphosphide.
Claim 19
Dependent Claim
30 words
The method as recited in claim 3 wherein R 2 MR" is dimethylgallium cyclopentadienide, R' 3-m YH m is dicyclohexylphosphine and R 2 MYR' 2-n H n is dimethylgallium dicyclohexylphosphide.
Claim 20
Dependent Claim
25 words
The method as recited in claim 3 wherein the compound R' 2 MYR 2-n H n , is a precursor for ceramic materials and semiconductors.
References Cited (Backward Citations)
US4740606A
Cited
US4759917A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1994-03-25 | 1994-09-24 | 1995-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-03-25 | 1998-09-24 | 1999-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-03-25 | 2002-09-24 | 2003-03-26 | $7700.00 | Window Closed / Lapsed |