US5453494A
Expired / Lapsed
US
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Metal complex source reagents for MOCVD
Assignee: Entegris Inc
•
Filing: 1994-01-18
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Granted: 1995-09-26
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Expires: 2014-01-18
Abstract
Abstract Metal organic chemical vapor deposition (MOCVD) source reagents useful for formation of metal-containing films, such as thin film copper oxide high temperature superconductor (HTSC) materials. The source reagents have the formula MAyX wherein: M is a metal such as Cu, Ba, Sr, La, Nd, Ce, Pr, Sm, Eu, Th, Gd, Tb, Dy, Ho, Er, Tm Yb, Lu Bi, Tl, Y or Pb; A is a monodentate or multidentate organic ligand; y is 2 or 3; MAy is a stable sub-complex at STP conditions; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O, and F. The ligand A may for example be selected from beta-diketonates, cyclopentadienyls, alkyls, perfluoroalkyls, alkoxides, perfluoroalkoxides, and Schiff bases. The complexes of the invention utilize monodentate or multidentate ligands to provide additional coordination to the metal atom, so that the resulting complex is of enhanced volatility characteristics, and enhanced suitability for MOCVD applications.
Inventors
- 👤 Peter S. Kirlin
- 👤 Duncan W. Brown
- 👤 Robin A. Gardiner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:34
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/02; C; C23; C23C; C23C16/00; C23C16/06; C23C16/18; C23C16/22; C23C16/30; C23C16/40; C23C16/408; C23C16/409; C23C16/44; C23C16/448; C23C16/4481; C23C16/4483; C23C16/455; C23C16/45561; H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0436; H10N60/0464
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
93 words
A metalorganic complex of the formula: MAyX wherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAy with ligand X and which forms a stable STP sub-complex MAy with M; y is 2 or 3; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F.
Claim 2
Dependent Claim
93 words
A metalorganic complex of the formula: MAyX wherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAy with ligand X and which forms a stable STP sub-complex MAy with M; y is 2 or 3; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F.
Claim 3
Dependent Claim
38 words
A complex according to claim 1, wherein M is selected from the group consisting of Cu, Ba, Sr, La, Nd, Ce, Pr, Sm, Eu, Th, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Bi, Tl, Y and Pb.
Claim 4
Dependent Claim
24 words
A complex according to claim 1, wherein A is selected from the group consisting of β-diketonates, cyclopentadienyls, alkyls, perfluoroalkyls, alkoxides, perfluoroalkoxides, and Schiff bases.
Claim 5
Dependent Claim
18 words
A complex according to claim 1, wherein A is selected from the group consisting of β-diketonates and cyclopentadienyls.
Claim 6
Dependent Claim
11 words
A complex according to claim 1, wherein A is a β-diketonate.
Claim 7
Dependent Claim
36 words
A complex according to claim 1, wherein A is selected from the group consisting of: (i) 2,2,6,6-tetramethyl-3,5-heptanedionate; (ii) 1,1,1,5,5,5-hexafluoro-2,4-pentanedionate; (iii) 1,1,1,2,2,3,3-heptafluoro-7,7-dimethyl-4,6-octanedionate; (iv) cyclopentadienyl; (v) 4,4'-(ethane-1,2-diyldiimino)bis(3-pentene-2-one); (vi) pentamethylcyclopentadienyl and other substituted cyclopentadienyls; (vii) 2,4-pentadionate; and (viii) 1,1,1-trifluoro-2,4-pentadionate.
Claim 8
Dependent Claim
26 words
A complex according to claim 1, wherein X is selected from the group consisting of: (i) oxyhydrocarbyl ligands; (ii) nitrogenous oxyhydrocarbyl ligands; and (iii) fluorooxyhydrocarbyl ligands.
Claim 9
Dependent Claim
122 words
A complex according to claim 1, wherein X is selected from the group consisting of: (a) amines and polyamines; (b) bipyridines; (c) ligands of the formula: ##STR24## wherein G is --O--, --S--, or --NR--, wherein R is H or hydrocarbyl; (d) crown ethers; and (e) ligands of the formula: R.sup.0 (C(R.sup.1).sub.2 C(R.sup.2).sub.2 O).sub.n R.sup.0 wherein: R 0 =H, methyl, ethyl, n-propyl, cyanato, perfluoroethyl, perfluoro-n-propyl, or vinyl; R 1 =H, F, or a sterically acceptable hydrocarbyl substituent; R 2 =H, F, or a sterically acceptable hydrocarbyl substituent; n=4, 5, or 6; and each R 0 , R 1 , and R 2 may be the same as or different from the other R 0 , R 1 , and R 2 , respectively.
Claim 10
Dependent Claim
23 words
A complex according to claim 1, wherein X is selected from the group consisting of tetraglyme, tetrahydrofuran, bipydridine, and 18 crown 6 ethers.
Claim 11
Dependent Claim
87 words
A complex according to claim 1, wherein X comprises a ligand of the formula; R.sup.0 (C(R.sup.1).sub.2 (R.sup.2).sub.2 O).sub.n R.sup.o wherein: R 0 =H, methyl, ethyl, n-propyl, cyanato, perfluoroethyl, perfluoro-n-propyl, or vinyl; R 1 =H, F, or a sterically acceptable hydrocarbyl substituent; R 2 =H, F, or a sterically acceptable hydrocarbyl substituent; n=4, 5, or 6; and each R 0 , R 1 , and R 2 may be the same as or different from the other R 0 , R 1 , and R 2 , respectively.
Claim 12
Dependent Claim
54 words
A complex according to claim 1, wherein X comprises a ligand of the formula: R.sup.0 O(C(R.sup.1).sub.2 C(R.sup.2).sub.2 O).sub.4 R.sup.o wherein: each R 0 , R 1 , and R 2 is selected independently, and R 0 =H, CH 3 , or C 2 H 5 ; R 1 and R 2 =H or F.
Claim 13
Dependent Claim
21 words
A complex according to claim 1, wherein: A is a β-diketonate; and X is tetraglyme, 18 crown 6 ether, or bipyridine.
Claim 14
Dependent Claim
27 words
A complex according to claim 1, wherein each of the ligands A is a constituent moiety of a single group which is coordinatingly attached to M thereby.
Claim 15
Dependent Claim
33 words
A complex according to claim 1, wherein the ligand X and at least one of said ligands A is a constituent moiety of a single group which is coordinatingly attached to M thereby.
Claim 16
Dependent Claim
110 words
A composition comprising: (i) a metalorganic complex of the formula: MAyX wherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAy with ligand X and which forms a stable STP sub-complex MAy with M; y is 2 or 3; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F, or precursor or components thereof; and (ii) a solvent or suspending agent therefor.
Claim 17
Dependent Claim
110 words
A composition comprising: (i) a metalorganic complex of the formula: MAyX wherein: M is a y-valent metal; A is a monodentate or multidentate organic ligand coordinated to M which allows complexing of MAy with ligand X and which forms a stable STP sub-complex MAy with M; y is 2 or 3; each of the A ligands may be the same or different; and X is a monodentate or multidentate ligand coordinated to M and containing one or more atoms independently selected from the group consisting of atoms of the elements C, N, H, S, O and F, or precursor or components thereof; and (ii) a solvent or suspending agent therefor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-09-25 | 1999-03-27 | 1999-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-09-25 | 2003-03-27 | 2003-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-09-25 | 2007-03-27 | 2007-09-26 | $7700.00 | Window Closed / Lapsed |