US4837609A
Expired / Lapsed
US
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Semiconductor devices having superconducting interconnects
Assignee: Nokia Bell Labs
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Filing: 1987-09-09
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Granted: 1989-06-06
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Expires: 2007-09-09
Abstract
Abstract A semiconductor device which includes either a single semiconductor chip bearing an integrated circuit (IC) or two or more electrically interconnected semiconductor chips, is disclosed. This device includes interconnects between device components (on the same chip and/or on different chips), at least one of which includes a region of superconducting material, e.g., a region of copper oxide superconductor having a T c greater than about 77K. Significantly, to avoid undesirable interactions, at high processing temperatures, between the superconducting material and underlying, silicon-containing material (which, among other things, results in the superconducting material reverting to its non-superconducting state), the interconnect also includes a combination of material regions which prevents such interactions.
Inventors
- 👤 Michael Gurvitch
- 👤 Roland A. Levy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 15:32
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H10W70/668; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/40; H10W20/41; H10W20/44; H10W20/4484; H10W70/65; H10W72/00; H10W72/20; H10W72/221; H10W72/50; H10W72/551; H10W72/552; H10W72/5522; H10W90/00; H10W90/701; H10W90/721; H10W90/724; Y; Y10; Y10S; Y10S505/00; Y10S505/825; Y10S505/917; Y10S505/918; Y10S505/919; Y10S505/922; Y10S505/923
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
74 words
A device, comprising: a substrate which includes silicon-containing material; first and second device components formed in and/or on or supported by, said substrate; and an interconnect, also supported by said substrate, which electrically contacts, and extends between, said device components, characterized in that said interconnect includes a first region of superconducting material and at least a second region including Ag and/or Au, said second region being interposed between said first region and said substrate.
Claim 2
Independent Claim
74 words
A device, comprising: a substrate which includes silicon-containing material; first and second device components formed in and/or on or supported by, said substrate; and an interconnect, also supported by said substrate, which electrically contacts, and extends between, said device components, characterized in that said interconnect includes a first region of superconducting material and at least a second region including Ag and/or Au, said second region being interposed between said first region and said substrate.
Claim 3
Dependent Claim
26 words
The device of claim 1 wherein said interconnect further includes a barrier to diffusion of Ag and/or Au, interposed between said second region and said substrate.
Claim 4
Dependent Claim
23 words
The device of claim 2 wherein said interconnect still further includes a region of metal silicide interposed between said barrier and said substrate.
Claim 5
Dependent Claim
25 words
The device of claim 1 wherein said first device component includes a field effect transistor, which includes a source, a drain and a gate electrode.
Claim 6
Dependent Claim
25 words
The device of claim 1 wherein said first device component includes a first integrated circuit and said second device component includes a second integrated circuit.
Claim 7
Dependent Claim
13 words
The device of claim 1 wherein said superconducting material includes copper and oxygen.
Claim 8
Dependent Claim
10 words
The device of claim 2 wherein said barrier includes tungsten.
Claim 9
Dependent Claim
10 words
The device of claim 2 wherein said barrier includes molybdenum.
Claim 10
Dependent Claim
10 words
The device of claim 2 wherein said barrier includes tantalum.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-06-05 | 1992-12-05 | 1993-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-06-05 | 1996-12-05 | 1997-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-06-05 | 2000-12-05 | 2001-06-06 | $7700.00 | Window Closed / Lapsed |