US4915988A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition of group IIA metals and precursors therefor
Assignee: Georgia Tech Research Corp
•
Filing: 1988-06-22
•
Granted: 1990-04-10
•
Expires: 2008-06-22
Abstract
Abstract Coatings of Group IIA metals and compounds thereof are formed by chemical vapor deposition, in which a heat decomposable organometallic compound of the formula (I) ##STR1## where M is a Group IIA metal, preferably magnesium, calcium, strontium, or barium and R is a lower alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with a heated substrate which is above the decomposition temperature of the organometallic compound. The pure metal is obtained when the compound of the formula I is the sole heat decomposable compound present and deposition is carried out under nonoxidizing conditions. Intermetallic compounds such as barium selenide can be deposited from a barium compound of formula I and a heat decomposable selenium compound under nonoxidizing conditions. Group II metal oxides and salts, such as barium titanate, are obtainable by deposition from a compound of formula I (and an additional titanium organometallic compound (under oxidizing conditions.
Inventors
- 👤 Ahmet Erbil
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:33
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/18
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
78 words
A process chemical vapor deposition for depositing a metallic coating on a heated substrate by thermal decomposition of an organometallic compound, said process comprising contacting an organmetallic compound of the formula ##STR3## where M is magnesium, calcium, strontium or barium or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 2
Dependent Claim
78 words
A process chemical vapor deposition for depositing a metallic coating on a heated substrate by thermal decomposition of an organometallic compound, said process comprising contacting an organmetallic compound of the formula ##STR3## where M is magnesium, calcium, strontium or barium or a mixture thereof and R is an alkyl or alkenyl radical containing from 2 to about 6 carbon atoms, with said heated substrate, said substrate being at a temperature above the decomposition temperature of said organometallic compound.
Claim 3
Dependent Claim
14 words
A process according to claim 1 in which M is calcium, strontium or barium.
Claim 4
Dependent Claim
17 words
A process according to claim 1 in which R contains from 2 to about 4 carbon atoms.
Claim 5
Dependent Claim
13 words
A process according to claim 1 in which R is an alkyl radical.
Claim 6
Dependent Claim
11 words
A process according to claim 1 in which R is isopropyl.
Claim 7
Dependent Claim
19 words
A process according to claim 1 in which said organometallic compound is supplied in a stream of carrier gas.
Claim 8
Dependent Claim
24 words
A process according to claim 6 in which said carrier gas is a non-oxidizing carrier gas and said substrate is in a non-oxidizing atmosphere.
Claim 9
Dependent Claim
21 words
A process according to claim 1 in which the temperature of said substrate is from about 150° to about 1000° C.
Claim 10
Dependent Claim
19 words
A process according to claim 1 in which said coating has a thickness not greater than about 100 microns.
Claim 11
Dependent Claim
26 words
A process according to claim 1 in which said metallic coating comprises a metal compound, said process further comprising contacting an oxidizing agent with said substrate.
Claim 12
Dependent Claim
38 words
A process according to claim 1 in which said metallic coating comprises at least two metals or metal compounds, said process further comprising contacting a second organometallic compound, which on decomposition yields a second metal, with said substrate.
Claim 13
Dependent Claim
14 words
A process according to claim 1 in which said coating comprises an intermetallic compound.
Claim 14
Dependent Claim
14 words
A process according to claim 12 in which said intermetallic compound is barium selenide.
Claim 15
Dependent Claim
15 words
A process according to claim 11 further comprising contacting an oxidizing agent with said substrate.
Claim 16
Dependent Claim
37 words
A process according to claim 11 in which the metal M is barium, said second organometallic compound is a source of titanium, said oxidizing agent is an oxygen source and said metallic coating consists of barium titanate.
Claim 17
Dependent Claim
18 words
A process according to claim 1 in which both alkylcyclopentadienyl groups in said organometallic compound are the same.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-09 | 1993-10-09 | 1994-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-09 | 1997-10-09 | 1998-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-09 | 2001-10-09 | 2002-04-10 | $7700.00 | Window Closed / Lapsed |