US3894164A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Chemical vapor deposition of luminescent films
Assignee: RCA Licensing Corp
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Filing: 1973-03-15
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Granted: 1975-07-08
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Expires: 1993-03-15
Abstract
Abstract Method for depositing a luminescent film comprising vaporizing into a nonreactive carrier gas at least one betadiketonate of yttrium, lanthanum, gadolinium, and lutetium, and at least one beta-diketonate of a lanthanide that is an activator for the luminescent film; and then contacting the vapor-laden carrier gas with a heated substrate. The beta-diketonates are thermally decomposed to form oxides which deposit on the substrate. The method is continued until the desired film thickness is deposited. There may be one or more reactant gases present for preventing the deposition of carbon and/or for producing a luminescent sulfide. The carrier gas may contain a vanadiumcontaining beta-diketonate for producing a luminescent vanadate. The luminescent film may be annealed at temperatures above 500*C to enhance the luminescence of the film.
Inventors
- 👤 John Pickett Dismukes
- 👤 James Kane
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:58
CPC Classifications
H; H01; H01J; H01J9/00; H01J9/20; H01J9/22; H01J9/221; C; C09; C09K; C09K11/00; C09K11/08; C09K11/77; C09K11/7766; C09K11/7767; C09K11/7783; C09K11/7794; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
138 words
A METHOD FOR DEPOSITING A LUMINESCENT FILM COMPRISING A. VAPORISING INTO A NONREACTIVE CARRIER GAS AT LEAST ONE M(THD)3 BETA-DIKETONATE AND AT LEAST ONE LN(THD)4 BETA-DIKETONATE, WHEREIN M IS AT LEAST ONE MEMBER OF THE GROUP CONSISTING OF YTTRIUM, LANTHANUM, GADOLINIUM, AND LUTETIUM, LN IS AT LEAST ONE LANTHANIDE SELECTED FROM THE GROUP CONSISTING OF DYSPROSIUM, ERBIUM, HOLMINUM, NEODYMINUM, PRASEODYMIUM. SAMARIUM, TERBIUM AND THULIUM, AND (THD) IS A TETRAMETHYLHEPTANEDIONATE RADICAL, B. MIXING WITH SAID VAPOR-LADEN CARRIER GAS A REACTANT GAS SELECTED FROM THE GROUP CONSISTING OF VANADIUM-CONTAINING BETADIKETONATES, HYDROGEN SULFIDE, SULFUR VAPOR, AND CARBON SULFIDE, C. CONTACTING THE VAPOR-LADEN CARRIER GAS MIXTURE WITH A SUBSTRATE THAT IS HEATED TO TEMPERATURES IN THE RANGE OF 400* TO 750*C UNTIL THE SUBSTRATE IS COATED WITH SAID LUMINESCENT FILM, D. AND THEN LOWERING THE TEMPERATURE OF SAID SUBSRATE TO ROOM TEMPERATURE.
Claim 2
Independent Claim
138 words
A METHOD FOR DEPOSITING A LUMINESCENT FILM COMPRISING A. VAPORISING INTO A NONREACTIVE CARRIER GAS AT LEAST ONE M(THD)3 BETA-DIKETONATE AND AT LEAST ONE LN(THD)4 BETA-DIKETONATE, WHEREIN M IS AT LEAST ONE MEMBER OF THE GROUP CONSISTING OF YTTRIUM, LANTHANUM, GADOLINIUM, AND LUTETIUM, LN IS AT LEAST ONE LANTHANIDE SELECTED FROM THE GROUP CONSISTING OF DYSPROSIUM, ERBIUM, HOLMINUM, NEODYMINUM, PRASEODYMIUM. SAMARIUM, TERBIUM AND THULIUM, AND (THD) IS A TETRAMETHYLHEPTANEDIONATE RADICAL, B. MIXING WITH SAID VAPOR-LADEN CARRIER GAS A REACTANT GAS SELECTED FROM THE GROUP CONSISTING OF VANADIUM-CONTAINING BETADIKETONATES, HYDROGEN SULFIDE, SULFUR VAPOR, AND CARBON SULFIDE, C. CONTACTING THE VAPOR-LADEN CARRIER GAS MIXTURE WITH A SUBSTRATE THAT IS HEATED TO TEMPERATURES IN THE RANGE OF 400* TO 750*C UNTIL THE SUBSTRATE IS COATED WITH SAID LUMINESCENT FILM, D. AND THEN LOWERING THE TEMPERATURE OF SAID SUBSRATE TO ROOM TEMPERATURE.
Claim 3
Dependent Claim
22 words
The method defined in claim 1 wherein the method is carried out at pressures in the range of 20 to 760 torr.
Claim 4
Dependent Claim
14 words
The method defined in claim 1 wherein said reactant gas iS a vanadium-containing beta-diketonate.
Claim 5
Dependent Claim
13 words
The method defined in claim 1 wherein said reactant gas is carbon disulfide.
Claim 6
Dependent Claim
13 words
The method defined in claim 1 wherein said reactant gas is hydrogen sulfide.
Claim 7
Dependent Claim
13 words
The method defined in claim 1 wherein said reactant gas is sulfur vapor.
Claim 8
Dependent Claim
36 words
The method defined in claim 1 including the step of annealing said luminescent film above 500*C and below the softening temperature of said substrate for a time interval sufficient to enhance the luminescence from said film.
Claim 9
Dependent Claim
35 words
The method defined in claim 7 wherein said substrate is annealed in an atmosphere consisting essentially of a nonreactive gas and at least one of oxygen, water vapor, hydrogen sulfide, sulfur vapor, and carbon disulfide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-07-07 | 1979-01-06 | 1979-07-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-07-07 | 1983-01-06 | 1983-07-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-07-07 | 1987-01-06 | 1987-07-08 | $7700.00 | Window Closed / Lapsed |