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US6127768A
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Surface acoustic wave and bulk acoustic wave devices using a Zn.sub.(1-X) Yx O piezoelectric layer device
Assignee: Kobe Steel USA Inc
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Filing: 1998-05-07
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Granted: 2000-10-03
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Expires: 2018-05-07
Abstract
Abstract The SAW device comprises a diamond or quartz substrate as a wave propagation layer, a piezoelectric layer on the wave propagation layer and at least one interdigitated electrode on the piezoelectric layer.
Inventors
- 👤 Brian R. Stoner
- 👤 Robert B. Henard
- 👤 David L. Dreifus
- 👤 Bradley A. Fox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:36
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/02574; H03H9/02818; H03H9/02834
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
70 words
A surface acoustic wave device comprising a diamond or quartz wave propagation layer; a piezoelectric layer on said wave propagation layer, said piezoelectric layer comprising Zn.sub.(1-x) Y x O wherein Y is selected from the group consisting of Group VI, VlI, VIII, IX or X elements and x ranges from 0.5 to 16 atomic percent; and at least one interdigitated electrode on said piezoelectric layer opposite said wave propagation layer.
Claim 2
Dependent Claim
70 words
A surface acoustic wave device comprising a diamond or quartz wave propagation layer; a piezoelectric layer on said wave propagation layer, said piezoelectric layer comprising Zn.sub.(1-x) Y x O wherein Y is selected from the group consisting of Group VI, VlI, VIII, IX or X elements and x ranges from 0.5 to 16 atomic percent; and at least one interdigitated electrode on said piezoelectric layer opposite said wave propagation layer.
Claim 3
Dependent Claim
49 words
A surface acoustic wave device according to claim 1, wherein said diamond wave propagation layer is a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains which are each oriented relative to one another and have a tilt and azimuthal misorientation of less than about 8°.
Claim 4
Dependent Claim
38 words
A surface acoustic wave device according to claim 1, wherein said quartz wave propagation layer comprises a crystalline quartz material having a cut angle and a propagation direction which provide a negative value of temperature coefficient of delay.
Claim 5
Dependent Claim
21 words
A surface wave acoustic device according to claim 1, wherein said piezoelectric layer has a resistivity greater than 10 7 Ohm-cm.
Claim 6
Dependent Claim
48 words
A surface acoustic wave device comprising a diamond or quartz wave propagation layer; a piezoelectric layer on said wave propagation layer, said piezoelectric layer comprising Zn.sub.(1-x) Ni x O wherein x ranges from 0.5 to 16 atomic percent; and at least one interdigitated electrode on said piezoelectric layer.
Claim 7
Dependent Claim
48 words
A surface acoustic wave device comprising a diamond or quartz wave propagation layer; a piezoelectric layer on said wave propagation layer, said piezoelectric layer comprising Zn.sub.(1-x) Ni x O wherein x ranges from 0.5 to 16 atomic percent; and at least one interdigitated electrode on said piezoelectric layer.
Claim 8
Dependent Claim
47 words
A surface acoustic wave device according to claim 5, wherein said diamond wave propagation layer is a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°.
Claim 9
Dependent Claim
38 words
A surface acoustic wave device according to claim 5, wherein said quartz wave propagation layer comprises a crystalline quartz material having a cut angle and a propagation direction which provide a negative value of temperature coefficient of delay.
Claim 10
Dependent Claim
21 words
A surface wave acoustic device according to claim 5, wherein said piezoelectric layer has a resistivity greater than 10 7 Ohm-cm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-03 | 2004-04-03 | 2004-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-03 | 2008-04-03 | 2008-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-03 | 2012-04-03 | 2012-10-03 | $7700.00 | Window Closed / Lapsed |