US4229506A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric crystalline film of zinc oxide and method for making same
Assignee: Murata Manufacturing Co Ltd
•
Filing: 1978-09-14
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Granted: 1980-10-21
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Expires: 1998-09-14
Abstract
Abstract Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, the crystalline zinc oxide film containing, as an additive element, uranium. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency. Such films are made by sputtering zinc oxide and uranium onto a substrate from a film material source consisting essentially of a ceramic of zinc oxide containing uranium.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Toshio Ogawa
- 👤 Tasuku Mashio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 01:34
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076; Y; Y10; Y10S; Y10S428/00; Y10S428/913
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
46 words
A piezoelectric crystalline film disposed on a substrate, said film being a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of uranium.
Claim 2
Dependent Claim
46 words
A piezoelectric crystalline film disposed on a substrate, said film being a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of uranium.
Claim 3
Dependent Claim
14 words
The piezoelectric crystalline film of claim 1 wherein said substrate is made of glass.
Claim 4
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1 wherein said substrate is made of a metal.
Claim 5
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a ceramic.
Claim 6
Dependent Claim
16 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a single crystal.
Claim 7
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a resin.
Claim 8
Dependent Claim
14 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of rubber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-21 | 1984-04-21 | 1984-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-21 | 1988-04-21 | 1988-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-21 | 1992-04-21 | 1992-10-21 | $7700.00 | Window Closed / Lapsed |