Patent US4229506A successfully refreshed from Google Patents.
US4229506A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric crystalline film of zinc oxide and method for making same
Assignee: Murata Manufacturing Co Ltd
•
Filing: 1978-09-14
•
Granted: 1980-10-21
•
Expires: 1998-09-14
Abstract
Abstract Piezoelectric crystalline film on a substrate, which is a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, the crystalline zinc oxide film containing, as an additive element, uranium. The piezoelectric crystalline films have high resistivity and a smooth surface, and make it possible to produce piezoelectric transducers with good conversion efficiency. Such films are made by sputtering zinc oxide and uranium onto a substrate from a film material source consisting essentially of a ceramic of zinc oxide containing uranium.
Inventors
- 👤 Hiroshi Nishiyama
- 👤 Toshio Ogawa
- 👤 Tasuku Mashio
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 16:53
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076; Y; Y10; Y10S; Y10S428/00; Y10S428/913
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
46 words
A piezoelectric crystalline film disposed on a substrate, said film being a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of uranium.
Claim 2
Dependent Claim
46 words
A piezoelectric crystalline film disposed on a substrate, said film being a crystalline zinc oxide film with a hexagonal crystal structure and a c-axis substantially perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of uranium.
Claim 3
Dependent Claim
14 words
The piezoelectric crystalline film of claim 1 wherein said substrate is made of glass.
Claim 4
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1 wherein said substrate is made of a metal.
Claim 5
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a ceramic.
Claim 6
Dependent Claim
16 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a single crystal.
Claim 7
Dependent Claim
15 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of a resin.
Claim 8
Dependent Claim
14 words
The piezoelectric crystalline film of claim 1, wherein said substrate is made of rubber.
References Cited (Backward Citations)
US3006857A
Cited
US3420763A
Cited
US3663899A
Cited
US3688223A
Cited
US3671193A
Cited
US3682826A
Cited
US3684715A
Cited
US3766041A
Cited
US3856693A
Cited
US4019074A
Cited
US4142124A
Cited
US4139678A
Cited
US4156050A
Cited
US4151324A
Cited
US4164676A
Cited
US4174421A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-21 | 1984-04-21 | 1984-10-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-21 | 1988-04-21 | 1988-10-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-21 | 1992-04-21 | 1992-10-21 | $7700.00 | Window Closed / Lapsed |