US4142124A
Expired / Lapsed
US
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Piezoelectric crystalline ZnO with 0.01 to 20.0 atomic % Mn
Assignee: Murata Manufacturing Co Ltd
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Filing: 1978-01-25
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Granted: 1979-02-27
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Expires: 1998-01-25
Abstract
Abstract Piezoelectric crystalline films which consist essentially of a crystalline zinc oxide film with a c-axis perpendicular to a substrate surface containing 0.01 to 20.0 atomic percent of manganese with or without 0.01 to 20.0 atomic percent of copper.
Inventors
- 👤 Toshio Ogawa
- 👤 Tasuku Mashio
- 👤 Hiroshi Nishiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:43
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/80; H10N30/85; H10N30/853
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
36 words
A piezoelectric crystalline film consisting essentially of a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of manganese.
Claim 2
Dependent Claim
36 words
A piezoelectric crystalline film consisting essentially of a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of manganese.
Claim 3
Dependent Claim
44 words
A piezoelectric crystalline film consisting essentially of a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of manganese and 0.01 to 20.0 atomic percent of copper.
Claim 4
Dependent Claim
44 words
A piezoelectric crystalline film consisting essentially of a crystalline zinc oxide film with a c-axis perpendicular to the substrate surface, characterized in that said crystalline zinc oxide film contains 0.01 to 20.0 atomic percent of manganese and 0.01 to 20.0 atomic percent of copper.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-02-26 | 1982-08-28 | 1983-02-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-02-26 | 1986-08-28 | 1987-02-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-02-26 | 1990-08-28 | 1991-02-27 | $7700.00 | Window Closed / Lapsed |