US5432397A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Zinc oxide piezoelectric crystal film
Assignee: Murata Manufacturing Co Ltd
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Filing: 1994-01-13
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Granted: 1995-07-11
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Expires: 2014-01-13
Abstract
Abstract Disclosed herein is a zinc oxide piezoelectric crystal film which is grown on an R-plane sapphire substrate to orient its c-axis in parallel with the substrate surface. In order to improve orientation of the zinc oxide piezoelectric crystal film used is a Zn target for forming the zinc oxide piezoelectric crystal film by sputtering contains not more than 5 percent by weight of nickel or not more than 4.5 percent by weight of iron with respect to Zn.
Inventors
- 👤 Jun Koike
- 👤 Hideharu Ieki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:27
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/076
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
89 words
A zinc oxide piezoelectric crystal film grown on a R-plane sapphire substrate to orient its c-axis in parallel with a surface of said substrate, said zinc oxide piezoelectric crystal film containing a transition metal whereby the orientation of the film on the sapphire relative to that in the absence of the transition metal is improved and wherein the transition metal includes nickel in an amount of not more than 5% based on the zinc or includes iron in an amount of not more than 4.5% based on the zinc.
Claim 2
Dependent Claim
89 words
A zinc oxide piezoelectric crystal film grown on a R-plane sapphire substrate to orient its c-axis in parallel with a surface of said substrate, said zinc oxide piezoelectric crystal film containing a transition metal whereby the orientation of the film on the sapphire relative to that in the absence of the transition metal is improved and wherein the transition metal includes nickel in an amount of not more than 5% based on the zinc or includes iron in an amount of not more than 4.5% based on the zinc.
Claim 3
Dependent Claim
17 words
A zinc oxide piezoelectric crystal film in accordance with claim 1, wherein said transition metal includes nickel.
Claim 4
Dependent Claim
29 words
A zinc oxide piezoelectric crystal film in accordance with claim 2, wherein the content of said nickel is not more than 5 percent by weight with respect to zinc.
Claim 5
Dependent Claim
32 words
A zinc oxide piezoelectric crystal film in accordance with claim 2, wherein the content of said nickel is in the range of 0.6 to 4 percent by weight with respect to zinc.
Claim 6
Dependent Claim
32 words
A zinc oxide piezoelectric crystal film in accordance with claim 2, wherein the content of said nickel is in the range of 1 to 3.1 percent by weight with respect to zinc.
Claim 7
Dependent Claim
17 words
A zinc oxide piezoelectric crystal film in accordance with claim 1, wherein said transition metal includes iron.
Claim 8
Dependent Claim
29 words
A zinc oxide piezoelectric crystal film in accordance with claim 6, wherein the content of said iron is not more than 4.5 percent by weight with respect to zinc.
Claim 9
Dependent Claim
32 words
A zinc oxide piezoelectric crystal film in accordance with claim 6, wherein the content of said iron is in the range of 0.6 to 3 percent by weight with respect to zinc.
Claim 10
Dependent Claim
32 words
A zinc oxide piezoelectric crystal film in accordance with claim 6, wherein the content of said iron is in the range of 0.9 to 2 percent by weight with respect to zinc.
References Cited (Backward Citations)
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US4164676A
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US4236095A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-10 | 1999-01-09 | 1999-07-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-10 | 2003-01-09 | 2003-07-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-10 | 2007-01-09 | 2007-07-11 | $7700.00 | Window Closed / Lapsed |