US3664867A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composite structure of zinc oxide deposited epitaxially on sapphire
Assignee: Boeing North American Inc
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Filing: 1969-11-24
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Granted: 1972-05-23
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Expires: 1989-11-24
Abstract
Abstract Composite heteroepitaxial structures of single crystal zinc oxide epitaxially deposited in a layer on a single crystal substrate of alpha-aluminum oxide (sapphire) and process for producing desired orientations of the zinc oxide single crystal layer corresponding to the orientation of the sapphire substrate surface.
Inventors
- 👤 Guido Galli
- 👤 Jesse E Coker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 23:30
CPC Classifications
C; C30; C30B; C30B23/00; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S148/00; Y10S148/115; Y10S148/148; Y10S148/15; Y10T; Y10T428/00; Y10T428/26; Y10T428/263; Y10T428/264; Y10T428/265
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
24 words
The composite according to claim 1 in which the order of said zinc oxide layer is predetermined by the orientation of the sapphire substrate.
Claim 2
Dependent Claim
28 words
The composite according to claim 2 in which the plane of orientation of said zinc oxide layer is parallel to the plane of orientation of said sapphire substrate.
Claim 3
Dependent Claim
25 words
The composite according to claim 2 in which the C-axis of said zinc oxide layer is parallel to the deposition surface of said sapphire substrate.
Claim 4
Dependent Claim
25 words
The composite according to claim 2 in which the C-axis of said deposit is normal to the orientation of the deposition surface of said substrate.
Claim 5
Dependent Claim
63 words
The composite according to claim 2 in which the orientation of the deposition surface of said substrate plane is selected in the zone including the planes (11.2), (11.3) and (11.4) or equivalent planes and the resulting orientation of the deposit of zinc oxide on said substrate is substantially parallel to the (41.2), (10.0) and (41.2), respectively, or equivalent planes (41.2), (10.0) and (41.2).
Claim 6
Dependent Claim
39 words
The composite according to claim 1 in which the deposition surface of the sapphire substrate is parallel to the (01.2) plane including equivalent planes (10.2), (11.2) and said layer is parallel to the (11.0) plane including equivalent planes (11.0).
Claim 7
Dependent Claim
17 words
The composite according to claim 1 in which said layer is greater than 3 microns in thickness.
Claim 8
Dependent Claim
98 words
A process for producing an epitaxial deposit of monocrystalline zinc oxide having bulk crystal characteristics and being substantially free of polycrystalline material on a substrate of monocrystalline sapphire comprising: a. disposing a zinc oxide source material and said sapphire substrate for vapor transport; b. heating said source material to a temperature of from 200* C to the melting point of zinc oxide to produce zinc oxide vapor; and c. transporting said zinc oxide vapor by means of a gas taken from the group consisting of hydrogen, helium, argon and nitrogen to deposit zinc oxide epitaxially on said substrate.
Claim 9
Dependent Claim
21 words
The process according to claim 9 in which said gas is hydrogen containing 0.1 to 20 percent by volume hydrogen chloride.
Claim 10
Dependent Claim
29 words
The process of claim 9 in which said substrate is provided with a deposition surface having an orientation selected to produce a zinc oxide deposit having a predetermined orientation.
Claim 11
Dependent Claim
33 words
The process of claim 9 in which the temperature of the zinc oxide source material is maintained at approximately 825* C and the temperature of the substrate is maintained at approximately 775* C.
References Cited (Backward Citations)
US3294660A
Cited
US3413145A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-23 | 1975-11-22 | 1976-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-23 | 1979-11-22 | 1980-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-23 | 1983-11-22 | 1984-05-23 | $7700.00 | Window Closed / Lapsed |