US5576589A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Diamond surface acoustic wave devices
Assignee: Kobe Steel USA Inc
•
Filing: 1994-10-13
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Granted: 1996-11-19
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Expires: 2014-10-13
Abstract
Abstract A high frequency Surface Acoustic Wave (SAW) device includes a highly oriented diamond layer adjacent a piezoelectric layer. In one embodiment, laterally spaced apart piezoelectric layers or portions confine propagation of the wave within the diamond layer. Interdigitated electrodes may be provided by electrically conductive metal lines and/or by heavily doped surface portions of the diamond layer. Undesirable reflections may be reduced by providing the piezoelectric layer with opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation. The surface acoustic wave device may be used as a filter, amplifier, convolver, and phase shifter. Methods for making the surface acoustic wave device are also disclosed.
Inventors
- 👤 David L. Dreifus
- 👤 Michelle L. Hartsell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 01:56
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/02818; H03H9/02842; H03H9/0285
Claims Analysis
Total Claims: 58
Claim 1
Independent Claim
92 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; and at least one interdigitated electrode on said piezoelectric layer; wherein said piezoelectric layer comprises first and second portions in laterally spaced apart relation, and wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on respective first and second piezoelectric layer portions.
Claim 2
Dependent Claim
92 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; and at least one interdigitated electrode on said piezoelectric layer; wherein said piezoelectric layer comprises first and second portions in laterally spaced apart relation, and wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on respective first and second piezoelectric layer portions.
Claim 3
Dependent Claim
26 words
A surface acoustic wave device according to claim 1 further comprising a single crystal nondiamond substrate on said highly oriented diamond layer opposite said piezoelectric layer.
Claim 4
Dependent Claim
28 words
A surface acoustic wave device according to claim 1 wherein said at least one interdigitated electrode is positioned between said highly oriented diamond layer and said piezoelectric layer.
Claim 5
Dependent Claim
28 words
A surface acoustic wave device according to claim 1 wherein said at least one interdigitated electrode is positioned on said piezoelectric layer opposite said highly oriented diamond layer.
Claim 6
Dependent Claim
82 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; and at least one interdigitated electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent said piezoelectric layer.
Claim 7
Dependent Claim
82 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; and at least one interdigitated electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent said piezoelectric layer.
Claim 8
Dependent Claim
72 words
A surface acoustic wave device according to claim 5 wherein said at least one interdigitated electrode comprises a pair of interdigitated electrodes on said piezoelectric layer adjacent opposing ends thereof, wherein said pair of interdigitated electrodes define an axis of surface acoustic wave propagation therebetween, and wherein said piezoelectric layer has opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce, undesirable wave reflections.
Claim 9
Dependent Claim
122 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; at least one interdigitated electrode on said piezoelectric layer; and an acoustic wave absorber adjacent at least one end of said piezoelectric layer wherein said acoustic wave absorber comprises a resistor on said piezoelectric layer and wherein said resistor comprises a doped diamond surface portion which is positioned on said piezoelectric layer so that said doped surface portion of said diamond layer defining a resistor electrically terminates said piezoelectric layer thereby reducing surface acoustic wave reflections.
Claim 10
Dependent Claim
122 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; at least one interdigitated electrode on said piezoelectric layer; and an acoustic wave absorber adjacent at least one end of said piezoelectric layer wherein said acoustic wave absorber comprises a resistor on said piezoelectric layer and wherein said resistor comprises a doped diamond surface portion which is positioned on said piezoelectric layer so that said doped surface portion of said diamond layer defining a resistor electrically terminates said piezoelectric layer thereby reducing surface acoustic wave reflections.
Claim 11
Dependent Claim
126 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; at least one interdigited electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on said piezoelectric layer in laterally spaced apart relation; an insulating layer on said piezoelectric layer positioned between said first and second interdigitated electrodes; a semiconducting layer on said insulating layer opposite said piezoelectric layer; and a pair of amplification electrodes on said semiconducting layer so that said surface acoustic wave device defines a surface acoustic wave amplifier.
Claim 12
Dependent Claim
126 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer; at least one interdigited electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on said piezoelectric layer in laterally spaced apart relation; an insulating layer on said piezoelectric layer positioned between said first and second interdigitated electrodes; a semiconducting layer on said insulating layer opposite said piezoelectric layer; and a pair of amplification electrodes on said semiconducting layer so that said surface acoustic wave device defines a surface acoustic wave amplifier.
Claim 13
Dependent Claim
124 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer;. at least one interdigitated electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on said piezoelectric layer in laterally spaced apart relation; a third electrode on said piezoelectric layer between said first and second interdigitated electrodes; and a fourth electrode on said diamond layer opposite said third electrode so that the surface acoustic wave device defines one of a surface acoustic wave convolver and a surface acoustic wave phase-shifter.
Claim 14
Dependent Claim
124 words
A surface acoustic wave device comprising: a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°; a piezoelectric layer on said highly oriented diamond layer;. at least one interdigitated electrode on said piezoelectric layer wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes on said piezoelectric layer in laterally spaced apart relation; a third electrode on said piezoelectric layer between said first and second interdigitated electrodes; and a fourth electrode on said diamond layer opposite said third electrode so that the surface acoustic wave device defines one of a surface acoustic wave convolver and a surface acoustic wave phase-shifter.
Claim 15
Dependent Claim
47 words
A surface acoustic wave device according to claim 9 wherein said at least one interdigitated electrode comprises a plurality of electrically conductive lines each having a width of not less than about 1 μm and a spacing between adjacent lines of not less than about 1 μm.
Claim 16
Dependent Claim
28 words
A surface acoustic wave device according to claim 10 wherein each of said electrically conductive lines comprises one of aluminum, gold, platinum, a refractory metal, and alloys thereof.
Claim 17
Dependent Claim
61 words
A surface acoustic wave device according to claim 5 wherein said piezoelectric layer comprises one of ZnO, AlN, PbZrO 3 , PbTiO 3 , LaZrO 3 , LaZrO 3 , LiTaO 3 , LiNbO 3 , SiO 2 , Ta 2 O 5 , Nb 2 O 5 , BeO, Li 2 B 4 O 7 , ZnS, ZnSe, and GaAs.
Claim 18
Dependent Claim
29 words
A surface acoustic wave device according to claim 5 further comprising a ground plane electrode on at least one of said highly oriented diamond layer and said piezoelectric layer.
Claim 19
Dependent Claim
20 words
A surface acoustic wave device according to claim 5 further comprising a thermistor formed in said highly oriented diamond layer.
Claim 20
Dependent Claim
83 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; and first and second interdigitated electrodes on respective first and second piezoelectric layer portions; wherein said first and second interdigitated electrodes define an axis of surface acoustic wave propagation therebetween, and wherein said piezoelectric layer portions have respective opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce undesirable wave reflections.
Claim 21
Dependent Claim
83 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; and first and second interdigitated electrodes on respective first and second piezoelectric layer portions; wherein said first and second interdigitated electrodes define an axis of surface acoustic wave propagation therebetween, and wherein said piezoelectric layer portions have respective opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce undesirable wave reflections.
Claim 22
Dependent Claim
45 words
A surface acoustic wave device according to claim 15 wherein said diamond layer comprises a highly oriented diamond layer having a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°.
Claim 23
Dependent Claim
30 words
A surface acoustic wave device according to claims 15 wherein said first and second interdigitated electrodes are positioned between respective first and second piezoelectric layer portions and said diamond layer.
Claim 24
Dependent Claim
30 words
A surface acoustic wave device according to claim 15 wherein said first and second interdigitated electrodes are positioned on respective first and second piezoelectric layer portions opposite said diamond layer.
Claim 25
Dependent Claim
31 words
A surface acoustic wave device according to claim 15 further comprising a ground plane electrode on at least one of said diamond layer, and said first and second piezoelectric layer portions.
Claim 26
Dependent Claim
89 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; an insulating layer on said diamond layer between said first and second interdigitated electrodes; a semiconducting layer on said insulating layer opposite said first and second piezoelectric layer portions; and a pair of amplification electrodes on said semiconducting layer so that said surface acoustic wave device defines a surface acoustic wave amplifier.
Claim 27
Dependent Claim
89 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; an insulating layer on said diamond layer between said first and second interdigitated electrodes; a semiconducting layer on said insulating layer opposite said first and second piezoelectric layer portions; and a pair of amplification electrodes on said semiconducting layer so that said surface acoustic wave device defines a surface acoustic wave amplifier.
Claim 28
Dependent Claim
66 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; and first and second interdigitated electrodes on respective first and second piezoelectric layer portion; wherein each of said pair of interdigitated electrodes comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent respective piezoelectric layer portions.
Claim 29
Dependent Claim
66 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; and first and second interdigitated electrodes on respective first and second piezoelectric layer portion; wherein each of said pair of interdigitated electrodes comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent respective piezoelectric layer portions.
Claim 30
Dependent Claim
47 words
A surface acoustic wave device according to claim 21 wherein said first and second interdigitated electrodes each comprise a plurality of electrically conductive lines having a width of not less than about 1 μm and a spacing between adjacent lines of not less than about 1 μm.
Claim 31
Dependent Claim
26 words
A surface acoustic wave device according to claim 21 further comprising a single crystal nondiamond substrate on said highly oriented diamond layer opposite said piezoelectric layer.
Claim 32
Dependent Claim
54 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; and an acoustic wave absorber adjacent an end of at least one of said piezoelectric layer portions.
Claim 33
Dependent Claim
54 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; and an acoustic wave absorber adjacent an end of at least one of said piezoelectric layer portions.
Claim 34
Dependent Claim
45 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; and a thermistor formed in said diamond layer.
Claim 35
Dependent Claim
45 words
A surface acoustic wave device comprising: a diamond layer; first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation; first and second interdigitated electrodes on respective first and second piezoelectric layer portions; and a thermistor formed in said diamond layer.
Claim 36
Dependent Claim
68 words
A surface acoustic wave device comprising: a diamond layer having a predetermined pattern of electrically conductive highly doped surface portions defining at least one interdigitated electrode, said predetermined pattern of highly doped surface portions of said diamond layer having a dopant concentration of greater than about 10 19 atoms cm -3 ; and a piezoelectric layer on said diamond layer and overlying said at least one interdigitated electrode.
Claim 37
Dependent Claim
68 words
A surface acoustic wave device comprising: a diamond layer having a predetermined pattern of electrically conductive highly doped surface portions defining at least one interdigitated electrode, said predetermined pattern of highly doped surface portions of said diamond layer having a dopant concentration of greater than about 10 19 atoms cm -3 ; and a piezoelectric layer on said diamond layer and overlying said at least one interdigitated electrode.
Claim 38
Dependent Claim
45 words
A surface acoustic wave device according to claim 26 wherein said diamond layer comprises a highly oriented diamond layer having a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°.
Claim 39
Dependent Claim
26 words
A surface acoustic wave device according to claim 27 further comprising a single crystal nondiamond substrate on said highly oriented diamond layer opposite said piezoelectric layer.
Claim 40
Dependent Claim
72 words
A surface acoustic wave device according to claim 26 wherein said at least one interdigitated electrode comprises a pair of interdigitated electrodes on said piezoelectric layer adjacent opposing ends thereof, wherein said pair of interdigitated electrodes define an axis of surface acoustic wave propagation therebetween, and wherein said piezoelectric layer has opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce undesirable wave reflections.
Claim 41
Dependent Claim
36 words
A surface acoustic wave device according to claim 26 wherein said at least one interdigitated electrode comprises first and second interdigitated electrodes positioned between said piezoelectric layer and said diamond layer in laterally spaced apart relation.
Claim 42
Dependent Claim
26 words
A surface acoustic wave device according to claim 26 further comprising electrically conductive lines on said predetermined pattern of electrically conductive highly doped diamond surface portions.
Claim 43
Dependent Claim
27 words
A surface acoustic wave device according to claim 26 further comprising a ground plane electrode on at least one of said diamond layer and said piezoelectric layer.
Claim 44
Dependent Claim
24 words
A surface acoustic wave device according to claim 26 further comprising at least one acoustic wave absorber adjacent an end of said piezoelectric layer.
Claim 45
Dependent Claim
92 words
A surface acoustic wave device comprising: a diamond layer; a piezoelectric layer on said diamond layer; and at least one interdigitated electrode on said piezoelectric layer, said at least one interdigitated electrode defining an axis of surface acoustic wave propagation, said piezoelectric layer having respective opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce undesirable wave reflections wherein said at least one interdigitated electrode comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent said piezoelectric layer.
Claim 46
Dependent Claim
92 words
A surface acoustic wave device comprising: a diamond layer; a piezoelectric layer on said diamond layer; and at least one interdigitated electrode on said piezoelectric layer, said at least one interdigitated electrode defining an axis of surface acoustic wave propagation, said piezoelectric layer having respective opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation to reduce undesirable wave reflections wherein said at least one interdigitated electrode comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer adjacent said piezoelectric layer.
Claim 47
Dependent Claim
42 words
A surface acoustic wave device according to claim 34 wherein said at least one interdigitated electrode comprises a pair of interdigitated electrodes aligned along the axis of surface acoustic wave propagation and positioned adjacent respective opposing canted ends of said piezoelectric layer.
Claim 48
Dependent Claim
43 words
A surface acoustic wave device according to claim 34 wherein said diamond layer also has respective opposing ends canted at an angle from orthogonal to the axis of surface acoustic wave propagation and corresponding to said piezoelectric layer to reduce undesirable wave reflections.
Claim 49
Dependent Claim
28 words
A surface acoustic wave device according to claim 34 wherein both said diamond and piezoelectric layers have respective opposing sides parallel to the axis of acoustic wave propagation.
Claim 50
Dependent Claim
45 words
A surface acoustic wave device according to claim 34 wherein said diamond layer comprises a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°.
Claim 51
Dependent Claim
28 words
A surface acoustic wave device according to claim 34 wherein said at least one interdigitated electrode is positioned between said highly oriented diamond layer and said piezoelectric layer.
Claim 52
Dependent Claim
28 words
A surface acoustic wave device according to claim 34 wherein said at least one interdigitated electrode is positioned on said piezoelectric layer opposite said highly oriented diamond layer.
Claim 53
Dependent Claim
46 words
A surface acoustic wave device according to claim 34 wherein said at least one interdigitated electrode comprises a plurality of electrically conductive lines having a width of not less than about 1 μm and a spacing between adjacent lines of not less than about 1 μm.
Claim 54
Dependent Claim
71 words
A surface acoustic wave device comprising: a diamond layer having a predetermined doped surface portion defining an electrical resistor for absorbing an acoustic wave; a piezoelectric layer on said diamond layer and overlying said predetermined doped surface portion so that said doped surface of said diamond layer defining a resistor electrically terminates said piezoelectric layer thereby reducing surface acoustic wave reflections; and at least one interdigitated electrode on said piezoelectric layer.
Claim 55
Dependent Claim
71 words
A surface acoustic wave device comprising: a diamond layer having a predetermined doped surface portion defining an electrical resistor for absorbing an acoustic wave; a piezoelectric layer on said diamond layer and overlying said predetermined doped surface portion so that said doped surface of said diamond layer defining a resistor electrically terminates said piezoelectric layer thereby reducing surface acoustic wave reflections; and at least one interdigitated electrode on said piezoelectric layer.
Claim 56
Dependent Claim
31 words
A surface acoustic wave device according to claim 42 wherein said at least one interdigitated electrode comprises a predetermined pattern of electrically conductive highly doped surface portions of said diamond layer.
Claim 57
Dependent Claim
93 words
A surface acoustic wave device according to claim 42 wherein said piezoelectric layer comprises first and second piezoelectric layer portions on said diamond layer in laterally spaced apart relation, and wherein said at least one interdigitated electrode comprises a first interdigitated electrode on said first piezoelectric layer portion and a second interdigitated electrode on said second piezoelectric layer portion such that a surface acoustic wave propagates between said first and second piezoelectric layer portions only through said diamond layer at a velocity of surface acoustic wave propagation determined only by said diamond layer.
Claim 58
Dependent Claim
45 words
A surface acoustic wave device according to claim 42 wherein said diamond layer comprises a highly oriented diamond layer comprising a plurality of side-by-side columnar diamond grains each oriented relative to one another and with a tilt and azimuthal misorientation of less than about 8°.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-19 | 2000-05-20 | 2000-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-19 | 2004-05-20 | 2004-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-19 | 2008-05-20 | 2008-11-19 | $7700.00 | Window Closed / Lapsed |