US4952832A
Expired / Lapsed
US
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Surface acoustic wave device
Assignee: Seiko Epson Corp
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Filing: 1989-10-24
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Granted: 1990-08-28
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Expires: 2009-10-24
Abstract
Abstract A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes, can be used in an extremely high frequency region.
Inventors
- 👤 Takahiro Imai
- 👤 Hideaki Nakahata
- 👤 Naoji Fujimori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:08
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
49 words
A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes.
Claim 2
Dependent Claim
49 words
A surface acoustic wave device which comprises a piezoelectric layer, a carbonaceous layer which is selected from the group consisting of a diamond layer and a diamond-like carbon layer and formed on at least one surface of the piezoelectric layer, and at least a pair of interdigital transducer electrodes.
Claim 3
Dependent Claim
18 words
The surface acoustic wave device according to claim 1, which further comprises a substrate under the carbonaceous layer.
Claim 4
Dependent Claim
19 words
The surface acoustic wave device according to claim 1, wherein the diamond layer is made of diamond single crystal.
Claim 5
Dependent Claim
19 words
The surface acoustic wave device according to claim 1, wherein the diamond layer is produced by vapor phase deposition.
Claim 6
Dependent Claim
20 words
The surface acoustic wave device according to claim 1, wherein the whole diamond layer is made of electrically insulating diamond.
Claim 7
Dependent Claim
47 words
The surface acoustic wave device according to claim 1, wherein at least a part of the diamond layer is made of semiconductive diamond which contains at least one impurity element selected from the group consisting of B, P, Al and S and/or lattice defects by corpuscular radiation.
Claim 8
Dependent Claim
66 words
The surface acoustic wave device according to claim 1, wherein the piezoelectric layer comprises at least one compound selected from the group consisting of ZnO, AlN, Pb(Zr,Ti)O 3 , (Pb,La)(Zr,Ti)O 3 , LiTaO 3 , LiNbO 3 , SiO 2 , Ta 2 O 5 , Nb 2 O 5 , BeO, Li 2 B 4 O 7 , KNbO 3 , ZnS, ZnSe and CdS.
Claim 9
Dependent Claim
18 words
The surface acoustic wave device according to claim 1, wherein the piezoelectric layer is made of single crystal.
Claim 10
Dependent Claim
30 words
The surface acoustic wave device according to claim 1, wherein the electrodes are interdigital electrodes, and the device has the configuration of piezoelectric layer/interdigital electrodes/diamond layer or diamond-like carbon layer/substrate.
Claim 11
Dependent Claim
35 words
The surface acoustic wave device according to claim 9, which has an electrode for short circuit between the substrate and the diamond layer or diamond-like carbon layer and/or on a surface of the piezoelectric layer.
Claim 12
Dependent Claim
30 words
The surface acoustic wave device according to claim 1, wherein the electrodes are interdigital electrodes, and the device has the configuration of interdigital electrodes/piezoelectric layer/diamond layer or diamond-like carbon layer/substrate.
Claim 13
Dependent Claim
40 words
The surface acoustic wave device according to claim 11, which has an electrode for short circuit between the substrate and the diamond layer or diamond-like carbon layer and/or between the diamond layer or diamond-like carbon layer and the piezoelectric layer.
References Cited (Backward Citations)
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US4571519A
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Cited
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-27 | 1994-02-26 | 1994-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-27 | 1998-02-26 | 1998-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-27 | 2002-02-26 | 2002-08-28 | $7700.00 | Window Closed / Lapsed |