US4752709A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Surface acoustic wave device
Assignee: Murata Manufacturing Co Ltd
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Filing: 1987-01-29
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Granted: 1988-06-21
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Expires: 2007-01-29
Abstract
Abstract A surface acoustic wave device comprising a surface acoustic wave substrate member composed by forming an aluminum oxide film and a thin zinc oxide film successively on a glass substrate. The thickness h 1 of the aluminum oxide film and the thickness h 2 of the zinc oxide film are set within ranges of 0.1≦h 1 /λ≦10 and 0.05≦h 2 /λ≦0.35 (where λ is representative of wavelength of Sezawa wave) respectively, thereby to utilize Sezawa wave or a similar mode wave transmitted on the surface acoustic wave substrate member in multi-layer structure.
Inventors
- 👤 Satoru Fujishima
- 👤 Hideharu Ieki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 09:22
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02574; H03H9/125; H03H9/145; H03H9/14517; H03H9/1452
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
145 words
A surface acoustic wave device comprising: a glass substrate; an oxide film formed on said substrate; and a piezoelectric thin film formed on the oxide film; a thickness h 1 of said oxide film and thickness h 2 of said piezoelectric thin film being set within ranges of 0.1≦h 1 /λ≦10 and 0.05≦h 2 /λ≦0.35 respectively, thereby to utilize Sezawa wave transmitted on said surface acoustic wave device in said multi-layer structure, wherein λ is representative of wavelength of said Sezawa wave; and further comprising at least one interdigital transducer formed on a surface of said piezoelectric film, for receiving a signal and generating a surface acoustic wave in said device in response to said signal; wherein said oxide film comprises a thin film of aluminum oxide (Al 2 O 3 ), and said piezoelectric thin film comprises a thin film of zinc oxide (ZnO).
Claim 2
Dependent Claim
145 words
A surface acoustic wave device comprising: a glass substrate; an oxide film formed on said substrate; and a piezoelectric thin film formed on the oxide film; a thickness h 1 of said oxide film and thickness h 2 of said piezoelectric thin film being set within ranges of 0.1≦h 1 /λ≦10 and 0.05≦h 2 /λ≦0.35 respectively, thereby to utilize Sezawa wave transmitted on said surface acoustic wave device in said multi-layer structure, wherein λ is representative of wavelength of said Sezawa wave; and further comprising at least one interdigital transducer formed on a surface of said piezoelectric film, for receiving a signal and generating a surface acoustic wave in said device in response to said signal; wherein said oxide film comprises a thin film of aluminum oxide (Al 2 O 3 ), and said piezoelectric thin film comprises a thin film of zinc oxide (ZnO).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-06-21 | 1991-12-21 | 1992-06-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-06-21 | 1995-12-21 | 1996-06-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-06-21 | 1999-12-21 | 2000-06-21 | $7700.00 | Window Closed / Lapsed |